OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 4 — Feb. 15, 2010
  • pp: 3719–3731

Digital holographic reflectometry

Tristan Colomb, Stefan Krivec, Herbert Hutter, Ahmet Ata Akatay, Nicolas Pavillon, Frédéric Montfort, Etienne Cuche, Jonas Kühn, Christian Depeursinge, and Yves Emery  »View Author Affiliations


Optics Express, Vol. 18, Issue 4, pp. 3719-3731 (2010)
http://dx.doi.org/10.1364/OE.18.003719


View Full Text Article

Enhanced HTML    Acrobat PDF (8095 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Digital holographic microscopy (DHM) is an interferometric technique that allows real-time imaging of the entire complex optical wave-front (amplitude and phase) reflected by or transmitted through a sample. To our knowledge, only the quantitative phase is exploited to measure topography, assuming homogeneous material sample and a single reflection on the surface of the sample. In this paper, dual-wavelength DHM measurements are interpreted using a model of reflected wave propagation through a three-interfaces specimen (2 layers deposited on a semi-infinite layer), to measure simultaneously topography, layer thicknesses and refractive indices of micro-structures. We demonstrate this DHM reflectometry technique by comparing DHM and profilometer measurement of home-made SiO2/Si targets and Secondary Ion Mass Spectrometry (SIMS) sputter craters on specimen including different multiple layers.

© 2010 Optical Society of America

OCIS Codes
(120.1840) Instrumentation, measurement, and metrology : Densitometers, reflectometers
(120.5700) Instrumentation, measurement, and metrology : Reflection
(230.4170) Optical devices : Multilayers
(310.0310) Thin films : Thin films
(090.1995) Holography : Digital holography

ToC Category:
Holography

History
Original Manuscript: December 8, 2009
Revised Manuscript: February 2, 2010
Manuscript Accepted: February 3, 2010
Published: February 5, 2010

Citation
Tristan Colomb, Stefan Krivec, Herbert Hutter, Ahmet Ata Akatay, Nicolas Pavillon, Frédéric Montfort, Etienne Cuche, Jonas Kühn, Christian Depeursinge, and Yves Emery, "Digital holographic reflectometry," Opt. Express 18, 3719-3731 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-4-3719


