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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 4 — Feb. 15, 2010
  • pp: 3850–3857

Nanophotonic devices on thin buried oxide Silicon-On-Insulator substrates

Suresh Sridaran and Sunil A. Bhave  »View Author Affiliations


Optics Express, Vol. 18, Issue 4, pp. 3850-3857 (2010)
http://dx.doi.org/10.1364/OE.18.003850


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Abstract

We demonstrate a silicon photonic platform using thin buried oxide silicon-on-insulator (SOI) substrates using localized substrate removal. We show high confinement silicon strip waveguides, micro-ring resonators and nanotapers using this technology. Propagation losses for the waveguides using the cutback method are 3.88 dB/cm for the quasi-TE mode and 5.06 dB/cm for the quasi-TM mode. Ring resonators with a loaded quality factor (Q) of 46,500 for the quasi-TM mode and intrinsic Q of 148,000 for the quasi-TE mode have been obtained. This process will enable the integration of photonic structures with thin buried oxide SOI based electronics.

© 2010 OSA

OCIS Codes
(230.3120) Optical devices : Integrated optics devices
(230.7370) Optical devices : Waveguides
(250.5300) Optoelectronics : Photonic integrated circuits

ToC Category:
Integrated Optics

History
Original Manuscript: November 24, 2009
Revised Manuscript: February 1, 2010
Manuscript Accepted: February 3, 2010
Published: February 11, 2010

Citation
Suresh Sridaran and Sunil A. Bhave, "Nanophotonic devices on thin buried oxide 
Silicon-On-Insulator substrates," Opt. Express 18, 3850-3857 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-4-3850


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References

  1. D. A. B. Miller, “Rationale and challenges for optical interconnects to electronic chips,” Proc. IEEE 88(6), 728–749 (2000). [CrossRef]
  2. M. Lipson, “Guiding, modulating and emitting light on silicon – challenges and opportunities,” J. Lightwave Technol. 23(12), 4222–4238 (2005). [CrossRef]
  3. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005). [CrossRef] [PubMed]
  4. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, “A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor,” Nature 427(6975), 615–618 (2004). [CrossRef] [PubMed]
  5. S. Manipatruni, Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, “High speed carrier injection 18 Gb/s silicon micro-ring electro-optic modulator,” The 20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2007, 21–25 Oct. 2007, pp. 537–538.
  6. C. Gunn, “CMOS photonics for high-speed interconnects,” IEEE Micro 26(2), 58–66 (2006). [CrossRef]
  7. M. R. Watts, D. C. Trotter, R. W. Young, and A. L. Lentine, “Ultralow power silicon microdisk modulators and switches,” The 5th IEEE International Conference on Group IV Photonics, 17–19 Sept. 2008, pp. 4–6.
  8. S. Assefa, F. Xia, S. W. Bedell, Y. Zhang, T. Topuria, P. M. Rice, and Y. Vlasov, “CMOS-integrated high-speed germanium waveguide photodetector for optical interconnects,” Conference on Lasers and Electro-Optics, CLEO2009, 31 May 2009, paper CTuV1.
  9. R. Koh, “Buried layer engineering to reduce the drain-induced barrier lowering of sub-0.05 µm SOI-MOSFET,” Jpn. J. Appl. Phys. 38(Part 1, No. 4B), 2294–2299 (1999). [CrossRef]
  10. L. T. Su, J. E. Chung, D. A. Antoniadis, K. E. Goodson, and M. I. Flik, “Measurement and modeling of self-heating in SOI NMOSFET’s,” IEEE Trans. Electron. Dev. 41(1), 69–75 (1994). [CrossRef]
  11. M. Gnan, S. Thoms, D. S. Macintyre, R. M. De La Rue, and M. Sorel, “Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,” Electron. Lett. 44(2), 115–116 (2008). [CrossRef]
  12. Y. Vlasov and S. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express 12(8), 1622–1631 (2004). [CrossRef] [PubMed]
  13. K. K. Lee, D. R. Lim, L. C. Kimerling, J. Shin, and F. Cerrina, “Fabrication of ultralow-loss Si/SiO(2) waveguides by roughness reduction,” Opt. Lett. 26(23), 1888–1890 (2001). [CrossRef]
  14. T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q ring resonators in thin silicon-on-insulator,” Appl. Phys. Lett. 85(16), 3346–3347 (2004). [CrossRef]
  15. P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16(5), 1328–1330 (2004). [CrossRef]
  16. J.-T. Park and J.-P. Colinge, “Multiple-gate SOI MOSFETs: device design guidelines,” IEEE Trans. Electron. Dev. 49(12), 2222–2229 (2002). [CrossRef]
  17. D. Hisamoto, W.-C. Lee, J. Kedzierski, H. Takeuchi, K. Asano, C. Kuo, E. Anderson, T.-J. King, J. Bokor, and C. Hu, “FinFET-a self-aligned double-gate MOSFET scalable to 20 nm,” IEEE Trans. Electron. Dev. 47(12), 2320–2325 (2000). [CrossRef]
  18. P. B. Chu, J. T. Chen, R. Yeh, G. Lin, J. C. P. Huang, B. A. Warneke, and K. S. J. Pister, “Controlled pulse-etching with xenon difluoride,” International Conference on Solid State Sensors and Actuators, Transducers’97, 16–19 June 1997, pp. 665–668.
  19. C. W. Holzwarth, J. S. Orcutt, H. Li, M. A. Popovic, V. Stojanovic, J. L. Hoyt, R. J. Ram, and H. I. Smith, “Localized substrate removal technique enabling strong-confinement microphotonics in bulk Si CMOS processes,” Conference on Lasers and Electro-Optics, CLEO2008, 4 May 2008, paper CThKK5.
  20. C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009). [CrossRef]
  21. V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003). [CrossRef] [PubMed]
  22. B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J.-P. Laine, “Microring resonator channel dropping filters,” J. Lightwave Technol. 15(6), 998–1005 (1997). [CrossRef]
  23. K. Preston, B. Schmidt, and M. Lipson, “Polysilicon photonic resonators for large-scale 3D integration of optical networks,” Opt. Express 15(25), 17283–17290 (2007). [CrossRef] [PubMed]
  24. Z. Zhang, M. Dainese, L. Wosinski, and M. Qiu, “Resonance-splitting and enhanced notch depth in SOI ring resonators with mutual mode coupling,” Opt. Express 16(7), 4621–4630 (2008). [CrossRef] [PubMed]
  25. Q. Li, Z. Zhang, F. Liu, M. Qiu, and Y. Su, “Dense wavelength conversion and multicasting in a resonance-split silicon microring,” Appl. Phys. Lett. 93(8), 081113 (2008). [CrossRef]

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