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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 5 — Mar. 1, 2010
  • pp: 4986–4999

CMOS-integrated high-speed MSM germanium waveguide photodetector

Solomon Assefa, Fengnian Xia, Stephen W. Bedell, Ying Zhang, Teya Topuria, Philip M. Rice, and Yurii A. Vlasov  »View Author Affiliations


Optics Express, Vol. 18, Issue 5, pp. 4986-4999 (2010)
http://dx.doi.org/10.1364/OE.18.004986


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Abstract

A compact waveguide-integrated Germanium-on-insulator (GOI) photodetector with 10 ± 2fF capacitance and operating at 40Gbps is demonstrated. Monolithic integration of thin single-crystalline Ge into front-end CMOS stack was achieved by rapid melt growth during source-drain implant activation anneal.

© 2010 OSA

OCIS Codes
(040.5160) Detectors : Photodetectors
(130.0250) Integrated optics : Optoelectronics
(130.1750) Integrated optics : Components
(130.3120) Integrated optics : Integrated optics devices
(200.4650) Optics in computing : Optical interconnects

ToC Category:
Detectors

History
Original Manuscript: December 23, 2009
Revised Manuscript: January 30, 2010
Manuscript Accepted: January 30, 2010
Published: February 25, 2010

Citation
Solomon Assefa, Fengnian Xia, Stephen W. Bedell, Ying Zhang, Teya Topuria, Philip M. Rice, and Yurii A. Vlasov, "CMOS-integrated high-speed MSM germanium waveguide photodetector," Opt. Express 18, 4986-4999 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-5-4986


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References

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