Electro-optic modulator with exceptional power-size performance enabled by transparent conducting electrodes

doi:10.1364/OE.18.006779

Electro-optic modulator with exceptional power-size performance enabled by transparent conducting electrodes

Fei Yi, Fang Ou, Boyang Liu, Yingyan Huang, Seng-Tiong Ho, Yiliang Wang, Jun Liu, Tobin J. Marks, Su Huang, Jingdong Luo, Alex K.-Y. Jen, Raluca Dinu, and Dan Jin »View Author Affiliations

Optics Express, Vol. 18, Issue 7, pp. 6779-6796 (2010)
http://dx.doi.org/10.1364/OE.18.006779

View Full Text Article

Enhanced HTML Acrobat PDF (740 KB)

Journal Search
Article Lookup

Article Tools

Citations

Alert me when this article is cited
Export Citation/Save

Abstract
Article Info
References (29)
Cited By
Figures (11)
Metrics
Related Content

Abstract

An EO phase modulator having transparent conducting oxide electrodes and an inverted rib waveguide structure is demonstrated. This new modulator geometry employs an EO polymer having an in-device r₃₃ = 60pm/V. The measured half-wave voltage V_π of these devices ranges from 5.3V to 11.2V for 3.8 and 1.5 mm long devices, respectively. The lowest V_πL figure-of-merit corresponds to 0.6V-cm (7.2mW-cm² of power length product) in a dual-drive configuration. The trade-off between V_π , insertion loss and modulation bandwidth is systematically analyzed. An optimized high-speed structure is proposed, with numerical simulation showing that this new structure and an in-device r₃₃ = 150pm/V, can achieve V_π = 0.5V in a 5mm long active length with dual drive operation. The insertion loss is targeted at 6dB, and a 3dB optical modulation bandwidth can reach > 40GHz.

OCIS Codes
(250.2080) Optoelectronics : Polymer active devices
(250.4110) Optoelectronics : Modulators

ToC Category:
Optoelectronics

History
Original Manuscript: January 5, 2010
Revised Manuscript: February 26, 2010
Manuscript Accepted: March 1, 2010
Published: March 17, 2010

Citation
Fei Yi, Fang Ou, Boyang Liu, Yingyan Huang, Seng-Tiong Ho, Yiliang Wang, Jun Liu, Tobin J. Marks, Su Huang, Jingdong Luo, Alex K.-Y. Jen, Raluca Dinu, and Dan Jin, "Electro-optic modulator with exceptional power-size performance enabled by transparent conducting electrodes," Opt. Express 18, 6779-6796 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-7-6779

