Submilliwatt thermo-optic switches using free-standing silicon-on-insulator strip waveguides

doi:10.1364/OE.18.008406

Submilliwatt thermo-optic switches using free-standing silicon-on-insulator strip waveguides

Peng Sun and Ronald M. Reano »View Author Affiliations

Optics Express, Vol. 18, Issue 8, pp. 8406-8411 (2010)
http://dx.doi.org/10.1364/OE.18.008406

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Abstract
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References (15)
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Abstract

A low power Mach-Zehnder interferometer thermo-optic switch using free-standing silicon-on-insulator strip waveguides is demonstrated. The air gap provides thermal isolation between the waveguide interferometer arms and the underlying silicon substrate. The highly confined optical modes of the strip waveguides enable miniature heated cross-sections. The heating efficiency from on-chip resistive heaters is enhanced. Measurements of fabricated devices using 100 μm arm lengths at 1550 nm wavelength result in a switching power of 540 μW, a 10% - 90% switching rise time of 141 μs, and an extinction ratio of 25 dB.

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(160.6840) Materials : Thermo-optical materials
(130.4815) Integrated optics : Optical switching devices

ToC Category:
Integrated Optics

History
Original Manuscript: March 9, 2010
Revised Manuscript: April 5, 2010
Manuscript Accepted: April 5, 2010
Published: April 6, 2010

Citation
Peng Sun and Ronald M. Reano, "Submilliwatt thermo-optic switches using free-standing silicon-on-insulator strip waveguides," Opt. Express 18, 8406-8411 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-8-8406

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References

E. Iannone and R. Sabella, “Optical path technologies: a comparison among different cross-connect architectures,” J. Lightwave Technol. 14(10), 2184–2196 (1996). [CrossRef]
K. Sato, “Photonic transport network OAM technologies,” IEEE Commun. Mag. 34(12), 86–94 (1996). [CrossRef]
T. Goh, M. Yasu, K. Hattori, A. Himeno, M. Okuno, and Y. Ohmori, “Low Loss and High Extinction Ratio Strictly Nonblocking 16 × 16 Thermooptic Matrix Switch on 6-in Wafer Using Silica-Based Planar Lightwave Circuit Technology,” J. Lightwave Technol. 19(3), 371–379 (2001). [CrossRef]
J. S. Foresi, D. R. Lim, L. Liao, A. M. Agarwal, and L. C. Kimerling, “Small radius bends and large angle splitters in SOI waveguides,” Proc. SPIE 3007, 112–118 (1997). [CrossRef]
G. Cocorullo and I. Rendina, “Thermo-optical modulation at 1.5 µm in silicon etalon,” Electron. Lett. 28(1), 83–85 (1992). [CrossRef]
D. R. Lide, Handbook of Chemistry and Physics, (CRC, 2008).
G. V. Treyz, “Silicon Mach-Zehnder waveguide interferometers operating at 1.3 µm,” Electron. Lett. 27(2), 118–120 (1991). [CrossRef]
T. Chu, H. Yamada, S. Ishida, and Y. Arakawa, “Compact 1 x N thermo-optic switches based on silicon photonic wire waveguides,” Opt. Express 13(25), 10109–10114 (2005). [CrossRef] [PubMed]
R. L. Espinola, M.-C. Tsai, J. T. Yardley, and R. M. Osgood., “Fast and low-power thermooptic switch on thin silicon-on-insulator,” IEEE Photon. Technol. Lett. 15(10), 1366–1368 (2003). [CrossRef]
S. A. Clark, B. Culshaw, E. J. C. Dawnay, and I. E. Day, “Thermo-optic phase modulators in SIMOX material,” Proc. SPIE 3936, 16–24 (2000). [CrossRef]
A. Densmore, S. Janz, R. Ma, J. H. Schmid, D.-X. Xu, A. Delâge, J. Lapointe, M. Vachon, and P. Cheben, “Compact and low power thermo-optic switch using folded silicon waveguides,” Opt. Express 17(13), 10457–10465 (2009). [CrossRef] [PubMed]
M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, “Submicrosecond Submilliwatt Silicon-on-Insulator Thermooptic Switch,” IEEE Photon. Technol. Lett. 16(11), 2514–2516 (2004). [CrossRef]
J. Song, Q. Fang, S. H. Tao, T. Y. Liow, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Fast and low power Michelson interferometer thermo-optical switch on SOI,” Opt. Express 16(20), 15304–15311 (2008). [CrossRef] [PubMed]
P. Sun and R. M. Reano, “Cantilever couplers for intra-chip coupling to silicon photonic integrated circuits,” Opt. Express 17(6), 4565–4574 (2009). [CrossRef] [PubMed]
C. Z. Tan and J. Arndt, “Temperature dependence of refractive index of glassy SiO2 in the infrared wavelength range,” J. Phys. Chem. Solids 61(8), 1315–1320 (2000). [CrossRef]

