Optics InfoBase > Optics Express > Volume 18 > Issue 22 > Page 23420
|
Reconstruction of an astigmatic hard X-ray beam and alignment of K-B mirrors from ptychographic coherent diffraction dataCameron M. Kewish, Manuel Guizar-Sicairos, Chian Liu, Jun Qian, Bing Shi, Christa Benson, Ali M. Khounsary, Joan Vila-Comamala, Oliver Bunk, James R. Fienup, Albert T. Macrander, and Lahsen Assoufid »View Author Affiliations
Cameron M. Kewish,1,5,*
Manuel Guizar-Sicairos,2,6
Chian Liu,3
Jun Qian,3
Bing Shi,3
Christa Benson,4
Ali M. Khounsary,4
Joan Vila-Comamala,1
Oliver Bunk,1
James R. Fienup,2
Albert T. Macrander,3
and Lahsen Assoufid3
1Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland 2The Institute of Optics, University of Rochester, Rochester, New York 14627, USA 3X-ray Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA 4APS Engineering Support Division, Argonne National Laboratory, Argonne, Illinois 60439, USA 5Current address: Synchrotron SOLEIL, Saint Aubin BP-48, F-91192 Gif-sur-Yvette, France 6Current address: Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland *Corresponding author: Cameron.Kewish@synchrotron-soleil.fr |
Optics Express, Vol. 18, Issue 22, pp. 23420-23427 (2010)
http://dx.doi.org/10.1364/OE.18.023420
View Full Text Article
Enhanced HTML 
Acrobat PDF (1127 KB)
Abstract
We have used coherent X-ray diffraction experiments to characterize both the 1-D and 2-D foci produced by nanofocusing Kirkpatrick-Baez (K-B) mirrors, and we find agreement. Algorithms related to ptychography were used to obtain a 3-D reconstruction of a focused hard X-ray beam waist, using data measured when the mirrors were not optimally aligned. Considerable astigmatism was evident in the reconstructed complex wavefield. Comparing the reconstructed wavefield for a single mirror with a geometrical projection of the wavefront errors expected from optical metrology data allowed us to diagnose a 40 μrad misalignment in the incident angle of the first mirror, which had occurred during the experiment. Good agreement between the reconstructed wavefront obtained from the X-ray data and off-line metrology data obtained with visible light demonstrates the usefulness of the technique as a metrology and alignment tool for nanofocusing X-ray optics.
© 2010 OSA
OCIS Codes
(100.5070) Image processing : Phase retrieval
(340.0340) X-ray optics : X-ray optics
(340.7470) X-ray optics : X-ray mirrors
(140.3295) Lasers and laser optics : Laser beam characterization
(110.3200) Imaging systems : Inverse scattering
ToC Category:
X-ray Optics
History
Original Manuscript: August 4, 2010
Revised Manuscript: September 13, 2010
Manuscript Accepted: September 26, 2010
Published: October 22, 2010
Citation
Cameron M. Kewish, Manuel Guizar-Sicairos, Chian Liu, Jun Qian, Bing Shi, Christa Benson, Ali M. Khounsary, Joan Vila-Comamala, Oliver Bunk, James R. Fienup, Albert T. Macrander, and Lahsen Assoufid, "Reconstruction of an astigmatic hard X-ray beam and alignment of K-B mirrors from ptychographic coherent diffraction data," Opt. Express 18, 23420-23427 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-22-23420
Sort: Author | Year | Journal | Reset
References
- H. M. Quiney, A. G. Peele, Z. Cai, D. Paterson, and K. A. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys. 2(2), 101–104 (2006). [CrossRef]
- H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “At-wavelength figure metrology of hard X-ray focusing mirrors,” Rev. Sci. Instrum. 77(6), 063712 (2006). [CrossRef]
- P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 321(5887), 379–382 (2008). [CrossRef] [PubMed]
- M. Guizar-Sicairos and J. R. Fienup, “Phase retrieval with transverse translation diversity: a nonlinear optimization approach,” Opt. Express 16(10), 7264–7278 (2008). [CrossRef] [PubMed]
- P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy 109(4), 338–343 (2009). [CrossRef] [PubMed]
- A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy 109(10), 1256–1262 (2009). [CrossRef] [PubMed]
- M. Guizar-Sicairos and J. R. Fienup, “Measurement of coherent X-ray focused beams by phase retrieval with transverse translation diversity,” Opt. Express 17(4), 2670–2685 (2009). [CrossRef] [PubMed]
- C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110(4), 325–329 (2010). [CrossRef] [PubMed]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- M. Guizar-Sicairos, K. Evans-Lutterodt, A. F. Isakovic, A. Stein, J. B. Warren, A. R. Sandy, S. Narayanan, and J. R. Fienup, “One-dimensional hard X-ray field retrieval using a moveable structure,” Opt. Express 18(17), 18374–18382 (2010). [CrossRef] [PubMed]
