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Restraint of tool path ripple based on surface error distribution and process parameters in deterministic finishing |
Optics Express, Vol. 18, Issue 22, pp. 22973-22981 (2010)
http://dx.doi.org/10.1364/OE.18.022973
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Abstract
The influence from the regular tool path to micro fabrication errors in deterministic finishing is studied through the simulations and experiments. The random pitch tool path based on the surface error distribution and the process parameters is designed to reduce this residual error when adopting the regular path to achieve the corrective polish. A nucleated glass flat mirror is polished with this method on the experimental installation UPF700-7 developed by ourselves. The surface accuracy is improved from the initial λ/30(RMS, 90%aperture, λ = 632.8nm) to the final λ/200 in 5 minutes and the medium-high spatial frequency errors induced by the regular path is restricted well at the same time. The accuracy of the simulation and the validity of the random pitch tool path are both proved through the experiments.
© 2010 OSA
OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(220.5450) Optical design and fabrication : Polishing
ToC Category:
Optical Design and Fabrication
History
Original Manuscript: June 8, 2010
Revised Manuscript: September 19, 2010
Manuscript Accepted: September 24, 2010
Published: October 15, 2010
Citation
Hao Hu, Yifan Dai, and Xiaoqiang Peng, "Restraint of tool path ripple based on surface error distribution and process parameters in deterministic finishing," Opt. Express 18, 22973-22981 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-22-22973
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