Sort: Author | Year | Journal | Reset

References

W. S. C. Chang, RF Photonics Technology in Optical Fiber Links, Cambridge University Press (2002).
M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1699–1705 (2006). [CrossRef]
B. Kuhlow, “Modulators,” in Laser Fundamentals Part 2, Springer Berlin Heidelberg (2006).
Y.-J. Cheng, J. Luo, S. Huang, X. Zhou, Z. Shi, T.-D. Kim, D. H. Bale, S. Takahashi, A. Yick, B. M. Polishak, S.-H. Jang, L. R. Dalton, P. J. Reid, W. H. Steier, and A. K.-Y. Jen, “Donor-Acceptor Thiolated Polyenic Chromophores Exhibiting Large Optical Nonlinearity and Excellent Photostability,” Chem. Mater. 20(15), 5047–5054 (2008). [CrossRef]
P. A. Sullivan, H. Rommel, Y. Liao, B. C. Olbricht, A. J. P. Akelaitis, K. A. Firestone, J.-W. Kang, J. Luo, J. A. Davies, D.-H. Choi, B. E. Eichinger, P. J. Reid, A. Chen, A. K.-Y. Jen, B. H. Robinson, and L. R. Dalton, “Theory-guided design and synthesis of multichromophore dendrimers: an analysis of the electro-optic effect,” J. Am. Chem. Soc. 129(24), 7523–7530 (2007). [CrossRef] [PubMed]
T.-D. Kim, J.-W. Kang, J. Luo, S.-H. Jang, J.-W. Ka, N. Tucker, J. B. Benedict, L. R. Dalton, T. Gray, R. M. Overney, D. H. Park, W. N. Herman, and A. K.-Y. Jen, “Ultralarge and thermally stable electro-optic activities from supramolecular self-assembled molecular glasses,” J. Am. Chem. Soc. 129(3), 488–489 (2007). [CrossRef] [PubMed]
Y. Wang, D. L. Frattarelli, A. Facchetti, E. Cariati, E. Tordin, R. Ugo, C. Zuccaccia, A. Macchioni, S. L. Wegener, C. L. Stern, M. A. Ratner, and T. J. Marks, “Twisted π-Electron System Electro-Optic Chromophores. Structural and Electronic Consequences of Relaxing Twist-Inducing Non-Bonded Repulsions,” J. Phys. Chem. C 112(21), 8005–8015 (2008). [CrossRef]
E. C. Brown, T. J. Marks, and M. A. Ratner, “Nonlinear response properties of ultralarge hyperpolarizability twisted π-system donor-acceptor chromophores. Dramatic environmental effects on response,” J. Phys. Chem. B 112(1), 44–50 (2008). [CrossRef]
H. Kang, A. Facchetti, H. Jiang, E. Cariati, S. Righetto, R. Ugo, C. Zuccaccia, A. Macchioni, C. L. Stern, Z. Liu, S.-T. Ho, E. C. Brown, M. A. Ratner, and T. J. Marks, “Ultralarge hyperpolarizability twisted π-electron system electro-optic chromophores: synthesis, solid-state and solution-phase structural characteristics, electronic structures, linear and nonlinear optical properties, and computational studies,” J. Am. Chem. Soc. 129(11), 3267–3286 (2007). [CrossRef] [PubMed]
G. Xu, Z. Liu, J. Ma, B. Liu, S. T. Ho, L. Wang, P. Zhu, T. J. Marks, J. Luo, and A.-K. Jen, “Organic electro-optic modulator using transparent conducting oxides as electrodes,” Opt. Express 13(19), 7380–7385 (2005). [CrossRef] [PubMed]
Y. Enami, C. T. Derose, D. Mathine, C. Loychik, C. Greenlee, R. A. Norwood, T.-D. Kim, J. Luo, Y. Tian, A. K.-Y. Jen, and N. Peyghambarian, “Hybrid polymer/sol–gel waveguide modulators with exceptionally large electro–optic coefficients,” Nat. Photonics 1(3), 180–185 (2007). [CrossRef]
Y. Enami, D. Mathine, C. T. DeRose, R. A. Norwood, J. Luo, A. K.-Y. Jen, and N. Peyghambarian, “Hybrid cross-linkable polymer/sol-gel waveguide modulators with 0.65V half wave voltage at 1550nm,” Appl. Phys. Lett. 91(9), 093505 (2007). [CrossRef]
D. Jin, D. Huang, B. Chen, H. Chen, L. Zheng, A. Barklund, G. Yu, E. Miller, M. Moolayil, B. Li, and R. Dinu, “Low half-wave voltage modulators using nonlinear optical polymers,” Proc. SPIE 6653, 66530Q (2007). [CrossRef]
R. Dinu, D. Jin, D. Huang, M. K. Koening, A. M. Barklund, and Y. Fang, “T. C. Parker Z. Shi, J. Luo and A. K.-Y. Jen, “Low-voltage electro-optic polymer modulators,” Proc. SPIE 6243, 62430G (2006). [CrossRef]
Y. Shi, W. Lin, D. J. Olson, J. H. Bechtel, H. Zhang, W. H. Steier, C. Zhang, and L. R. Dalton, “Electro-optic polymer modulators with 0.8 V half-wave voltage,” Appl. Phys. Lett. 77(1), 1–3 (2000). [CrossRef]
R. Harold Fetterman and William H. Steier, “High-Speed Polymer Optical Modulators and Their Applications,” in High-speed photonic devices, by Nadir Dagli, Taylor & Francis (2003)
J. K. Luo and H. Thomas, “Transport properties of indium tin oxide/p-InP structures,” Appl. Phys. Lett. 62(7), 705 (1993). [CrossRef]
M. J. Tsai, A. L. Fahrenbruch, and R. H. Bube, “Sputtered oxide/indium phosphide junctions and indium phosphide surfaces,” J. Appl. Phys. 51(5), 2696 (1980). [CrossRef]
M. Yan, M. Lane, C. R. Kannewurf, and R. P. H. Chang, “Highly conductive epitaxial CdO2 thin films prepared by pulsed laser depostion,” Appl. Phys. Lett. 78(16), 2342 (2001). [CrossRef]
X. Wang, S. Yang, J. Wang, M. Li, X. Jiang, G. Du, X. Liu, and R. P. H. Chang, “Structural and optical properties of ZnO films by plasma-assisted MOCVD,” Opt. Quantum Electron. 34(9), 883–891 (2002). [CrossRef]
M. Yan, Y. Koide, J. R. Babcock, P. R. Markworth, J. A. Belot, T. J. Marks, and R. P. H. Chang, “Selective-area atomic layer epitaxy growth of ZnO features on soft lithography-patterned substrates,” Appl. Phys. Lett. 79(11), 1709 (2001). [CrossRef]
R. Asahi, A. Wang, J. R. Babcock, N. L. Edleman, A. W. Metz, M. A. Lane, V. P. Dravid, C. R. Kannewurf, A. J. Freeman, and T. J. Marks, “First-Principles Calculations for Understanding High Conductivity and Optical Transparency in InxCd1-xO Films,” Thin Solid Films 411(1), 101–105 (2002). [CrossRef]
A. J. Freeman, K. R. Poeppelmeier, T. O. Mason, R. P. H. Chang, and T. J. Marks, “Chemical and Thin Film Strategies for new Transparent Conducting Oxides,” Mats. Res. Soc. Bull. 25, 45–51 (2000). [CrossRef]
L. Wang, M. H. Yoon, G. Lu, Y. Yang, A. Facchetti, and T. J. Marks, “High-performance transparent inorganic-organic hybrid thin-film n-type transistors,” Nat. Mater. 5(11), 893–900 (2006). [CrossRef] [PubMed]
R. M. Corless, G. H. Gonnet, D. E. G. Hare, D. J. Jeffrey, and D. E. Knuth, “On the Lambert W function,” Adv. Comput. Math. 5(1), 329–359 (1996). [CrossRef]
COMSOL Multiphysics 3.5, COMSOL AB.
Lumerical Mode Solutions 3.01 trial, Lumerical Solutions Inc.
S. Y. Wang and S. H. Lin, “High speed III-V electrooptic waveguide modulators at λ = 1.3 μm,” J. Lightwave Technol. 6(6), 758–771 (1988). [CrossRef]
High Frequency Structure Simulator 9.1, Ansoft Corp.

