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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 8 — Apr. 12, 2010
  • pp: 8406–8411

Submilliwatt thermo-optic switches using free-standing silicon-on-insulator strip waveguides

Peng Sun and Ronald M. Reano  »View Author Affiliations

Optics Express, Vol. 18, Issue 8, pp. 8406-8411 (2010)

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A low power Mach-Zehnder interferometer thermo-optic switch using free-standing silicon-on-insulator strip waveguides is demonstrated. The air gap provides thermal isolation between the waveguide interferometer arms and the underlying silicon substrate. The highly confined optical modes of the strip waveguides enable miniature heated cross-sections. The heating efficiency from on-chip resistive heaters is enhanced. Measurements of fabricated devices using 100 μm arm lengths at 1550 nm wavelength result in a switching power of 540 μW, a 10% - 90% switching rise time of 141 μs, and an extinction ratio of 25 dB.

© 2010 OSA

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(160.6840) Materials : Thermo-optical materials
(130.4815) Integrated optics : Optical switching devices

ToC Category:
Integrated Optics

Original Manuscript: March 9, 2010
Revised Manuscript: April 5, 2010
Manuscript Accepted: April 5, 2010
Published: April 6, 2010

Peng Sun and Ronald M. Reano, "Submilliwatt thermo-optic switches using free-standing silicon-on-insulator strip waveguides," Opt. Express 18, 8406-8411 (2010)

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