- A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori, K. Yamauchi, K. Yamamura, and A. Saito, “Deterministic retrieval of surface waviness by means of topography with coherent X-rays,” J. Synchrotron Radiat. 9(Pt 4), 223–228 (2002). [CrossRef] [PubMed]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-X-ray beam totally reflected by mirror optics,” Appl. Opt. 44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- C. M. Kewish, L. Assoufid, A. T. Macrander, and J. Qian, “Wave-optical simulation of hard-X-ray nanofocusing by precisely figured elliptical mirrors,” Appl. Opt. 46(11), 2010–2021 (2007). [CrossRef] [PubMed]
- C. M. Kewish, A. T. Macrander, L. Assoufid, and J. Qian, “Comparison of two methods for simulation of hard X-ray nanofocusing by elliptical mirrors,” Nucl. Instrum. Methods Phys. Res. A 582(1), 138–141 (2007). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an X-ray nanobeam,” Phys. Rev. A 77(1), 015812 (2008). [CrossRef]
- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005). [CrossRef] [PubMed]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-ray nanoprobe based on refractive X-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
- H.-C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, “Nanometer linear focusing of hard x rays by a multilayer Laue lens,” Phys. Rev. Lett. 96(12), 127401 (2006). [CrossRef] [PubMed]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard X-rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
- I. K. Robinson, F. Pfeiffer, I. A. Vartanyants, Y. Sun, and Y. Xia, “Enhancement of coherent X-ray diffraction from nanocrystals by introduction of X-ray optics,” Opt. Express 11(19), 2329–2334 (2003). [CrossRef] [PubMed]
- Y. Takahashi, Y. Nishino, H. Mimura, R. Tsutsumi, H. Kubo, T. Ishikawa, and K. Yamauchi, “Feasibility study of high-resolution coherent diffraction microscopy using synchrotron X-rays focused by Kirkpatrick-Baez mirrors,” J. Appl. Phys. 105(8), 083106 (2009). [CrossRef]
- K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum. 73(11), 4028–4033 (2002). [CrossRef]
- C. Liu, L. Assoufid, R. Conley, A. T. Macrander, G. E. Ice, and J. Z. Tischler, “Profile coating and its application for Kirkpatrick-Baez mirrors,” Opt. Eng. 42(12), 3622–3628 (2003). [CrossRef]
- G. R. Brady, M. Guizar-Sicairos, and J. R. Fienup, “Optical wavefront measurement using phase retrieval with transverse translation diversity,” Opt. Express 17(2), 624–639 (2009). [CrossRef] [PubMed]
- F. Pfeiffer, O. Bunk, C. Schulze-Briese, A. Diaz, T. Weitkamp, C. David, J. F. van der Veen, I. Vartanyants, and I. K. Robinson, “Shearing interferometer for quantifying the coherence of hard X-ray beams,” Phys. Rev. Lett. 94(16), 164801 (2005). [CrossRef] [PubMed]
- S. Gorelick, V. A. Guzenko, J. Vila-Comamala, and C. David, “Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating,” Nanotechnology 21(29), 295303 (2010). [CrossRef] [PubMed]
- Manufactured by Dectris Ltd.: Neuenhoferstrasse 107, CH-5400 Baden, Switzerland. Model: PILATUS 2M.
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- P. Kraft, A. Bergamaschi, Ch. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16(Pt 3), 368–375 (2009). [CrossRef] [PubMed]
- V. Elser, “Phase retrieval by iterated projections,” J. Opt. Soc. Am. A 20(1), 40–55 (2003). [CrossRef]
- V. Elser, I. Rankenburg, and P. Thibault, “Searching with iterated maps,” Proc. Natl. Acad. Sci. U.S.A. 104(2), 418–423 (2007). [CrossRef] [PubMed]
Anderson, E. H.
Assoufid, L.
Attwood, D. T.
Bergamaschi, A.
Boye, P.
Brady, G. R.
Broennimann, Ch.
Bunk, O.
Burghammer, M.
Cai, Z.
Chao, W.
Conley, R.
David, C.
Diaz, A.
Dierolf, M.
Dinapoli, R.
Eikenberry, E. F.
Elser, V.
Endo, K.
Evans-Lutterodt, K.
Feldkamp, J.
Feldkamp, J. M.
Fienup, J. R.
Giewekemeyer, K.
Gorelick, S.
Guizar-Sicairos, M.
Gulden, J.
Guzenko, V. A.
Handa, S.
Harteneck, B. D.
Henrich, B.
Hoppe, R.
Horisberger, R.
Huelsen, G.
Ice, G. E.
Inagaki, K.
Isakovic, A. F.
Ishikawa, T.
Jefimovs, K.
Johnson, I.
Kang, H.-C.
Kewish, C. M.
Kimura, T.
Kraft, P.
Kubo, H.
Küchler, M.
Kurapova, O.
Lengeler, B.
Liddle, J. A.
Liu, C.
Macrander, A. T.
Maiden, A. M.
Mancuso, A. P.
Maser, J.
Matsuyama, S.
Menzel, A.
Mimura, H.
Mori, Y.
Mozzanica, A.
Narayanan, S.
Nishino, Y.
Nugent, K. A.
Paterson, D.
Patommel, J.
Peele, A. G.
Pfeiffer, F.
Pohl, E.
Qian, J.
Quiney, H. M.
Rankenburg, I.
Riekel, C.
Robinson, I. K.
Rodenburg, J. M.
Saito, A.
Salditt, T.
Samberg, D.
Sandy, A. R.
Sano, Y.
Schlepütz, C. M.
Schmitt, B.
Schöder, S.
Schroer, C. G.
Schropp, A.
Schulze-Briese, C.
Souvorov, A.
Stein, A.
Stephan, S.
Stephenson, G. B.
Sun, Y.
Suzuki, M.
Takahashi, Y.
Tamasaku, K.
Thibault, P.
Tischler, J. Z.
Tomizaki, T.
Toyokawa, H.
Tsutsumi, R.
van der Hart, A.
van der Veen, J. F.
Vartanyants, I.
Vartanyants, I. A.
Vila-Comamala, J.
Vincze, L.
Vogt, S.
Wagner, A.
Warren, J. B.
Weckert, E.
Weitkamp, T.
Wilke, R. N.
Willmott, P. R.
Xia, Y.
Yabashi, M.
Yamamura, K.
Yamauchi, K.
Yumoto, H.
- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005). [CrossRef] [PubMed]
- C. M. Kewish, L. Assoufid, A. T. Macrander, and J. Qian, “Wave-optical simulation of hard-X-ray nanofocusing by precisely figured elliptical mirrors,” Appl. Opt. 46(11), 2010–2021 (2007). [CrossRef] [PubMed]
- C. M. Kewish, A. T. Macrander, L. Assoufid, and J. Qian, “Comparison of two methods for simulation of hard X-ray nanofocusing by elliptical mirrors,” Nucl. Instrum. Methods Phys. Res. A 582(1), 138–141 (2007). [CrossRef]
- C. Liu, L. Assoufid, R. Conley, A. T. Macrander, G. E. Ice, and J. Z. Tischler, “Profile coating and its application for Kirkpatrick-Baez mirrors,” Opt. Eng. 42(12), 3622–3628 (2003). [CrossRef]
- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005). [CrossRef] [PubMed]
- P. Kraft, A. Bergamaschi, Ch. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16(Pt 3), 368–375 (2009). [CrossRef] [PubMed]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-ray nanoprobe based on refractive X-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
- P. Kraft, A. Bergamaschi, Ch. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16(Pt 3), 368–375 (2009). [CrossRef] [PubMed]
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110(4), 325–329 (2010). [CrossRef] [PubMed]
- P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy 109(4), 338–343 (2009). [CrossRef] [PubMed]
- P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 321(5887), 379–382 (2008). [CrossRef] [PubMed]
- F. Pfeiffer, O. Bunk, C. Schulze-Briese, A. Diaz, T. Weitkamp, C. David, J. F. van der Veen, I. Vartanyants, and I. K. Robinson, “Shearing interferometer for quantifying the coherence of hard X-ray beams,” Phys. Rev. Lett. 94(16), 164801 (2005). [CrossRef] [PubMed]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-ray nanoprobe based on refractive X-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
- H. M. Quiney, A. G. Peele, Z. Cai, D. Paterson, and K. A. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys. 2(2), 101–104 (2006). [CrossRef]
- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005). [CrossRef] [PubMed]
- H.-C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, “Nanometer linear focusing of hard x rays by a multilayer Laue lens,” Phys. Rev. Lett. 96(12), 127401 (2006). [CrossRef] [PubMed]
- C. Liu, L. Assoufid, R. Conley, A. T. Macrander, G. E. Ice, and J. Z. Tischler, “Profile coating and its application for Kirkpatrick-Baez mirrors,” Opt. Eng. 42(12), 3622–3628 (2003). [CrossRef]
- S. Gorelick, V. A. Guzenko, J. Vila-Comamala, and C. David, “Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating,” Nanotechnology 21(29), 295303 (2010). [CrossRef] [PubMed]
- P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 321(5887), 379–382 (2008). [CrossRef] [PubMed]
- F. Pfeiffer, O. Bunk, C. Schulze-Briese, A. Diaz, T. Weitkamp, C. David, J. F. van der Veen, I. Vartanyants, and I. K. Robinson, “Shearing interferometer for quantifying the coherence of hard X-ray beams,” Phys. Rev. Lett. 94(16), 164801 (2005). [CrossRef] [PubMed]
- F. Pfeiffer, O. Bunk, C. Schulze-Briese, A. Diaz, T. Weitkamp, C. David, J. F. van der Veen, I. Vartanyants, and I. K. Robinson, “Shearing interferometer for quantifying the coherence of hard X-ray beams,” Phys. Rev. Lett. 94(16), 164801 (2005). [CrossRef] [PubMed]
- C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110(4), 325–329 (2010). [CrossRef] [PubMed]
- P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy 109(4), 338–343 (2009). [CrossRef] [PubMed]
- P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 321(5887), 379–382 (2008). [CrossRef] [PubMed]
- P. Kraft, A. Bergamaschi, Ch. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16(Pt 3), 368–375 (2009). [CrossRef] [PubMed]
- P. Kraft, A. Bergamaschi, Ch. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16(Pt 3), 368–375 (2009). [CrossRef] [PubMed]
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- V. Elser, I. Rankenburg, and P. Thibault, “Searching with iterated maps,” Proc. Natl. Acad. Sci. U.S.A. 104(2), 418–423 (2007). [CrossRef] [PubMed]
- V. Elser, “Phase retrieval by iterated projections,” J. Opt. Soc. Am. A 20(1), 40–55 (2003). [CrossRef]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-X-ray beam totally reflected by mirror optics,” Appl. Opt. 44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-ray nanoprobe based on refractive X-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- M. Guizar-Sicairos, K. Evans-Lutterodt, A. F. Isakovic, A. Stein, J. B. Warren, A. R. Sandy, S. Narayanan, and J. R. Fienup, “One-dimensional hard X-ray field retrieval using a moveable structure,” Opt. Express 18(17), 18374–18382 (2010). [CrossRef] [PubMed]
- M. Guizar-Sicairos and J. R. Fienup, “Measurement of coherent X-ray focused beams by phase retrieval with transverse translation diversity,” Opt. Express 17(4), 2670–2685 (2009). [CrossRef] [PubMed]
- G. R. Brady, M. Guizar-Sicairos, and J. R. Fienup, “Optical wavefront measurement using phase retrieval with transverse translation diversity,” Opt. Express 17(2), 624–639 (2009). [CrossRef] [PubMed]
- M. Guizar-Sicairos and J. R. Fienup, “Phase retrieval with transverse translation diversity: a nonlinear optimization approach,” Opt. Express 16(10), 7264–7278 (2008). [CrossRef] [PubMed]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- S. Gorelick, V. A. Guzenko, J. Vila-Comamala, and C. David, “Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating,” Nanotechnology 21(29), 295303 (2010). [CrossRef] [PubMed]
- M. Guizar-Sicairos, K. Evans-Lutterodt, A. F. Isakovic, A. Stein, J. B. Warren, A. R. Sandy, S. Narayanan, and J. R. Fienup, “One-dimensional hard X-ray field retrieval using a moveable structure,” Opt. Express 18(17), 18374–18382 (2010). [CrossRef] [PubMed]
- M. Guizar-Sicairos and J. R. Fienup, “Measurement of coherent X-ray focused beams by phase retrieval with transverse translation diversity,” Opt. Express 17(4), 2670–2685 (2009). [CrossRef] [PubMed]
- G. R. Brady, M. Guizar-Sicairos, and J. R. Fienup, “Optical wavefront measurement using phase retrieval with transverse translation diversity,” Opt. Express 17(2), 624–639 (2009). [CrossRef] [PubMed]
- M. Guizar-Sicairos and J. R. Fienup, “Phase retrieval with transverse translation diversity: a nonlinear optimization approach,” Opt. Express 16(10), 7264–7278 (2008). [CrossRef] [PubMed]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- S. Gorelick, V. A. Guzenko, J. Vila-Comamala, and C. David, “Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating,” Nanotechnology 21(29), 295303 (2010). [CrossRef] [PubMed]