Akelaitis, A. J. P.
Albonesi, D. H.
Asahi, R.
Babcock, J. R.
Bale, D. H.
Barklund, A.
Barklund, A. M.
Bechtel, J. H.
Belot, J. A.
Benedict, J. B.
Brown, E. C.
Bube, R. H.
Cariati, E.
Chang, R. P. H.
Chen, A.
Chen, B.
Chen, G.
Chen, H.
Cheng, Y.-J.
Choi, D.-H.
Corless, R. M.
Dalton, L. R.
Davies, J. A.
Derose, C. T.
Dinu, R.
Dravid, V. P.
Du, G.
Edleman, N. L.
Eichinger, B. E.
Enami, Y.
Facchetti, A.
Fahrenbruch, A. L.
Fang, Y.
Fauchet, P. M.
Firestone, K. A.
Frattarelli, D. L.
Freeman, A. J.
Friedman, E. G.
Gonnet, G. H.
Gray, T.
Greenlee, C.
Hare, D. E. G.
Haurylau, M.
Herman, W. N.
Ho, S. T.
Ho, S.-T.
Huang, D.
Huang, S.
Jang, S.-H.
Jeffrey, D. J.
Jen, A. K.-Y.
Jen, A.-K.
Jiang, H.
Jiang, X.
Jin, D.
Ka, J.-W.
Kang, H.
Kang, J.-W.
Kannewurf, C. R.
Kim, T.-D.
Knuth, D. E.
Koening, M. K.
Koide, Y.
Lane, M.
Lane, M. A.
Li, B.
Li, M.
Liao, Y.
Lin, S. H.
Lin, W.
Liu, B.
Liu, X.
Liu, Z.
Loychik, C.
Lu, G.
Luo, J.
Luo, J. K.
Ma, J.
Macchioni, A.
Marks, T. J.
Markworth, P. R.
Mason, T. O.
Mathine, D.
Metz, A. W.
Miller, E.
Moolayil, M.
Nelson, N. A.
Norwood, R. A.
Olbricht, B. C.
Olson, D. J.
Overney, R. M.
Park, D. H.
Peyghambarian, N.
Poeppelmeier, K. R.
Polishak, B. M.
Ratner, M. A.
Reid, P. J.
Righetto, S.
Robinson, B. H.
Rommel, H.
Shi, Y.
Shi, Z.
Steier, W. H.
Stern, C. L.
Sullivan, P. A.
Takahashi, S.
Thomas, H.
Tian, Y.
Tordin, E.
Tsai, M. J.
Tucker, N.
Ugo, R.
Wang, A.
Wang, J.
Wang, L.
Wang, S. Y.
Wang, X.
Wang, Y.
Wegener, S. L.
Xu, G.
Yan, M.
Yang, S.
Yang, Y.
Yick, A.
Yoon, M. H.
Yu, G.
Zhang, C.
Zhang, H.
Zhang, J.
Zheng, L.
Zhou, X.
Zhu, P.
Zuccaccia, C.

