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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 26 — Dec. 20, 2010
  • pp: 27802–27819

Theoretical investigation of silicon MOS-type plasmonic slot waveguide based MZI modulators

Shiyang Zhu, G. Q. Lo, and D. L. Kwong  »View Author Affiliations

Optics Express, Vol. 18, Issue 26, pp. 27802-27819 (2010)

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In this paper, a Mach-Zehnder silicon nanoplasmonic electro-optic modulator is proposed and theoretically analyzed. It is composed of horizontal metal-SiO2-Si-metal plasmonic slot waveguides for phase shifting and ultracompact V-shape splitter/combiner to link the plasmonic slot waveguides and the conventional Si dielectric waveguides. The proposed modulator can be directly integrated into existing Si electronic photonic integrated circuits (EPICs) and be fabricated using standard Si complementary metal-oxide-semiconductor (CMOS) technology. The modulator’s parameters are optimized through systematic 2-dimensional numerical simulations. For a modulator with 3-µm-long Ag-SiO2(2 nm)-Si(50 nm)-Ag phase shifter and 0.35-µm-long splitter/combiner operating at 1.55-µm wavelength, simulation shows an insertion loss of ~–8 dB, an extinction ratio of ~7.3 dB — with a switching voltage of ~5.6 V, and a bandwidth of ~500 GHz. A possible approach to reduce the switching voltage is addressed.

© 2010 OSA

OCIS Codes
(240.6680) Optics at surfaces : Surface plasmons
(250.5300) Optoelectronics : Photonic integrated circuits
(250.7360) Optoelectronics : Waveguide modulators

ToC Category:

Original Manuscript: September 17, 2010
Revised Manuscript: November 12, 2010
Manuscript Accepted: November 15, 2010
Published: December 17, 2010

Shiyang Zhu, G. Q. Lo, and D. L. Kwong, "Theoretical investigation of silicon MOS-type plasmonic slot waveguide based MZI modulators," Opt. Express 18, 27802-27819 (2010)