- H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an X-ray nanobeam,” Phys. Rev. A 77(1), 015812 (2008). [CrossRef]
- H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “At-wavelength figure metrology of hard X-ray focusing mirrors,” Rev. Sci. Instrum. 77(6), 063712 (2006). [CrossRef]
- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005). [CrossRef] [PubMed]
- P. Kraft, A. Bergamaschi, Ch. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16(Pt 3), 368–375 (2009). [CrossRef] [PubMed]
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- C. Liu, L. Assoufid, R. Conley, A. T. Macrander, G. E. Ice, and J. Z. Tischler, “Profile coating and its application for Kirkpatrick-Baez mirrors,” Opt. Eng. 42(12), 3622–3628 (2003). [CrossRef]
- K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum. 73(11), 4028–4033 (2002). [CrossRef]
- Y. Takahashi, Y. Nishino, H. Mimura, R. Tsutsumi, H. Kubo, T. Ishikawa, and K. Yamauchi, “Feasibility study of high-resolution coherent diffraction microscopy using synchrotron X-rays focused by Kirkpatrick-Baez mirrors,” J. Appl. Phys. 105(8), 083106 (2009). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an X-ray nanobeam,” Phys. Rev. A 77(1), 015812 (2008). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard X-rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
- H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “At-wavelength figure metrology of hard X-ray focusing mirrors,” Rev. Sci. Instrum. 77(6), 063712 (2006). [CrossRef]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-X-ray beam totally reflected by mirror optics,” Appl. Opt. 44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori, K. Yamauchi, K. Yamamura, and A. Saito, “Deterministic retrieval of surface waviness by means of topography with coherent X-rays,” J. Synchrotron Radiat. 9(Pt 4), 223–228 (2002). [CrossRef] [PubMed]
- C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110(4), 325–329 (2010). [CrossRef] [PubMed]
- P. Kraft, A. Bergamaschi, Ch. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16(Pt 3), 368–375 (2009). [CrossRef] [PubMed]
- H.-C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, “Nanometer linear focusing of hard x rays by a multilayer Laue lens,” Phys. Rev. Lett. 96(12), 127401 (2006). [CrossRef] [PubMed]
- C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110(4), 325–329 (2010). [CrossRef] [PubMed]
- C. M. Kewish, A. T. Macrander, L. Assoufid, and J. Qian, “Comparison of two methods for simulation of hard X-ray nanofocusing by elliptical mirrors,” Nucl. Instrum. Methods Phys. Res. A 582(1), 138–141 (2007). [CrossRef]
- C. M. Kewish, L. Assoufid, A. T. Macrander, and J. Qian, “Wave-optical simulation of hard-X-ray nanofocusing by precisely figured elliptical mirrors,” Appl. Opt. 46(11), 2010–2021 (2007). [CrossRef] [PubMed]
- H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an X-ray nanobeam,” Phys. Rev. A 77(1), 015812 (2008). [CrossRef]
- P. Kraft, A. Bergamaschi, Ch. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16(Pt 3), 368–375 (2009). [CrossRef] [PubMed]
- Y. Takahashi, Y. Nishino, H. Mimura, R. Tsutsumi, H. Kubo, T. Ishikawa, and K. Yamauchi, “Feasibility study of high-resolution coherent diffraction microscopy using synchrotron X-rays focused by Kirkpatrick-Baez mirrors,” J. Appl. Phys. 105(8), 083106 (2009). [CrossRef]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-ray nanoprobe based on refractive X-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-ray nanoprobe based on refractive X-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-ray nanoprobe based on refractive X-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005). [CrossRef] [PubMed]
- H.-C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, “Nanometer linear focusing of hard x rays by a multilayer Laue lens,” Phys. Rev. Lett. 96(12), 127401 (2006). [CrossRef] [PubMed]
- C. Liu, L. Assoufid, R. Conley, A. T. Macrander, G. E. Ice, and J. Z. Tischler, “Profile coating and its application for Kirkpatrick-Baez mirrors,” Opt. Eng. 42(12), 3622–3628 (2003). [CrossRef]
- C. M. Kewish, L. Assoufid, A. T. Macrander, and J. Qian, “Wave-optical simulation of hard-X-ray nanofocusing by precisely figured elliptical mirrors,” Appl. Opt. 46(11), 2010–2021 (2007). [CrossRef] [PubMed]
- C. M. Kewish, A. T. Macrander, L. Assoufid, and J. Qian, “Comparison of two methods for simulation of hard X-ray nanofocusing by elliptical mirrors,” Nucl. Instrum. Methods Phys. Res. A 582(1), 138–141 (2007). [CrossRef]
- H.-C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, “Nanometer linear focusing of hard x rays by a multilayer Laue lens,” Phys. Rev. Lett. 96(12), 127401 (2006). [CrossRef] [PubMed]
- C. Liu, L. Assoufid, R. Conley, A. T. Macrander, G. E. Ice, and J. Z. Tischler, “Profile coating and its application for Kirkpatrick-Baez mirrors,” Opt. Eng. 42(12), 3622–3628 (2003). [CrossRef]
- A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy 109(10), 1256–1262 (2009). [CrossRef] [PubMed]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- H.-C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, “Nanometer linear focusing of hard x rays by a multilayer Laue lens,” Phys. Rev. Lett. 96(12), 127401 (2006). [CrossRef] [PubMed]
- H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an X-ray nanobeam,” Phys. Rev. A 77(1), 015812 (2008). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard X-rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
- H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “At-wavelength figure metrology of hard X-ray focusing mirrors,” Rev. Sci. Instrum. 77(6), 063712 (2006). [CrossRef]
- C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110(4), 325–329 (2010). [CrossRef] [PubMed]
- P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy 109(4), 338–343 (2009). [CrossRef] [PubMed]
- P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 321(5887), 379–382 (2008). [CrossRef] [PubMed]
- Y. Takahashi, Y. Nishino, H. Mimura, R. Tsutsumi, H. Kubo, T. Ishikawa, and K. Yamauchi, “Feasibility study of high-resolution coherent diffraction microscopy using synchrotron X-rays focused by Kirkpatrick-Baez mirrors,” J. Appl. Phys. 105(8), 083106 (2009). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an X-ray nanobeam,” Phys. Rev. A 77(1), 015812 (2008). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard X-rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