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. E. Cuche, P. Marquet, and C. Depeursinge, "Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms," Appl. Opt. 38, 6994-7001 (1999). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-34-6994. [CrossRef]
  2. S. de Nicola, P. Ferraro, A. Finizio, S. Grilli, G. Coppola, M. Iodice, P. De Natale, and M. Chiarini, "Surface topography of microstructures in lithium niobate by digital holographic microscopy," Meas. Sci. Technol. 15, 961-968 (2004). [CrossRef]
  3. J. Kühn, F. Charrière, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, "Axial sub-nanometer accuracy in digital holographic microscopy," Meas. Sci. Technol. 19, 074007 (2008). [CrossRef]
  4. T. Ikeda, G. Popescu, R. Dasari, and M. Feld, "Hilbert phase microscopy for investigating fast dynamics in transparent systems," Opt. Lett. 30, 1165-1167 (2005). [CrossRef] [PubMed]
  5. P. Marquet, B. Rappaz, P. Magistretti, E. Cuche, Y. Emery, T. Colomb, and C. Depeursinge, "Digital holographic microscopy: a noninvasive contrast imaging technique allowing quantitative visualization of living cells with subwavelength axial accuracy," Opt. Lett. 30, 468-470 (2005). URL http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-30-5-468. [CrossRef] [PubMed]
  6. B. Rappaz, A. Barbul, Y. Emery, R. Korenstein, C. Depeursinge, P. Magistretti, and P. Marquet, "Comparative study of human erythrocytes by digital holographic microscopy, confocal microscopy, and impedance volume analyzer," Cytometry Part A 73a, 895-903 (2008). [CrossRef]
  7. B. Rappaz, F. Charrière, C. Depeursinge, P. Magistretti, and P. Marquet, "Simultaneous cell morphometry and refractive index measurement with dual-wavelength digital holographic microscopy and dye-enhanced dispersion of perfusion medium," Opt. Lett. 33, 744-746 (2008). URL http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-33-7-744. [CrossRef] [PubMed]
  8. H. Wahba and T. Kreis, "Characterization of graded index optical fibers by digital holographic interferometry," Appl. Opt. 48, 1573-1582 (2009). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-8-1573. [CrossRef] [PubMed]
  9. C. Yelleswarapu, S.-R. Kothapalli, and D. Rao, "Optical Fourier techniques for medical image processing and phase contrast imaging," Opt. Commun. 281, 1876-1888 (2008). [CrossRef] [PubMed]
  10. C. Moore, "Optical reflectometry elucidates layer thicknesses," III-Vs Review 12, 34-37 (1999). [CrossRef]
  11. P. Hlubina, J. Lunacek, D. Ciprian, and R. Chlebus, "Spectral interferometry and reflectometry used to measure thin films," Applied Physics B: Lasers and Optics 92, 203-207 (2008). [CrossRef]
  12. S. Debnath, M. Kothiyal, J. Schmit, and P. Hariharan, "Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates," Opt. Express 14, 4662 (2006). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-11-4662. [CrossRef] [PubMed]
  13. S. K. Debnath, J. Kothiyal, Mahendra P. Schmit, and P. Hariharan, "Spectrally resolved phase-shifting interferometry of transparent thin films: sensitivity of thickness measurements," Appl. Opt. 45, 8636-8640 (2006). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-34-8636. [CrossRef] [PubMed]
  14. J. Kühn, T. Colomb, F. Montfort, F. Charrière, Y. Emery, E. Cuche, P. Marquet, and C. Depeursinge, "Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition," Opt. Express 15, 7231-7242 (2007). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-12-7231. [CrossRef] [PubMed]
  15. C. Mann, L. Yu, C.-M. Lo, and M. Kim, "High-resolution quantitative phase contrast microscopy by digital holography," Opt. Express 13, 8693-8698 (2005). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-22-8693. [CrossRef] [PubMed]
  16. E. Cuche, P. Marquet, and C. Depeursinge, "Spatial filtering for zero-order and twin image elimination in digital off-axis holography," Appl. Opt. 39, 4070-4075 (2000). URL http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-23-4070. [CrossRef]
  17. T. Colomb, J. Kühn, F. Charrière, C. Depeursinge, P. Marquet, and N. Aspert, "Total aberrations compensation in digital holographic microscopy with a reference conjugated hologram," Opt. Express 14, 4300-4306 (2006). URL http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-10-4300. [CrossRef] [PubMed]
  18. T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, "Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy," J. Opt. Soc. Am. A 23, 3177-3190 (2006). URL http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-12-3177. [CrossRef] [PubMed]
  19. P. Pereyra and A. Robledo-Martinez, "On the equivalence of the summation and transfer-matrix methods in wave propagation through multilayers of lossless and lossy media," Eur. J. Phys. 30, 393-401 (2009). [CrossRef]
  20. C. Cobianu, C. Pavelescu, and A. Paunescu, "The effect of deposition conditions on the refractive index of LTCVD SiO2 films," Journal of Materials Science Letters 4, 1419-1420 (1985). [CrossRef]
  21. URL http://refractiveindex.info/.
  22. D. S. McPhail, "Applications of Secondary Ion Mass Spectrometry (SIMS) in Materials Science," J. Mater. Sci. 41, 873-903 (2006). [CrossRef]
  23. Y. Yamamura and M. Ishida, "Simulation of oxide sputtering and SIMS depth profiling of delta-doped layer," Applied Surface Science 203-204, 62-68 (2003). [CrossRef]
  24. A. Kalnitsky, S. P. Tay, J. P. Ellul, S. Chongsawangvirod, J. W. Andrews, and E. A. Irene, "Measurements and modeling of thin silicon dioxide films on silicon," J. Electrochem. Soc. 1, 234-238 (1990). [CrossRef]
  25. Y. Wang and E. A. Irene, "Consistent refractive index parameters for ultrathin SiO2 films," J. Vac. Sci. Technol. B 18, 279-282 (2000). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited