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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 6 — Mar. 15, 2010
  • pp: 5831–5839

Detection method of nonlinearity errors by statistical signal analysis in heterodyne Michelson interferometer

Juju Hu, Haijiang Hu, and Yinghua Ji  »View Author Affiliations

Optics Express, Vol. 18, Issue 6, pp. 5831-5839 (2010)

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Periodic nonlinearity that ranges from tens of nanometers to a few nanometers in heterodyne interferometer limits its use in high accuracy measurement. A novel method is studied to detect the nonlinearity errors based on the electrical subdivision and the analysis method of statistical signal in heterodyne Michelson interferometer. Under the movement of micropositioning platform with the uniform velocity, the method can detect the nonlinearity errors by using the regression analysis and Jackknife estimation. Based on the analysis of the simulations, the method can estimate the influence of nonlinearity errors and other noises for the dimensions measurement in heterodyne Michelson interferometer.

© 2010 OSA

OCIS Codes
(120.1880) Instrumentation, measurement, and metrology : Detection
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: December 17, 2009
Revised Manuscript: February 12, 2010
Manuscript Accepted: February 24, 2010
Published: March 9, 2010

Juju Hu, Haijiang Hu, and Yinghua Ji, "Detection method of nonlinearity errors by statistical signal analysis in heterodyne Michelson interferometer," Opt. Express 18, 5831-5839 (2010)

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