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[1] E. Iannone and R. Sabella, “Optical path technologies: a comparison among different cross-connect architectures,” J. Lightwave Technol. 14(10), 2184–2196 (1996). [CrossRef]

[2] K. Sato, “Photonic transport network OAM technologies,” IEEE Commun. Mag. 34(12), 86–94 (1996). [CrossRef]

[3] T. Goh, M. Yasu, K. Hattori, A. Himeno, M. Okuno, and Y. Ohmori, “Low Loss and High Extinction Ratio Strictly Nonblocking 16 × 16 Thermooptic Matrix Switch on 6-in Wafer Using Silica-Based Planar Lightwave Circuit Technology,” J. Lightwave Technol. 19(3), 371–379 (2001). [CrossRef]

[4] J. S. Foresi, D. R. Lim, L. Liao, A. M. Agarwal, and L. C. Kimerling, “Small radius bends and large angle splitters in SOI waveguides,” Proc. SPIE 3007, 112–118 (1997). [CrossRef]

[5] G. Cocorullo and I. Rendina, “Thermo-optical modulation at 1.5 µm in silicon etalon,” Electron. Lett. 28(1), 83–85 (1992). [CrossRef]

[6] D. R. Lide, Handbook of Chemistry and Physics, (CRC, 2008).

[7] G. V. Treyz, “Silicon Mach-Zehnder waveguide interferometers operating at 1.3 µm,” Electron. Lett. 27(2), 118–120 (1991). [CrossRef]

[8] T. Chu, H. Yamada, S. Ishida, and Y. Arakawa, “Compact 1 x N thermo-optic switches based on silicon photonic wire waveguides,” Opt. Express 13(25), 10109–10114 (2005). [CrossRef] [PubMed]

[9] R. L. Espinola, M.-C. Tsai, J. T. Yardley, and R. M. Osgood., “Fast and low-power thermooptic switch on thin silicon-on-insulator,” IEEE Photon. Technol. Lett. 15(10), 1366–1368 (2003). [CrossRef]

[10] S. A. Clark, B. Culshaw, E. J. C. Dawnay, and I. E. Day, “Thermo-optic phase modulators in SIMOX material,” Proc. SPIE 3936, 16–24 (2000). [CrossRef]

[11] A. Densmore, S. Janz, R. Ma, J. H. Schmid, D.-X. Xu, A. Delâge, J. Lapointe, M. Vachon, and P. Cheben, “Compact and low power thermo-optic switch using folded silicon waveguides,” Opt. Express 17(13), 10457–10465 (2009). [CrossRef] [PubMed]

[12] M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, “Submicrosecond Submilliwatt Silicon-on-Insulator Thermooptic Switch,” IEEE Photon. Technol. Lett. 16(11), 2514–2516 (2004). [CrossRef]

[13] J. Song, Q. Fang, S. H. Tao, T. Y. Liow, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Fast and low power Michelson interferometer thermo-optical switch on SOI,” Opt. Express 16(20), 15304–15311 (2008). [CrossRef] [PubMed]

[14] P. Sun and R. M. Reano, “Cantilever couplers for intra-chip coupling to silicon photonic integrated circuits,” Opt. Express 17(6), 4565–4574 (2009). [CrossRef] [PubMed]

[15] C. Z. Tan and J. Arndt, “Temperature dependence of refractive index of glassy SiO2 in the infrared wavelength range,” J. Phys. Chem. Solids 61(8), 1315–1320 (2000). [CrossRef]

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Submilliwatt thermo-optic switches using free-standing silicon-on-insulator strip waveguides