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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 7 — Mar. 29, 2010
  • pp: 6885–6890

Nanogratings and nanoholes fabricated by direct femtosecond laser writing in chalcogenide glasses

Qiming Zhang, Han Lin, Baohua Jia, Lei Xu, and Min Gu  »View Author Affiliations

Optics Express, Vol. 18, Issue 7, pp. 6885-6890 (2010)

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We report on the fabrication of sub-wavelength nanostructures on the surface of As2S3 chalcogenide glasses by appropriately controlling the irradiation condition of single-beam direct femtosecond laser writing. Nanogratings with a period of 180 nm were realized by multipulse irradiation. More importantly controllable nanoholes as small as 200 nm in diameter (one quarter of the illumination wavelength) were, for the first time, achieved in As2S3 using direct laser writing by single-pulse irradiation.

© 2010 OSA

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(160.2750) Materials : Glass and other amorphous materials
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Laser Micromachining

Original Manuscript: February 17, 2010
Revised Manuscript: March 14, 2010
Manuscript Accepted: March 17, 2010
Published: March 18, 2010

Qiming Zhang, Han Lin, Baohua Jia, Lei Xu, and Min Gu, "Nanogratings and nanoholes fabricated by direct femtosecond laser writing in chalcogenide glasses," Opt. Express 18, 6885-6890 (2010)

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