Adv. Comput. Math.

R. M. Corless, G. H. Gonnet, D. E. G. Hare, D. J. Jeffrey, and D. E. Knuth, “On the Lambert W function,” Adv. Comput. Math. 5(1), 329–359 (1996). [CrossRef]

Appl. Phys. Lett.

M. Yan, M. Lane, C. R. Kannewurf, and R. P. H. Chang, “Highly conductive epitaxial CdO2 thin films prepared by pulsed laser depostion,” Appl. Phys. Lett. 78(16), 2342 (2001). [CrossRef]
M. Yan, Y. Koide, J. R. Babcock, P. R. Markworth, J. A. Belot, T. J. Marks, and R. P. H. Chang, “Selective-area atomic layer epitaxy growth of ZnO features on soft lithography-patterned substrates,” Appl. Phys. Lett. 79(11), 1709 (2001). [CrossRef]
Y. Enami, D. Mathine, C. T. DeRose, R. A. Norwood, J. Luo, A. K.-Y. Jen, and N. Peyghambarian, “Hybrid cross-linkable polymer/sol-gel waveguide modulators with 0.65V half wave voltage at 1550nm,” Appl. Phys. Lett. 91(9), 093505 (2007). [CrossRef]
Y. Shi, W. Lin, D. J. Olson, J. H. Bechtel, H. Zhang, W. H. Steier, C. Zhang, and L. R. Dalton, “Electro-optic polymer modulators with 0.8 V half-wave voltage,” Appl. Phys. Lett. 77(1), 1–3 (2000). [CrossRef]
J. K. Luo and H. Thomas, “Transport properties of indium tin oxide/p-InP structures,” Appl. Phys. Lett. 62(7), 705 (1993). [CrossRef]

Chem. Mater.

