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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 21 — Oct. 11, 2010
  • pp: 22515–22526

Parametric smoothing model for visco-elastic polishing tools

Dae Wook Kim, Won Hyun Park, Hyun Kyoung An, and James H. Burge  »View Author Affiliations


Optics Express, Vol. 18, Issue 21, pp. 22515-22526 (2010)
http://dx.doi.org/10.1364/OE.18.022515


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Abstract

A parametric smoothing model is developed to quantitatively describe the smoothing action of polishing tools that use visco-elastic materials. These materials flow to conform to the aspheric shape of the workpieces, yet behave as a rigid solid for short duration caused by tool motion over surface irregularities. The smoothing effect naturally corrects the mid-to-high frequency errors on the workpiece while a large polishing lap still removes large scale errors effectively in a short time. Quantifying the smoothing effect allows improvements in efficiency for finishing large precision optics. We define normalized smoothing factor SF which can be described with two parameters. A series of experiments using a conventional pitch tool and the rigid conformal (RC) lap was performed and compared to verify the parametric smoothing model. The linear trend of the SF function was clearly verified. Also, the limiting minimum ripple magnitude PVmin from the smoothing actions and SF function slope change due to the total compressive stiffness of the whole tool were measured. These data were successfully fit using the parametric smoothing model.

© 2010 OSA

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(220.5450) Optical design and fabrication : Polishing

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: August 20, 2010
Revised Manuscript: October 1, 2010
Manuscript Accepted: October 7, 2010
Published: October 8, 2010

Citation
Dae Wook Kim, Won Hyun Park, Hyun Kyoung An, and James H. Burge, "Parametric smoothing model for visco-elastic polishing tools," Opt. Express 18, 22515-22526 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-21-22515


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