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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 4 — Feb. 15, 2010
  • pp: 3719–3731

Digital holographic reflectometry

Tristan Colomb, Stefan Krivec, Herbert Hutter, Ahmet Ata Akatay, Nicolas Pavillon, Frédéric Montfort, Etienne Cuche, Jonas Kühn, Christian Depeursinge, and Yves Emery  »View Author Affiliations

Optics Express, Vol. 18, Issue 4, pp. 3719-3731 (2010)

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Digital holographic microscopy (DHM) is an interferometric technique that allows real-time imaging of the entire complex optical wave-front (amplitude and phase) reflected by or transmitted through a sample. To our knowledge, only the quantitative phase is exploited to measure topography, assuming homogeneous material sample and a single reflection on the surface of the sample. In this paper, dual-wavelength DHM measurements are interpreted using a model of reflected wave propagation through a three-interfaces specimen (2 layers deposited on a semi-infinite layer), to measure simultaneously topography, layer thicknesses and refractive indices of micro-structures. We demonstrate this DHM reflectometry technique by comparing DHM and profilometer measurement of home-made SiO2/Si targets and Secondary Ion Mass Spectrometry (SIMS) sputter craters on specimen including different multiple layers.

© 2010 Optical Society of America

OCIS Codes
(120.1840) Instrumentation, measurement, and metrology : Densitometers, reflectometers
(120.5700) Instrumentation, measurement, and metrology : Reflection
(230.4170) Optical devices : Multilayers
(310.0310) Thin films : Thin films
(090.1995) Holography : Digital holography

ToC Category:

Original Manuscript: December 8, 2009
Revised Manuscript: February 2, 2010
Manuscript Accepted: February 3, 2010
Published: February 5, 2010

Tristan Colomb, Stefan Krivec, Herbert Hutter, Ahmet Ata Akatay, Nicolas Pavillon, Frédéric Montfort, Etienne Cuche, Jonas Kühn, Christian Depeursinge, and Yves Emery, "Digital holographic reflectometry," Opt. Express 18, 3719-3731 (2010)

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