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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 7 — Mar. 29, 2010
  • pp: 6957–6971

Properties of broadband depth-graded multilayer mirrors for EUV optical systems

A. E. Yakshin, I. V. Kozhevnikov, E. Zoethout, E. Louis, and F. Bijkerk  »View Author Affiliations

Optics Express, Vol. 18, Issue 7, pp. 6957-6971 (2010)

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The optical properties of a-periodic, depth-graded multilayer mirrors operating at 13.5 nm wavelength are investigated using different compositions and designs to provide a constant reflectivity over an essentially wider angular range than periodic multilayers. A reflectivity of up to about 60% is achieved in these calculation in the [0, 18°] range of the angle of incidence for the structures without roughness. The effects of different physical and technological factors (interfacial roughness, natural interlayers, number of bi-layers, minimum layer thickness, inaccuracy of optical constants, and thickness errors) are discussed. The results from an experiment on the fabrication of a depth-graded Mo/Si multilayer mirror with a wide angular bandpass in the [0, 16°] range are presented and analyzed.

© 2010 OSA

OCIS Codes
(230.0230) Optical devices : Optical devices
(230.4170) Optical devices : Multilayers
(310.0310) Thin films : Thin films
(340.0340) X-ray optics : X-ray optics
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(310.4165) Thin films : Multilayer design

ToC Category:
Thin Films

Original Manuscript: January 22, 2010
Revised Manuscript: March 11, 2010
Manuscript Accepted: March 11, 2010
Published: March 19, 2010

A. E. Yakshin, I. V. Kozhevnikov, E. Zoethout, E. Louis, and F. Bijkerk, "Properties of broadband depth-graded multilayer mirrors for EUV optical systems," Opt. Express 18, 6957-6971 (2010)

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