- H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “At-wavelength figure metrology of hard X-ray focusing mirrors,” Rev. Sci. Instrum. 77(6), 063712 (2006). [CrossRef]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-X-ray beam totally reflected by mirror optics,” Appl. Opt. 44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum. 73(11), 4028–4033 (2002). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard X-rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-X-ray beam totally reflected by mirror optics,” Appl. Opt. 44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori, K. Yamauchi, K. Yamamura, and A. Saito, “Deterministic retrieval of surface waviness by means of topography with coherent X-rays,” J. Synchrotron Radiat. 9(Pt 4), 223–228 (2002). [CrossRef] [PubMed]
- K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum. 73(11), 4028–4033 (2002). [CrossRef]
- P. Kraft, A. Bergamaschi, Ch. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16(Pt 3), 368–375 (2009). [CrossRef] [PubMed]
- Y. Takahashi, Y. Nishino, H. Mimura, R. Tsutsumi, H. Kubo, T. Ishikawa, and K. Yamauchi, “Feasibility study of high-resolution coherent diffraction microscopy using synchrotron X-rays focused by Kirkpatrick-Baez mirrors,” J. Appl. Phys. 105(8), 083106 (2009). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an X-ray nanobeam,” Phys. Rev. A 77(1), 015812 (2008). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard X-rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
- H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “At-wavelength figure metrology of hard X-ray focusing mirrors,” Rev. Sci. Instrum. 77(6), 063712 (2006). [CrossRef]
- H. M. Quiney, A. G. Peele, Z. Cai, D. Paterson, and K. A. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys. 2(2), 101–104 (2006). [CrossRef]
- H. M. Quiney, A. G. Peele, Z. Cai, D. Paterson, and K. A. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys. 2(2), 101–104 (2006). [CrossRef]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-ray nanoprobe based on refractive X-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
- H. M. Quiney, A. G. Peele, Z. Cai, D. Paterson, and K. A. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys. 2(2), 101–104 (2006). [CrossRef]
- C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110(4), 325–329 (2010). [CrossRef] [PubMed]
- P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy 109(4), 338–343 (2009). [CrossRef] [PubMed]
- P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 321(5887), 379–382 (2008). [CrossRef] [PubMed]
- F. Pfeiffer, O. Bunk, C. Schulze-Briese, A. Diaz, T. Weitkamp, C. David, J. F. van der Veen, I. Vartanyants, and I. K. Robinson, “Shearing interferometer for quantifying the coherence of hard X-ray beams,” Phys. Rev. Lett. 94(16), 164801 (2005). [CrossRef] [PubMed]
- I. K. Robinson, F. Pfeiffer, I. A. Vartanyants, Y. Sun, and Y. Xia, “Enhancement of coherent X-ray diffraction from nanocrystals by introduction of X-ray optics,” Opt. Express 11(19), 2329–2334 (2003). [CrossRef] [PubMed]
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- C. M. Kewish, A. T. Macrander, L. Assoufid, and J. Qian, “Comparison of two methods for simulation of hard X-ray nanofocusing by elliptical mirrors,” Nucl. Instrum. Methods Phys. Res. A 582(1), 138–141 (2007). [CrossRef]
- C. M. Kewish, L. Assoufid, A. T. Macrander, and J. Qian, “Wave-optical simulation of hard-X-ray nanofocusing by precisely figured elliptical mirrors,” Appl. Opt. 46(11), 2010–2021 (2007). [CrossRef] [PubMed]
- H. M. Quiney, A. G. Peele, Z. Cai, D. Paterson, and K. A. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys. 2(2), 101–104 (2006). [CrossRef]
- V. Elser, I. Rankenburg, and P. Thibault, “Searching with iterated maps,” Proc. Natl. Acad. Sci. U.S.A. 104(2), 418–423 (2007). [CrossRef] [PubMed]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-ray nanoprobe based on refractive X-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
- F. Pfeiffer, O. Bunk, C. Schulze-Briese, A. Diaz, T. Weitkamp, C. David, J. F. van der Veen, I. Vartanyants, and I. K. Robinson, “Shearing interferometer for quantifying the coherence of hard X-ray beams,” Phys. Rev. Lett. 94(16), 164801 (2005). [CrossRef] [PubMed]
- I. K. Robinson, F. Pfeiffer, I. A. Vartanyants, Y. Sun, and Y. Xia, “Enhancement of coherent X-ray diffraction from nanocrystals by introduction of X-ray optics,” Opt. Express 11(19), 2329–2334 (2003). [CrossRef] [PubMed]
- A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy 109(10), 1256–1262 (2009). [CrossRef] [PubMed]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-X-ray beam totally reflected by mirror optics,” Appl. Opt. 44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori, K. Yamauchi, K. Yamamura, and A. Saito, “Deterministic retrieval of surface waviness by means of topography with coherent X-rays,” J. Synchrotron Radiat. 9(Pt 4), 223–228 (2002). [CrossRef] [PubMed]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an X-ray nanobeam,” Phys. Rev. A 77(1), 015812 (2008). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard X-rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
- H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “At-wavelength figure metrology of hard X-ray focusing mirrors,” Rev. Sci. Instrum. 77(6), 063712 (2006). [CrossRef]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-X-ray beam totally reflected by mirror optics,” Appl. Opt. 44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- P. Kraft, A. Bergamaschi, Ch. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16(Pt 3), 368–375 (2009). [CrossRef] [PubMed]
- P. Kraft, A. Bergamaschi, Ch. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16(Pt 3), 368–375 (2009). [CrossRef] [PubMed]
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-ray nanoprobe based on refractive X-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- F. Pfeiffer, O. Bunk, C. Schulze-Briese, A. Diaz, T. Weitkamp, C. David, J. F. van der Veen, I. Vartanyants, and I. K. Robinson, “Shearing interferometer for quantifying the coherence of hard X-ray beams,” Phys. Rev. Lett. 94(16), 164801 (2005). [CrossRef] [PubMed]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-X-ray beam totally reflected by mirror optics,” Appl. Opt. 44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori, K. Yamauchi, K. Yamamura, and A. Saito, “Deterministic retrieval of surface waviness by means of topography with coherent X-rays,” J. Synchrotron Radiat. 9(Pt 4), 223–228 (2002). [CrossRef] [PubMed]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- H.-C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, “Nanometer linear focusing of hard x rays by a multilayer Laue lens,” Phys. Rev. Lett. 96(12), 127401 (2006). [CrossRef] [PubMed]
