We present a new class of simple, cheap and stable grayscale photomasks based on the metal-transparent-metallic-oxides (MTMO) systems by laser direct writing in metal films. For obtaining high resolution and grainless grayscale patterns we developed a refinement method of the films, in which the nanometer size effect may play a significant role for the improvement. We propose a layered oxidation model and a grain model for the mechanism of In- and Sn-based MTMO systems. The masks have a wide application wavelength range at least from 350 to 700 nm. Three-dimensional microstructures have been successfully fabricated by using the MTMO grayscale masks.

© 2010 OSA

1. J. D. Rogers, A. H. O. Kärkkäinen, T. Tkaczyk, J. T. Rantala, and M. R. Descour, “Realization of refractive microoptics through grayscale lithographic patterning of photosensitive hybrid glass,” Opt. Express 12(7), 1294–1303 (2004). [CrossRef] [PubMed]
2. K. Reimer, H. J. Quenzer, M. Jürss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279–288 (1997), http://www.mp-cc.de/docs/reiphot.pdf . [CrossRef]
3. M. Christophersen and B. F. Phlips, “Gray-tone lithography using an optical diffuser and a contact aligner,” Appl. Phys. Lett. 92(19), 194102 (2008). [CrossRef]
4. C. M. Waits, A. Modafe, and R. Ghodssi, “Investigation of gray-scale technology for large area 3D siliconMEMS structures,” J. Micromech. Microeng. 13(2), 170–177 (2003). [CrossRef]
5. C. K. Wu, “Method of making high energy beam sensitive glasses,” U.S. Patent, No. 5,078,771 (1992).
6. G. Gal, “Method for fabricating microlenses,” U.S. Patent No. 5,310,623, 10, (1994).
7. C. G. Granqvist and A. Hultaker, “Transparent and conducting ITO films: new developments and applications,” Thin Solid Films 411(1), 1–5 (2002). [CrossRef]
8. Z. W. Pan, Z. R. Dai, and Z. L. Wang, “Nanobelts of semiconducting oxides,” Science 291(5510), 1947–1949 (2001). [CrossRef] [PubMed]
9. E. Comini, “Metal oxide nano-crystals for gas sensing,” Anal. Chim. Acta 568(1-2), 28–40 (2006). [CrossRef] [PubMed]
10. B. Krishnamachari, J. McLean, B. Cooper, and J. Sethna, “Gibbs-Thomson formula for small island sizes: Corrections for high vapor densities,” Phys. Rev. B 54(12), 8899–8907 (1996). [CrossRef]
11. E. P. Domashevskaya, O. A. Chuvenkova, V. M. Kashkarov, S. B. Kushev, S. V. Ryabtsev, S. Yu. Turishchev, and Yu. A. Yurakov, “TEM and XANES investigations and optical properties of SnO nanolayers,” Surf. Interface Anal. 38(4), 514–517 (2006). [CrossRef]
12. C. K. Wu, “gray scale all-glass photomasks,” U.S. Patent No. 2005/0053844 A1, (2005).
13. C. F. Guo, Z. Zhang, S. Cao, and Q. Liu, “Laser direct writing of nanoreliefs in Sn nanofilms,” Opt. Lett. 34(18), 2820–2822 (2009). [CrossRef] [PubMed]
14. C. F. Guo, S. Cao, P. Jiang, Y. Fang, J. Zhang, Y. Fan, Y. Wang, W. Xu, Z. Zhao, and Q. Liu, “Grayscale photomask fabricated by laser direct writing in metallic nano-films,” Opt. Express 17(22), 19981–19987 (2009), http://www.opticsinfobase.org/abstract.cfm?URI=oe-17-22-19981 . [CrossRef] [PubMed]

Anal. Chim. Acta

• E. Comini, “Metal oxide nano-crystals for gas sensing,” Anal. Chim. Acta 568(1-2), 28–40 (2006). [CrossRef] [PubMed]

Appl. Phys. Lett.

