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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 24 — Nov. 22, 2010
  • pp: 24961–24968

Large range and high resolution on-line displacement measurement system by combining double interferometres

Fang Xie, Min Li, Ding Song, Jinling Sun, and Tao Zhang  »View Author Affiliations

Optics Express, Vol. 18, Issue 24, pp. 24961-24968 (2010)

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A stabilized interferometric displacement measurement system, which is suitable for on-line measurement and is endowed with large measurement range and high resolution, is proposed. The system is stabilized by a feedback loop which compensates the influences induced by the environmental disturbances and makes the system stabile enough for on-line measurement. Two different wavelengths are working simultaneously in the system. The measurement range which is determined by the synthetic-wavelength interferometric signal is expanded to the order of millimeter, while the measurement resolution which is determined by one of the single-wavelength interferometric signal is the order of sub-nanometer.

© 2010 OSA

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: August 27, 2010
Revised Manuscript: October 31, 2010
Manuscript Accepted: October 31, 2010
Published: November 15, 2010

Fang Xie, Min Li, Ding Song, Jinling Sun, and Tao Zhang, "Large range and high resolution on-line displacement measurement system by combining double interferometres," Opt. Express 18, 24961-24968 (2010)

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