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- Y. Takahashi, Y. Nishino, H. Mimura, R. Tsutsumi, H. Kubo, T. Ishikawa, and K. Yamauchi, “Feasibility study of high-resolution coherent diffraction microscopy using synchrotron X-rays focused by Kirkpatrick-Baez mirrors,” J. Appl. Phys. 105(8), 083106 (2009). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an X-ray nanobeam,” Phys. Rev. A 77(1), 015812 (2008). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard X-rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
- H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “At-wavelength figure metrology of hard X-ray focusing mirrors,” Rev. Sci. Instrum. 77(6), 063712 (2006). [CrossRef]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-X-ray beam totally reflected by mirror optics,” Appl. Opt. 44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori, K. Yamauchi, K. Yamamura, and A. Saito, “Deterministic retrieval of surface waviness by means of topography with coherent X-rays,” J. Synchrotron Radiat. 9(Pt 4), 223–228 (2002). [CrossRef] [PubMed]
- C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110(4), 325–329 (2010). [CrossRef] [PubMed]
- P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy 109(4), 338–343 (2009). [CrossRef] [PubMed]
- P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 321(5887), 379–382 (2008). [CrossRef] [PubMed]
- V. Elser, I. Rankenburg, and P. Thibault, “Searching with iterated maps,” Proc. Natl. Acad. Sci. U.S.A. 104(2), 418–423 (2007). [CrossRef] [PubMed]
- C. Liu, L. Assoufid, R. Conley, A. T. Macrander, G. E. Ice, and J. Z. Tischler, “Profile coating and its application for Kirkpatrick-Baez mirrors,” Opt. Eng. 42(12), 3622–3628 (2003). [CrossRef]
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- Y. Takahashi, Y. Nishino, H. Mimura, R. Tsutsumi, H. Kubo, T. Ishikawa, and K. Yamauchi, “Feasibility study of high-resolution coherent diffraction microscopy using synchrotron X-rays focused by Kirkpatrick-Baez mirrors,” J. Appl. Phys. 105(8), 083106 (2009). [CrossRef]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-ray nanoprobe based on refractive X-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
- F. Pfeiffer, O. Bunk, C. Schulze-Briese, A. Diaz, T. Weitkamp, C. David, J. F. van der Veen, I. Vartanyants, and I. K. Robinson, “Shearing interferometer for quantifying the coherence of hard X-ray beams,” Phys. Rev. Lett. 94(16), 164801 (2005). [CrossRef] [PubMed]
- F. Pfeiffer, O. Bunk, C. Schulze-Briese, A. Diaz, T. Weitkamp, C. David, J. F. van der Veen, I. Vartanyants, and I. K. Robinson, “Shearing interferometer for quantifying the coherence of hard X-ray beams,” Phys. Rev. Lett. 94(16), 164801 (2005). [CrossRef] [PubMed]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- I. K. Robinson, F. Pfeiffer, I. A. Vartanyants, Y. Sun, and Y. Xia, “Enhancement of coherent X-ray diffraction from nanocrystals by introduction of X-ray optics,” Opt. Express 11(19), 2329–2334 (2003). [CrossRef] [PubMed]
- C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110(4), 325–329 (2010). [CrossRef] [PubMed]
- S. Gorelick, V. A. Guzenko, J. Vila-Comamala, and C. David, “Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating,” Nanotechnology 21(29), 295303 (2010). [CrossRef] [PubMed]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-ray nanoprobe based on refractive X-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
- H.-C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, “Nanometer linear focusing of hard x rays by a multilayer Laue lens,” Phys. Rev. Lett. 96(12), 127401 (2006). [CrossRef] [PubMed]
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- F. Pfeiffer, O. Bunk, C. Schulze-Briese, A. Diaz, T. Weitkamp, C. David, J. F. van der Veen, I. Vartanyants, and I. K. Robinson, “Shearing interferometer for quantifying the coherence of hard X-ray beams,” Phys. Rev. Lett. 94(16), 164801 (2005). [CrossRef] [PubMed]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- P. Kraft, A. Bergamaschi, Ch. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16(Pt 3), 368–375 (2009). [CrossRef] [PubMed]
- H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an X-ray nanobeam,” Phys. Rev. A 77(1), 015812 (2008). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard X-rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
- H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “At-wavelength figure metrology of hard X-ray focusing mirrors,” Rev. Sci. Instrum. 77(6), 063712 (2006). [CrossRef]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-X-ray beam totally reflected by mirror optics,” Appl. Opt. 44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori, K. Yamauchi, K. Yamamura, and A. Saito, “Deterministic retrieval of surface waviness by means of topography with coherent X-rays,” J. Synchrotron Radiat. 9(Pt 4), 223–228 (2002). [CrossRef] [PubMed]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard X-rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-X-ray beam totally reflected by mirror optics,” Appl. Opt. 44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori, K. Yamauchi, K. Yamamura, and A. Saito, “Deterministic retrieval of surface waviness by means of topography with coherent X-rays,” J. Synchrotron Radiat. 9(Pt 4), 223–228 (2002). [CrossRef] [PubMed]
- Y. Takahashi, Y. Nishino, H. Mimura, R. Tsutsumi, H. Kubo, T. Ishikawa, and K. Yamauchi, “Feasibility study of high-resolution coherent diffraction microscopy using synchrotron X-rays focused by Kirkpatrick-Baez mirrors,” J. Appl. Phys. 105(8), 083106 (2009). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an X-ray nanobeam,” Phys. Rev. A 77(1), 015812 (2008). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard X-rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
- H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “At-wavelength figure metrology of hard X-ray focusing mirrors,” Rev. Sci. Instrum. 77(6), 063712 (2006). [CrossRef]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-X-ray beam totally reflected by mirror optics,” Appl. Opt. 44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori, K. Yamauchi, K. Yamamura, and A. Saito, “Deterministic retrieval of surface waviness by means of topography with coherent X-rays,” J. Synchrotron Radiat. 9(Pt 4), 223–228 (2002). [CrossRef] [PubMed]
- K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum. 73(11), 4028–4033 (2002). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an X-ray nanobeam,” Phys. Rev. A 77(1), 015812 (2008). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard X-rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
- H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “At-wavelength figure metrology of hard X-ray focusing mirrors,” Rev. Sci. Instrum. 77(6), 063712 (2006). [CrossRef]
Appl. Opt.
