Fabrication of micro DOE using micro tools shaped with focused ion beam
Optics Express, Vol. 18, Issue 8, pp. 8025-8032 (2010)
http://dx.doi.org/10.1364/OE.18.008025
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Abstract
A novel method is proposed to fabricate micro Diffractive Optical Elements (DOE) using micro cutting tools shaped with focused ion beam (FIB) milling. Micro tools with nanometric cutting edges and complicated shapes are fabricated by controlling the tool facet’s orientation relative to the FIB. The tool edge radius of less than 30 nm is achieved for the nano removal of the work materials. Semi-circular micro tools and DOE-shaped micro tools are developed to fabricate micro-DOE and sinusoidal modulation templates. Experiments show that the proposed method can be a high efficient way in fabricating micro-DOE with nanoscale surface finishes.
© 2010 OSA
OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.1920) Optical design and fabrication : Diamond machining
(230.4000) Optical devices : Microstructure fabrication
ToC Category:
Diffraction and Gratings
History
Original Manuscript: February 11, 2010
Revised Manuscript: March 26, 2010
Manuscript Accepted: March 26, 2010
Published: March 31, 2010
Citation
Z. W. Xu, F. Z. Fang, S. J. Zhang, X. D. Zhang, X. T. Hu, Y. Q. Fu, and L. Li, "Fabrication of micro DOE using micro tools shaped with focused ion beam," Opt. Express 18, 8025-8032 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-8-8025
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