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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 4 — Feb. 15, 2010
  • pp: 3608–3617

Lenses axial space ray tracing measurement

Weiqian Zhao, Ruoduan Sun, Lirong Qiu, Libo Shi, and Dingguo Sha  »View Author Affiliations


Optics Express, Vol. 18, Issue 4, pp. 3608-3617 (2010)
http://dx.doi.org/10.1364/OE.18.003608


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Abstract

Abstract: In order to achieve the precise measurement of the lenses axial space, a new lenses axial space ray tracing measurement (ASRTM) is proposed based on the geometrical theory of optical image. For an assembled lenses with the given radius of curvature rn and refractive index nn of every lens, ASRTM uses the annular laser differential confocal chromatography focusing technique (ADCFT) to achieve the precise focusing at the vertex position Pn of its inner-and-outer spherical surface Sn and obtain the coordinate zn corresponding to the axial movement position of ASRTM objective, and then, uses the ray tracing facet iterative algorithm to precisely determine the vertex position Pn of every spherical surface by these coordinates zn , refractive index nn and spherical radius rn, and thereby obtaining the lenses inner axial space dn . The preliminary experimental results indicate that ASRTM has a relative measurement error of less than 0.02%.

© 2010 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(180.1790) Microscopy : Confocal microscopy
(220.4840) Optical design and fabrication : Testing

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: December 14, 2009
Revised Manuscript: January 18, 2010
Manuscript Accepted: January 19, 2010
Published: February 4, 2010

Citation
Weiqian Zhao, Ruoduan Sun, Lirong Qiu, Libo Shi, and Dingguo Sha, "Lenses axial space ray tracing measurement," Opt. Express 18, 3608-3617 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-4-3608


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References

  1. D. M. Williamson, “Compensator selection in the tolerancing of a microlithographic lens,” Proc. SPIE 1049, 178–186 (1989).
  2. K. K. Westort, “Design and fabrication of high performance relay lenses,” Proc. SPIE 548, 40–47 (1984).
  3. T. Sure and J. Heil, “Microscope objective production: On the way from the micrometer scale to the nanometer scale,” Proc. SPIE 5180, 283–292 (2003). [CrossRef]
  4. L. A. Selberg, “Radius measurement by interferometry,” Opt. Eng. 31(9), 1961–1966 (1992). [CrossRef]
  5. W. Zhao, R. Sun, L. Qiu, and D. Sha, “Laser differential confocal ultra-long focal length measurement,” Opt. Express 17(22), 20051–20062 (2009). [CrossRef] [PubMed]
  6. W. Zhao, J. Tan, and L. Qiu, “Bipolar absolute differential confocal approach to higher spatial resolution,” Opt. Express 12(21), 5013–5021 (2004). [CrossRef] [PubMed]
  7. W. Zhao, L. Qiu, and Z. Feng, “Effect of fabrication errors on superresolution property of a pupil filter,” Opt. Express 14(16), 7024–7036 (2006). [CrossRef] [PubMed]
  8. L. Liu, X. Deng, and G. Wang, “Phase-only optical pupil filter for improving axial resolution in confocal microscopy,” Acta Phys. Sin. 50, 48–51 (2001).
  9. M. Born and E. Wolf, Principles of Optics (Cambridge University Press, 1999), Chap. 4, Chap. 9.

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