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-X-ray beam totally reflected by mirror optics,” Appl. Opt. 44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- C. M. Kewish, L. Assoufid, A. T. Macrander, and J. Qian, “Wave-optical simulation of hard-X-ray nanofocusing by precisely figured elliptical mirrors,” Appl. Opt. 46(11), 2010–2021 (2007). [CrossRef] [PubMed]
Appl. Phys. Lett.
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-ray nanoprobe based on refractive X-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard X-rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
J. Appl. Phys.
- Y. Takahashi, Y. Nishino, H. Mimura, R. Tsutsumi, H. Kubo, T. Ishikawa, and K. Yamauchi, “Feasibility study of high-resolution coherent diffraction microscopy using synchrotron X-rays focused by Kirkpatrick-Baez mirrors,” J. Appl. Phys. 105(8), 083106 (2009). [CrossRef]
J. Opt. Soc. Am. A
- V. Elser, “Phase retrieval by iterated projections,” J. Opt. Soc. Am. A 20(1), 40–55 (2003). [CrossRef]
J. Synchrotron Radiat.
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- P. Kraft, A. Bergamaschi, Ch. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16(Pt 3), 368–375 (2009). [CrossRef] [PubMed]
- A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori, K. Yamauchi, K. Yamamura, and A. Saito, “Deterministic retrieval of surface waviness by means of topography with coherent X-rays,” J. Synchrotron Radiat. 9(Pt 4), 223–228 (2002). [CrossRef] [PubMed]
Nanotechnology
- S. Gorelick, V. A. Guzenko, J. Vila-Comamala, and C. David, “Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating,” Nanotechnology 21(29), 295303 (2010). [CrossRef] [PubMed]
Nat. Phys.
- H. M. Quiney, A. G. Peele, Z. Cai, D. Paterson, and K. A. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys. 2(2), 101–104 (2006). [CrossRef]
Nature
- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005). [CrossRef] [PubMed]
Nucl. Instrum. Methods Phys. Res. A
- C. M. Kewish, A. T. Macrander, L. Assoufid, and J. Qian, “Comparison of two methods for simulation of hard X-ray nanofocusing by elliptical mirrors,” Nucl. Instrum. Methods Phys. Res. A 582(1), 138–141 (2007). [CrossRef]
Opt. Eng.
- C. Liu, L. Assoufid, R. Conley, A. T. Macrander, G. E. Ice, and J. Z. Tischler, “Profile coating and its application for Kirkpatrick-Baez mirrors,” Opt. Eng. 42(12), 3622–3628 (2003). [CrossRef]
Opt. Express
- G. R. Brady, M. Guizar-Sicairos, and J. R. Fienup, “Optical wavefront measurement using phase retrieval with transverse translation diversity,” Opt. Express 17(2), 624–639 (2009). [CrossRef] [PubMed]
- I. K. Robinson, F. Pfeiffer, I. A. Vartanyants, Y. Sun, and Y. Xia, “Enhancement of coherent X-ray diffraction from nanocrystals by introduction of X-ray optics,” Opt. Express 11(19), 2329–2334 (2003). [CrossRef] [PubMed]
- M. Guizar-Sicairos and J. R. Fienup, “Phase retrieval with transverse translation diversity: a nonlinear optimization approach,” Opt. Express 16(10), 7264–7278 (2008). [CrossRef] [PubMed]
- M. Guizar-Sicairos, K. Evans-Lutterodt, A. F. Isakovic, A. Stein, J. B. Warren, A. R. Sandy, S. Narayanan, and J. R. Fienup, “One-dimensional hard X-ray field retrieval using a moveable structure,” Opt. Express 18(17), 18374–18382 (2010). [CrossRef] [PubMed]
- M. Guizar-Sicairos and J. R. Fienup, “Measurement of coherent X-ray focused beams by phase retrieval with transverse translation diversity,” Opt. Express 17(4), 2670–2685 (2009). [CrossRef] [PubMed]
Phys. Rev. A
- H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an X-ray nanobeam,” Phys. Rev. A 77(1), 015812 (2008). [CrossRef]
Phys. Rev. Lett.
- H.-C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, “Nanometer linear focusing of hard x rays by a multilayer Laue lens,” Phys. Rev. Lett. 96(12), 127401 (2006). [CrossRef] [PubMed]
- F. Pfeiffer, O. Bunk, C. Schulze-Briese, A. Diaz, T. Weitkamp, C. David, J. F. van der Veen, I. Vartanyants, and I. K. Robinson, “Shearing interferometer for quantifying the coherence of hard X-ray beams,” Phys. Rev. Lett. 94(16), 164801 (2005). [CrossRef] [PubMed]
Proc. Natl. Acad. Sci. U.S.A.
- V. Elser, I. Rankenburg, and P. Thibault, “Searching with iterated maps,” Proc. Natl. Acad. Sci. U.S.A. 104(2), 418–423 (2007). [CrossRef] [PubMed]
Rev. Sci. Instrum.
