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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 8 — Apr. 12, 2010
  • pp: 8025–8032

Fabrication of micro DOE using micro tools shaped with focused ion beam

Z. W. Xu, F. Z. Fang, S. J. Zhang, X. D. Zhang, X. T. Hu, Y. Q. Fu, and L. Li  »View Author Affiliations


Optics Express, Vol. 18, Issue 8, pp. 8025-8032 (2010)
http://dx.doi.org/10.1364/OE.18.008025


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Abstract

A novel method is proposed to fabricate micro Diffractive Optical Elements (DOE) using micro cutting tools shaped with focused ion beam (FIB) milling. Micro tools with nanometric cutting edges and complicated shapes are fabricated by controlling the tool facet’s orientation relative to the FIB. The tool edge radius of less than 30 nm is achieved for the nano removal of the work materials. Semi-circular micro tools and DOE-shaped micro tools are developed to fabricate micro-DOE and sinusoidal modulation templates. Experiments show that the proposed method can be a high efficient way in fabricating micro-DOE with nanoscale surface finishes.

© 2010 OSA

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.1920) Optical design and fabrication : Diamond machining
(230.4000) Optical devices : Microstructure fabrication

ToC Category:
Diffraction and Gratings

History
Original Manuscript: February 11, 2010
Revised Manuscript: March 26, 2010
Manuscript Accepted: March 26, 2010
Published: March 31, 2010

Citation
Z. W. Xu, F. Z. Fang, S. J. Zhang, X. D. Zhang, X. T. Hu, Y. Q. Fu, and L. Li, "Fabrication of micro DOE using micro tools shaped with focused ion beam," Opt. Express 18, 8025-8032 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-8-8025


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References

  1. H. P. Herzig, Micro-optics: Elements, Systems and Applications (Taylor & Francis Ltd, London, 1997).
  2. S. Maruo and T. Saeki, “Femtosecond laser direct writing of metallic microstructures by photoreduction of silver nitrate in a polymer matrix,” Opt. Express 16(2), 1174–1179 (2008). [CrossRef] [PubMed]
  3. Y. Q. Fu, Y. Liu, X. L. Zhou, Z. W. Xu, and F. Z. Fang, “Experimental investigation of superfocusing of plasmonic lens with chirped circular nanoslits,” Opt. Express 18(4), 3438–3443 (2010). [CrossRef] [PubMed]
  4. A. Y. Yi and L. Li, “Design and fabrication of a microlens array by use of a slow tool servo,” Opt. Lett. 30(13), 1707–1709 (2005). [CrossRef] [PubMed]
  5. M. J. Riedl, “Diamond-turned Diffractive Optical Elements for the Infrared,” Proc. SPIE 2540, 257–269 (1995). [CrossRef]
  6. H. Ohmori, K. Katahira, T. Naruse, Y. Uehara, A. Nakao, and M. Mizutani, “Microscopic Grinding Effects on Fabrication of Ultra-fine Micro Tools,” CIRP Ann. Manuf. Technol. 56(1), 569–572 (2007). [CrossRef]
  7. C. J. Morgan, R. R. Vallance, and E. R. Marsh, “Micro Machining Glass with Polycrystalline Diamond Tools Shaped by Micro Electro Discharge Machining,” J. Micromech. Microeng. 14(12), 1687–1692 (2004). [CrossRef]
  8. Y. N. Picard, D. P. Adams, and M. J. Vasile, “Focused Ion Beam-shaped Microtools for Ultra-precision Machining of Cylindrical Components,” Precis. Eng. 27(1), 59–69 (2003). [CrossRef]
  9. X. Ding, D. L. Butler, G. C. Lim, C. K. Cheng, K. C. Shaw, K. Liu, W. S. Fong, and H. Y. Zheng, “Machining with Micro-size Single Crystalline Diamond Tools Fabricated by a Focused Ion Beam,” J. Micromech. Microeng. 19(2), 025005 (2009). [CrossRef]
  10. F. Z. Fang, X. D. Zhang, and X. T. Hu, “Cylindrical coordinate machining of optical freeform surfaces,” Opt. Express 16(10), 7323–7329 (2008). [CrossRef] [PubMed]

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