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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 22 — Oct. 25, 2010
  • pp: 23296–23301

Integrated optic glass microcantilevers with Bragg grating interrogation

Lewis G. Carpenter, Christopher Holmes, Helen L. Rogers, Peter G.R. Smith, and James C. Gates  »View Author Affiliations

Optics Express, Vol. 18, Issue 22, pp. 23296-23301 (2010)

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A new method for creating microcantilevers in glass allows integration of optical waveguides and Bragg gratings. Devices are fabricated by high precision sawing, followed by direct UV writing of waveguides with Bragg gratings and then chemical etching to release the freestanding glass structures. Optical measurement of the Bragg gratings together with piezo-actuation allows the mechanical resonances to be probed. By measuring the mechanical damping coefficient of the cantilever as a function of the gas pressure in a vacuum system the transition from the viscous to the molecular flow regime can be observed.

© 2010 OSA

OCIS Codes
(220.4610) Optical design and fabrication : Optical fabrication
(060.3735) Fiber optics and optical communications : Fiber Bragg gratings

ToC Category:
Optical Design and Fabrication

Original Manuscript: August 5, 2010
Revised Manuscript: September 3, 2010
Manuscript Accepted: September 6, 2010
Published: October 20, 2010

Lewis G. Carpenter, Christopher Holmes, Helen L. Rogers, Peter G.R. Smith, and James C. Gates, "Integrated optic glass microcantilevers with Bragg grating interrogation," Opt. Express 18, 23296-23301 (2010)

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