- K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum. 73(11), 4028–4033 (2002). [CrossRef]
- H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “At-wavelength figure metrology of hard X-ray focusing mirrors,” Rev. Sci. Instrum. 77(6), 063712 (2006). [CrossRef]
Science
- P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 321(5887), 379–382 (2008). [CrossRef] [PubMed]
Ultramicroscopy
- P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy 109(4), 338–343 (2009). [CrossRef] [PubMed]
- A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy 109(10), 1256–1262 (2009). [CrossRef] [PubMed]
- C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110(4), 325–329 (2010). [CrossRef] [PubMed]
Other
- Manufactured by Dectris Ltd.: Neuenhoferstrasse 107, CH-5400 Baden, Switzerland. Model: PILATUS 2M.
2010, Kewish, Ultramicroscopy
- C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110(4), 325–329 (2010). [CrossRef] [PubMed]
- A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96(9), 091102 (2010). [CrossRef]
- S. Gorelick, V. A. Guzenko, J. Vila-Comamala, and C. David, “Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating,” Nanotechnology 21(29), 295303 (2010). [CrossRef] [PubMed]
- P. Kraft, A. Bergamaschi, Ch. Broennimann, R. Dinapoli, E. F. Eikenberry, B. Henrich, I. Johnson, A. Mozzanica, C. M. Schlepütz, P. R. Willmott, and B. Schmitt, “Performance of single-photon-counting PILATUS detector modules,” J. Synchrotron Radiat. 16(Pt 3), 368–375 (2009). [CrossRef] [PubMed]
- Y. Takahashi, Y. Nishino, H. Mimura, R. Tsutsumi, H. Kubo, T. Ishikawa, and K. Yamauchi, “Feasibility study of high-resolution coherent diffraction microscopy using synchrotron X-rays focused by Kirkpatrick-Baez mirrors,” J. Appl. Phys. 105(8), 083106 (2009). [CrossRef]
- P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy 109(4), 338–343 (2009). [CrossRef] [PubMed]
- A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy 109(10), 1256–1262 (2009). [CrossRef] [PubMed]
- H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an X-ray nanobeam,” Phys. Rev. A 77(1), 015812 (2008). [CrossRef]
- P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 321(5887), 379–382 (2008). [CrossRef] [PubMed]
- V. Elser, I. Rankenburg, and P. Thibault, “Searching with iterated maps,” Proc. Natl. Acad. Sci. U.S.A. 104(2), 418–423 (2007). [CrossRef] [PubMed]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard X-rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
- C. M. Kewish, A. T. Macrander, L. Assoufid, and J. Qian, “Comparison of two methods for simulation of hard X-ray nanofocusing by elliptical mirrors,” Nucl. Instrum. Methods Phys. Res. A 582(1), 138–141 (2007). [CrossRef]
- H. M. Quiney, A. G. Peele, Z. Cai, D. Paterson, and K. A. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys. 2(2), 101–104 (2006). [CrossRef]
- H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “At-wavelength figure metrology of hard X-ray focusing mirrors,” Rev. Sci. Instrum. 77(6), 063712 (2006). [CrossRef]
- Ch. Broennimann, E. F. Eikenberry, B. Henrich, R. Horisberger, G. Huelsen, E. Pohl, B. Schmitt, C. Schulze-Briese, M. Suzuki, T. Tomizaki, H. Toyokawa, and A. Wagner, “The PILATUS 1M detector,” J. Synchrotron Radiat. 13(Pt 2), 120–130 (2006). [CrossRef] [PubMed]
- H.-C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, “Nanometer linear focusing of hard x rays by a multilayer Laue lens,” Phys. Rev. Lett. 96(12), 127401 (2006). [CrossRef] [PubMed]
- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005). [CrossRef] [PubMed]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-ray nanoprobe based on refractive X-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
- F. Pfeiffer, O. Bunk, C. Schulze-Briese, A. Diaz, T. Weitkamp, C. David, J. F. van der Veen, I. Vartanyants, and I. K. Robinson, “Shearing interferometer for quantifying the coherence of hard X-ray beams,” Phys. Rev. Lett. 94(16), 164801 (2005). [CrossRef] [PubMed]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-X-ray beam totally reflected by mirror optics,” Appl. Opt. 44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- C. Liu, L. Assoufid, R. Conley, A. T. Macrander, G. E. Ice, and J. Z. Tischler, “Profile coating and its application for Kirkpatrick-Baez mirrors,” Opt. Eng. 42(12), 3622–3628 (2003). [CrossRef]
- K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum. 73(11), 4028–4033 (2002). [CrossRef]
- A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori, K. Yamauchi, K. Yamamura, and A. Saito, “Deterministic retrieval of surface waviness by means of topography with coherent X-rays,” J. Synchrotron Radiat. 9(Pt 4), 223–228 (2002). [CrossRef] [PubMed]
Cited By |
 Alert me when this paper is cited |
OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.
Related Journal Articles 
- On x-ray phase imaging with a point source (JOSAA)
- Development of thermally formed glass optics for astronomical hard X-ray telescopes (OE)
- Multilayer mirror for x rays below 190 eV (OL)
- A non-iterative reconstruction method for direct and unambiguous coherent diffractive imaging (OE)
- Measurement of coherent x-ray focused beams by phase retrieval with transverse translation diversity (OE)
Related Conference Papers
- Cubic Phase Distortion of Single Attosecond Pulses Being Reflected on Narrow Band Mo/Si Filtering Mirrors
- Development of Grazing-Incidence Focusing System for High-Order Harmonics in the Soft X-Ray Region
- Cubic Phase Distortion of Single Attosecond Pulses Being Reflected on Narrowband Mo/Si Filtering Mirrors
- Development of Grazing-Incidence Focusing System for High-Order Harmonics in the Soft X-Ray Region
- Cubic Phase Distortion of Single Attosecond Pulses Being Reflected on Narrowband Mo/Si Filtering Mirrors
« Previous Article | Next Article »
OSA is a member of 
For optimal display we recommend the following web browsers:
- Firefox 11+
- Google Chrome 17+
- Internet Explorer 9+
- Safari 5+