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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 24 — Nov. 22, 2010
  • pp: 24762–24769

On-chip switching of a silicon nitride micro-ring resonator based on digital microfluidics platform

Yoav Zuta, Ilya Goykhman, Boris Desiatov, and Uriel Levy  »View Author Affiliations

Optics Express, Vol. 18, Issue 24, pp. 24762-24769 (2010)

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We demonstrate the switching of a silicon nitride micro ring resonator (MRR) by using digital microfluidics (DMF). Our platform allows driving micro-droplets on-chip, providing control over the effective refractive index at the vicinity of the resonator and thus facilitating the manipulation of the transmission spectrum of the MRR. The device is fabricated using a process that is compatible with high-throughput silicon fabrication techniques with buried highly doped silicon electrodes. This platform can be extended towards controlling arrays of micro optical devices using minute amounts of liquid droplets. Such an integration of DMF and optical resonators on chip can be used in variety of applications, ranging from biosensing and kinetics to tunable filtering on chip.

© 2010 OSA

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(280.4788) Remote sensing and sensors : Optical sensing and sensors
(130.4815) Integrated optics : Optical switching devices

ToC Category:
Integrated Optics

Original Manuscript: September 13, 2010
Revised Manuscript: October 12, 2010
Manuscript Accepted: October 18, 2010
Published: November 11, 2010

Yoav Zuta, Ilya Goykhman, Boris Desiatov,, and Uriel Levy, "On-chip switching of a silicon nitride micro-ring resonator based on digital microfluidics platform," Opt. Express 18, 24762-24769 (2010)

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