Y.-J. Cheng, J. Luo, S. Huang, X. Zhou, Z. Shi, T.-D. Kim, D. H. Bale, S. Takahashi, A. Yick, B. M. Polishak, S.-H. Jang, L. R. Dalton, P. J. Reid, W. H. Steier, and A. K.-Y. Jen, “Donor-Acceptor Thiolated Polyenic Chromophores Exhibiting Large Optical Nonlinearity and Excellent Photostability,” Chem. Mater. 20(15), 5047–5054 (2008). [CrossRef]

IEEE J. Sel. Top. Quantum Electron.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1699–1705 (2006). [CrossRef]

J. Am. Chem. Soc.

P. A. Sullivan, H. Rommel, Y. Liao, B. C. Olbricht, A. J. P. Akelaitis, K. A. Firestone, J.-W. Kang, J. Luo, J. A. Davies, D.-H. Choi, B. E. Eichinger, P. J. Reid, A. Chen, A. K.-Y. Jen, B. H. Robinson, and L. R. Dalton, “Theory-guided design and synthesis of multichromophore dendrimers: an analysis of the electro-optic effect,” J. Am. Chem. Soc. 129(24), 7523–7530 (2007). [CrossRef] [PubMed]
T.-D. Kim, J.-W. Kang, J. Luo, S.-H. Jang, J.-W. Ka, N. Tucker, J. B. Benedict, L. R. Dalton, T. Gray, R. M. Overney, D. H. Park, W. N. Herman, and A. K.-Y. Jen, “Ultralarge and thermally stable electro-optic activities from supramolecular self-assembled molecular glasses,” J. Am. Chem. Soc. 129(3), 488–489 (2007). [CrossRef] [PubMed]
H. Kang, A. Facchetti, H. Jiang, E. Cariati, S. Righetto, R. Ugo, C. Zuccaccia, A. Macchioni, C. L. Stern, Z. Liu, S.-T. Ho, E. C. Brown, M. A. Ratner, and T. J. Marks, “Ultralarge hyperpolarizability twisted π-electron system electro-optic chromophores: synthesis, solid-state and solution-phase structural characteristics, electronic structures, linear and nonlinear optical properties, and computational studies,” J. Am. Chem. Soc. 129(11), 3267–3286 (2007). [CrossRef] [PubMed]

J. Appl. Phys.

M. J. Tsai, A. L. Fahrenbruch, and R. H. Bube, “Sputtered oxide/indium phosphide junctions and indium phosphide surfaces,” J. Appl. Phys. 51(5), 2696 (1980). [CrossRef]

J. Lightwave Technol.

S. Y. Wang and S. H. Lin, “High speed III-V electrooptic waveguide modulators at λ = 1.3 μm,” J. Lightwave Technol. 6(6), 758–771 (1988). [CrossRef]

J. Phys. Chem. B

E. C. Brown, T. J. Marks, and M. A. Ratner, “Nonlinear response properties of ultralarge hyperpolarizability twisted π-system donor-acceptor chromophores. Dramatic environmental effects on response,” J. Phys. Chem. B 112(1), 44–50 (2008). [CrossRef]

J. Phys. Chem. C

Y. Wang, D. L. Frattarelli, A. Facchetti, E. Cariati, E. Tordin, R. Ugo, C. Zuccaccia, A. Macchioni, S. L. Wegener, C. L. Stern, M. A. Ratner, and T. J. Marks, “Twisted π-Electron System Electro-Optic Chromophores. Structural and Electronic Consequences of Relaxing Twist-Inducing Non-Bonded Repulsions,” J. Phys. Chem. C 112(21), 8005–8015 (2008). [CrossRef]

Mats. Res. Soc. Bull.

A. J. Freeman, K. R. Poeppelmeier, T. O. Mason, R. P. H. Chang, and T. J. Marks, “Chemical and Thin Film Strategies for new Transparent Conducting Oxides,” Mats. Res. Soc. Bull. 25, 45–51 (2000). [CrossRef]

Nat. Mater.

