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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 3 — Feb. 1, 2010
  • pp: 2345–2360

Laser differential confocal radius measurement

Weiqian Zhao, Ruoduan Sun, Lirong Qiu, and Dingguo Sha  »View Author Affiliations


Optics Express, Vol. 18, Issue 3, pp. 2345-2360 (2010)
http://dx.doi.org/10.1364/OE.18.002345


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Abstract

A new laser differential confocal radius measurement (DCRM) is proposed for high precision measurement of radius. Based on the property of an axial intensity curve that the absolute zero precisely corresponds to the focus of the objective in a differential confocal system (DCS), DCRM uses the zero point of the DCS axial intensity curve to precisely identify the cat's-eye and confocal positions of the test lens, and measures the accurate distance between the two positions to achieve the high-precision measurement of radius of curvature (ROC). In comparison with the existing measurement methods, DCRM proposed has a high measurement precision, a strong environmental anti-interference capability and a low cost. The theoretical analyses and preliminary experimental results indicate that DCRM has a relative measurement error of better than 5ppm.

© 2010 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(180.1790) Microscopy : Confocal microscopy
(220.4840) Optical design and fabrication : Testing

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: November 2, 2009
Revised Manuscript: December 18, 2009
Manuscript Accepted: January 4, 2010
Published: January 21, 2010

Citation
Weiqian Zhao, Ruoduan Sun, Lirong Qiu, and Dingguo Sha, "Laser differential confocal radius measurement," Opt. Express 18, 2345-2360 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-3-2345


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