• M. Christophersen and B. F. Phlips, “Gray-tone lithography using an optical diffuser and a contact aligner,” Appl. Phys. Lett. 92(19), 194102 (2008). [CrossRef]

J. Micromech. Microeng.

• C. M. Waits, A. Modafe, and R. Ghodssi, “Investigation of gray-scale technology for large area 3D siliconMEMS structures,” J. Micromech. Microeng. 13(2), 170–177 (2003). [CrossRef]

Opt. Express

• J. D. Rogers, A. H. O. Kärkkäinen, T. Tkaczyk, J. T. Rantala, and M. R. Descour, “Realization of refractive microoptics through grayscale lithographic patterning of photosensitive hybrid glass,” Opt. Express 12(7), 1294–1303 (2004). [CrossRef] [PubMed]
• C. F. Guo, S. Cao, P. Jiang, Y. Fang, J. Zhang, Y. Fan, Y. Wang, W. Xu, Z. Zhao, and Q. Liu, “Grayscale photomask fabricated by laser direct writing in metallic nano-films,” Opt. Express 17(22), 19981–19987 (2009), http://www.opticsinfobase.org/abstract.cfm?URI=oe-17-22-19981 . [CrossRef] [PubMed]

Opt. Lett.

• C. F. Guo, Z. Zhang, S. Cao, and Q. Liu, “Laser direct writing of nanoreliefs in Sn nanofilms,” Opt. Lett. 34(18), 2820–2822 (2009). [CrossRef] [PubMed]

Phys. Rev. B

• B. Krishnamachari, J. McLean, B. Cooper, and J. Sethna, “Gibbs-Thomson formula for small island sizes: Corrections for high vapor densities,” Phys. Rev. B 54(12), 8899–8907 (1996). [CrossRef]

Proc. SPIE

• K. Reimer, H. J. Quenzer, M. Jürss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279–288 (1997), http://www.mp-cc.de/docs/reiphot.pdf . [CrossRef]

Science

• Z. W. Pan, Z. R. Dai, and Z. L. Wang, “Nanobelts of semiconducting oxides,” Science 291(5510), 1947–1949 (2001). [CrossRef] [PubMed]

Surf. Interface Anal.

• E. P. Domashevskaya, O. A. Chuvenkova, V. M. Kashkarov, S. B. Kushev, S. V. Ryabtsev, S. Yu. Turishchev, and Yu. A. Yurakov, “TEM and XANES investigations and optical properties of SnO nanolayers,” Surf. Interface Anal. 38(4), 514–517 (2006). [CrossRef]

Thin Solid Films

• C. G. Granqvist and A. Hultaker, “Transparent and conducting ITO films: new developments and applications,” Thin Solid Films 411(1), 1–5 (2002). [CrossRef]

Other

• C. K. Wu, “Method of making high energy beam sensitive glasses,” U.S. Patent, No. 5,078,771 (1992).
• G. Gal, “Method for fabricating microlenses,” U.S. Patent No. 5,310,623, 10, (1994).
• C. K. Wu, “gray scale all-glass photomasks,” U.S. Patent No. 2005/0053844 A1, (2005).

Click here to see a list of articles that cite this paper

Related Journal Articles

• Linear optical response of metallic nanoshells in different dielectric media (JOSAB)
• Photocurrent enhancement of SnO₂ nanowires through Au-nanoparticles decoration (OE)
• Determination of the size distribution of metallic nanoparticles by optical extinction spectroscopy (AO)
• Grayscale photomask fabricated by laser direct writing in metallic nano-films (OE)
• Micro-optical elements fabricated by metal-transparent-metallic-oxides grayscale photomasks (AO)

Related Conference Papers

• Single-Crystal Erbium Chloride Silicate Nanowires for Novel Si-Compatible Sources at 1.53 μm
• Single-Crystal Erbium Chloride Silicate Nanowires for Novel Si-Compatible Sources at 1.53 μm
• Strain-Induced Self-rolling of Semiconductor Membranes: Effect of Geometry, Energetics, and Kinetics
• Strain-Induced Self-rolling of Semiconductor Membranes: Effect of Geometry, Energetics, and Kinetics
• Zeolite Thin Film-Coated Fiber Sensor for Measuring Chemical Trace based on Multimode Interference
• High-speed electro-optic modulators using graphene in a sub-μm-thick structure
• High-speed electro-optic modulators using graphene in a sub-μm-thick structure