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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 24 — Nov. 22, 2010
  • pp: 25102–25107

Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces

Taisheng Wang, Weixing Yu, Dengying Zhang, Chunrong Li, Hongxin Zhang, Wenbin Xu, Zhijun Xu, Hua Liu, Qiang Sun, and Zhenwu Lu  »View Author Affiliations

Optics Express, Vol. 18, Issue 24, pp. 25102-25107 (2010)

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We demonstrate the lithographic fabrication of diffractive optical elements (DOEs) in hybrid SiO2/TiO2 sol-gel glass on 3-D curved surfaces. The concentric circular gratings with periods of 20μm, 10μm and 5μm have been fabricated in sol-gel glass on concave lens by laser direct writing successfully. Continuous 3-Dimensional surface relief with a height of 435nm, 110nm and 50nm has been obtained for the period of 20μm, 10μm and 5μm respectively. The optical test results of the fabricated DOE shows only a little bit deviation from the theoretical calculated results which can be explained by 3-D curved surface effect. We believe this technology can be an effective method to fabricate DOEs with even more complex surface profile on 3-D curved surfaces in terms of its simplicity and cost-effectiveness.

© 2010 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication
(050.6875) Diffraction and gratings : Three-dimensional fabrication

ToC Category:
Diffraction and Gratings

Original Manuscript: July 9, 2010
Revised Manuscript: September 19, 2010
Manuscript Accepted: September 20, 2010
Published: November 17, 2010

Taisheng Wang, Weixing Yu, Dengying Zhang, Chunrong Li, Hongxin Zhang, Wenbin Xu, Zhijun Xu, Hua Liu, Qiang Sun, and Zhenwu Lu, "Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces," Opt. Express 18, 25102-25107 (2010)

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