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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 23 — Nov. 8, 2010
  • pp: 23900–23905

High power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array

Zhenfu Wang, Yongqiang Ning, Yan Zhang, Jingjing Shi, Xing Zhang, Lisen Zhang, Wei Wang, Di Liu, Yongsheng Hu, Haibing Cong, Li Qin, Yun Liu, and Lijun Wang  »View Author Affiliations


Optics Express, Vol. 18, Issue 23, pp. 23900-23905 (2010)
http://dx.doi.org/10.1364/OE.18.023900


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Abstract

High power and good beam quality of two-dimensional bottom-emitting vertical-cavity surface-emitting laser array with GaAs microlens on the substrate is achieved. Uniform and matched convex microlens is directly fabricated by one-step diffusion-limited wet-etching techniques on the emitting windows. The maximum output power is above 1W at continuous-wave operation at room temperature, and the far-field beam divergence is below 6.6°at a current of 4A. These properties between microlens-integrated and conventional device at different operating current are demonstrated.

© 2010 OSA

OCIS Codes
(140.3290) Lasers and laser optics : Laser arrays
(140.7260) Lasers and laser optics : Vertical cavity surface emitting lasers

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: May 18, 2010
Revised Manuscript: August 7, 2010
Manuscript Accepted: October 19, 2010
Published: October 29, 2010

Citation
Zhenfu Wang, Yongqiang Ning, Yan Zhang, Jingjing Shi, Xing Zhang, Lisen Zhang, Wei Wang, Di Liu, Yongsheng Hu, Haibing Cong, Li Qin, Yun Liu, and Lijun Wang, "High power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array," Opt. Express 18, 23900-23905 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-23-23900


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References

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