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  1. M. Dragoman and D. Dragoman, “Plasmonics: applications to nanoscale terahertz and optical devices,” Prog. Quantum Electron. 32(1), 1–41 (2008). [CrossRef]
  2. S. A. Maier, Plasmonics: Fundamentals and Applications (Springer Science + Business Media LLC, 2007).
  3. M. L. Brongersma and P. G. Kik, Surface Plasmon Nanophotonics (Springer Science + Business Media LLC, 2007).
  4. S. I. Bozhevolnyi, Plasmonic Nanoguides and Circuits (Pan Stanford Publishing, 2009).
  5. J. A. Dionne, L. A. Sweatlock, H. A. Atwater, and A. Polman, “Plasmon slot waveguides: towards chip-scale propagation with subwavelength-scale localization,” Phys. Rev. B 73(3), 035407 (2006). [CrossRef]
  6. R. F. Oulton, G. Bartal, D. F. P. Pile, and X. Zhang, “Confinement and propagation characteristics of subwavelength plasmonic modes,” N. J. Phys. 10(10), 105018 (2008). [CrossRef]
  7. S. I. Bozhevolnyi, V. S. Volkov, E. Devaux, J. Y. Laluet, and T. W. Ebbesen, “Channel plasmon subwavelength waveguide components including interferometers and ring resonators,” Nature 440(7083), 508–511 (2006). [CrossRef] [PubMed]
  8. B. Min, E. Ostby, V. Sorger, E. Ulin-Avila, L. Yang, X. Zhang, and K. Vahala, “High-Q surface-plasmon-polariton whispering-gallery microcavity,” Nature 457(7228), 455–458 (2009). [CrossRef] [PubMed]
  9. J. Tian, S. Yu, W. Yan, and M. Qiu, “Broadband high-efficiency surface-plasmon-polariton coupler with silicon-metal interface,” Appl. Phys. Lett. 95(1), 013504 (2009). [CrossRef]
  10. L. Chen, J. Shakya, and M. Lipson, “Subwavelength confinement in an integrated metal slot waveguide on silicon,” Opt. Lett. 31(14), 2133–2135 (2006). [CrossRef] [PubMed]
  11. R. A. Wahsheh, Z. Lu, and M. A. G. Abushagur, “Nanoplasmonic couplers and splitters,” Opt. Express 17(21), 19033–19040 (2009). [CrossRef]
  12. P. Mühlschlegel, H. J. Eisler, O. J. Martin, B. Hecht, and D. W. Pohl, “Resonant optical antennas,” Science 308(5728), 1607–1609 (2005). [CrossRef] [PubMed]
  13. A. Hryciw, Y. C. Jun, and M. L. Brongersma, “Plasmonics: Electrifying plasmonics on silicon,” Nat. Mater. 9(1), 3–4 (2010). [CrossRef]
  14. T. Ishi, J. Fujikata, K. Makita, Y. Baba, and K. Ohashi, “Si nano-photodiode with a surface plasmon antenna,” Jpn. J. Appl. Phys. 44(12), L364–L366 (2005). [CrossRef]
  15. J. A. Dionne, K. Diest, L. A. Sweatlock, and H. A. Atwater, “PlasMOStor: a metal-oxide-Si field effect plasmonic modulator,” Nano Lett. 9(2), 897–902 (2009). [CrossRef] [PubMed]
  16. W. Cai, J. S. White, and M. L. Brongersma, “Compact, high-speed and power-efficient electrooptic plasmonic modulators,” Nano Lett. 9(12), 4403–4411 (2009). [CrossRef] [PubMed]
  17. D. Marris-Morini, L. Vivien, G. Rasigade, J. M. Fedeli, E. Cassan, X. L. Roux, P. Crozat, S. Maine, A. Lupu, P. Lyan, P. Rivallin, M. Halbwax, and S. Laval, “Recent progress in high-speed silicon-based optical modulators,” Proc. IEEE 97(7), 1199–1215 (2009). [CrossRef]
  18. K. F. MacDonald and N. I. Zheludev, “Active plasmonics: current status,” Laser Photon. Rev. 4(4), 562–567 (2010). [CrossRef]
  19. C. Min and G. Veronis, “Absorption switches in metal-dielectric-metal plasmonic waveguides,” Opt. Express 17(13), 10757–10766 (2009). [CrossRef] [PubMed]
  20. S. W. Liu and M. Xiao, “Electro-optic switch in ferroelectric thin films mediated by surface plasmons,” Appl. Phys. Lett. 88(14), 143512 (2006). [CrossRef]
  21. P. R. Evans, G. A. Wurtz, W. R. Hendren, R. Atkinson, W. Dickson, A. V. Zayats, and R. J. Pollard, “Electrically switchable nonreciprocal transmission of plasmonic nanorods with liquid crystal,” Appl. Phys. Lett. 91(4), 043101 (2007). [CrossRef]
  22. T. Nikolajsen, K. Leosson, and S. I. Bozhevolnyi, “Surface Plasmon polariton based modulators and switches operating at telecom wavelengths,” Appl. Phys. Lett. 85(24), 5833–5835 (2004). [CrossRef]
