Measurement of influence function using swing arm profilometer and laser tracker
Optics Express, Vol. 18, Issue 5, pp. 5271-5281 (2010)
http://dx.doi.org/10.1364/OE.18.005271
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Abstract
We present a novel method to accurately measure 3D polishing influence functions by using a swing arm profilometer (SAP) and a laser tracker. The laser tracker is used to align the SAP and measure the parameters of the SAP setup before measuring the influence function. The instruments and the measurement method are described, together with measurement uncertainty analysis. An influence function deliberately produced with asymmetric form in order to create a challenging test is measured, and compared with that of a commercial 3D profilometer. The SAP result is 48.2μm in PV, 7.271mm3 in volume. The 3D profilometer result is 48.4μm in PV, 7.289mm3 in volume. The forms of the two results show excellent correlation. This gives confidence of the viability of the SAP method for larger influence functions out of range of the commercial instrument.
© 2010 OSA
OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.4840) Optical design and fabrication : Testing
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: December 22, 2009
Revised Manuscript: February 4, 2010
Manuscript Accepted: February 24, 2010
Published: February 26, 2010
Citation
Hongwei Jing, Christopher King, and David Walker, "Measurement of influence function using swing arm profilometer and laser tracker," Opt. Express 18, 5271-5281 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-5-5271
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References
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