L. Wang, M. H. Yoon, G. Lu, Y. Yang, A. Facchetti, and T. J. Marks, “High-performance transparent inorganic-organic hybrid thin-film n-type transistors,” Nat. Mater. 5(11), 893–900 (2006). [CrossRef] [PubMed]

Nat. Photonics

Y. Enami, C. T. Derose, D. Mathine, C. Loychik, C. Greenlee, R. A. Norwood, T.-D. Kim, J. Luo, Y. Tian, A. K.-Y. Jen, and N. Peyghambarian, “Hybrid polymer/sol–gel waveguide modulators with exceptionally large electro–optic coefficients,” Nat. Photonics 1(3), 180–185 (2007). [CrossRef]

Opt. Express

G. Xu, Z. Liu, J. Ma, B. Liu, S. T. Ho, L. Wang, P. Zhu, T. J. Marks, J. Luo, and A.-K. Jen, “Organic electro-optic modulator using transparent conducting oxides as electrodes,” Opt. Express 13(19), 7380–7385 (2005). [CrossRef] [PubMed]

Opt. Quantum Electron.

X. Wang, S. Yang, J. Wang, M. Li, X. Jiang, G. Du, X. Liu, and R. P. H. Chang, “Structural and optical properties of ZnO films by plasma-assisted MOCVD,” Opt. Quantum Electron. 34(9), 883–891 (2002). [CrossRef]

Proc. SPIE

D. Jin, D. Huang, B. Chen, H. Chen, L. Zheng, A. Barklund, G. Yu, E. Miller, M. Moolayil, B. Li, and R. Dinu, “Low half-wave voltage modulators using nonlinear optical polymers,” Proc. SPIE 6653, 66530Q (2007). [CrossRef]
R. Dinu, D. Jin, D. Huang, M. K. Koening, A. M. Barklund, and Y. Fang, “T. C. Parker Z. Shi, J. Luo and A. K.-Y. Jen, “Low-voltage electro-optic polymer modulators,” Proc. SPIE 6243, 62430G (2006). [CrossRef]

Thin Solid Films

R. Asahi, A. Wang, J. R. Babcock, N. L. Edleman, A. W. Metz, M. A. Lane, V. P. Dravid, C. R. Kannewurf, A. J. Freeman, and T. J. Marks, “First-Principles Calculations for Understanding High Conductivity and Optical Transparency in InxCd1-xO Films,” Thin Solid Films 411(1), 101–105 (2002). [CrossRef]

Other

COMSOL Multiphysics 3.5, COMSOL AB.
Lumerical Mode Solutions 3.01 trial, Lumerical Solutions Inc.
High Frequency Structure Simulator 9.1, Ansoft Corp.
R. Harold Fetterman and William H. Steier, “High-Speed Polymer Optical Modulators and Their Applications,” in High-speed photonic devices, by Nadir Dagli, Taylor & Francis (2003)
W. S. C. Chang, RF Photonics Technology in Optical Fiber Links, Cambridge University Press (2002).
B. Kuhlow, “Modulators,” in Laser Fundamentals Part 2, Springer Berlin Heidelberg (2006).

2008, Wang, J. Phys. Chem. C
2008, Brown, J. Phys. Chem. B
2008, Cheng, Chem. Mater.
2007, Sullivan, J. Am. Chem. Soc.
2007, Kim, J. Am. Chem. Soc.
2007, Kang, J. Am. Chem. Soc.
2007, Enami, Nat. Photonics
2007, Enami, Appl. Phys. Lett.
2007, Jin, Proc. SPIE
2006, Dinu, Proc. SPIE
2006, Haurylau, IEEE J. Sel. Top. Quantum Electron.
2006, Wang, Nat. Mater.
2005, Xu, Opt. Express
2002, Wang, Opt. Quantum Electron.
2002, Asahi, Thin Solid Films
2001, Yan, Appl. Phys. Lett.
2001, Yan, Appl. Phys. Lett.
2000, Freeman, Mats. Res. Soc. Bull.
2000, Shi, Appl. Phys. Lett.
1996, Corless, Adv. Comput. Math.
1993, Luo, Appl. Phys. Lett.
1988, Wang, J. Lightwave Technol.
1980, Tsai, J. Appl. Phys.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Click here to see a list of articles that cite this paper