  23. K. J. Chau, S. E. Irvine, and A. Y. Elezzabi, “A gigahertz surface magneto-plasmon optical modulator,” IEEE J. Quantum Electron. 40(5), 571–579 (2004). [CrossRef]
  24. D. Gérard, V. Laude, B. Sadani, A. Khelif, D. Van Labeke, and B. Guizal, “Modulation of the extraordinary optical transmission by surface acoustic waves,” Phys. Rev. B 76(23), 235427 (2007). [CrossRef]
  25. K. F. MacDonald, Z. L. Samson, M. I. Stockman, and N. I. Zheludev, “Ultrafast active plasmonics,” Nat. Photonics 3(1), 55–58 (2009). [CrossRef]
  26. X. J. Huang, W. C. Lee, C. Kuo, D. Hisamoto, L. L. Chang, J. Kedzierski, E. Anderson, H. Takeuchi, Y. K. Choi, K. Asano, V. Subramanian, T. J. King, J. Bokor, and C. M. Hu, “Sub-50nm p-channel FinFET,” IEEE Trans. Electron. Dev. 48(5), 880–886 (2001). [CrossRef]
  27. http://www.rsoftinc.com
  28. G. Veronis and S. Fan, “Theoretical investigation of compact couplers between dielectric slab waveguides and two-dimensional metal-dielectric-metal plasmonic waveguides,” Opt. Express 15(3), 1211–1221 (2007). [CrossRef] [PubMed]
  29. R. Salvador, A. Martinez, C. Garcia-Meca, R. Ortuno, and J. Marti, “Analysis of hybrid dielectric plasmonic waveguides,” IEEE J. Sel. Top. Quantum Electron. 14(6), 1496–1501 (2008). [CrossRef]
  30. R. F. Oulton, V. J. Sorger, D. A. Genov, D. F. P. Pile, and X. Zhang, “A hybrid plasmonic waveguide for subwavelength confinement and long-rang propagation,” Nat. Photonics 2(8), 496–500 (2008). [CrossRef]
  31. S. Deleonibus, Electronic device architectures for the nano-CMOS era: from ultimate CMOS scaling to beyond CMOS devices (Pan Stanford Publishing, 2009).
  32. J. Takahara, S. Yamagishi, A. Morimoto, and T. Kobayashi, “Nanostructure optical phase modulator and detector using surface plasmon polariton,” Pacific Rim Conf. on Lasers and Electro-optics 1997, 42–42.
  33. S. I. Bozhevolnyi and J. Jung, “Scaling for gap plasmon based waveguides,” Opt. Express 16(4), 2676–2684 (2008). [CrossRef] [PubMed]
  34. N.-N. Feng, M. L. Brongersma, and L. Dal Negro, “Metal-dielectric slot waveguide structures for the propagation of surface plasmon polaritons at 1.55 µm,” IEEE J. Quantum Electron. 43(6), 479–485 (2007). [CrossRef]
  35. G. Veronis and S. Fan, “Modes of subwavelength plasmonic slot waveguides,” J. Lightwave Technol. 25(9), 25112521 (2007). [CrossRef]
  36. D. Palik, Handbook of Optical Constants of Solid (Academic, New York, 1985).
  37. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, “A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor,” Nature 427(6975), 615–618 (2004). [CrossRef] [PubMed]
  38. J. Sune, P. Olivo, and B. Ricco, “Quantum-mechanical modeling of accumulation layers in MOS structure” IEEE Trans. Electron. Dev. 39(7), 1732–1739 (1992). [CrossRef]
  39. R. A. Soref and B. R. Bennett, “Kramers-Kronig analysis of electro-optical switching in silicon,” Proc. SPIE 704, 32–37 (1986).
  40. R. Soref, R. E. Peale, and W. Buchwald, “Longwave plasmonics on doped silicon and silicides,” Opt. Express 16(9), 6507–6514 (2008). [CrossRef] [PubMed]
  41. H. S. Momose, S. Nakamura, T. Ohguro, T. Yoshitomi, E. Morifuji, T. Morimoto, Y. Katsumata, and H. Iwai, ““Study of the manufacturing feasibility of 1.5-nm direct-tunneling gate oxide MOSFET’s: uniformity, reliability, and dopant penetration of the gate oxide,” IEEE Tran. Electron. Dev. 45(3), 691–700 (1998). [CrossRef]
  42. S. Hall, O. Buiu, I. Z. Mitrovic, Y. Lu, and W. M. Davey, “Review and perspective of high-κ dielectrics on silicon,” J. Telecommun. Info. Technol. 2, 33–43 (2007).
  43. K. E. Moselund, P. Dainesi, M. Declercq, M. Bopp, P. Coronel, T. Skotnicki, and A. K. Ionecu, ““Compact gate-all-around silicon light modulator for ultra high speed operation”, Sensor. Actuat,” Adv. Phys. 130, 220–227 (2006).

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