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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 9 — Apr. 26, 2010
  • pp: 8772–8780

A “virtual-interferometer” technique for surface metrology

Scott M. Jobling and Paul G. Kwiat  »View Author Affiliations

Optics Express, Vol. 18, Issue 9, pp. 8772-8780 (2010)

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We demonstrate a novel technique for performing aberration-corrected surface metrology within existing wavefront-feedback systems. Our technique uses several phase measurements to calculate phase differences that directly reveal the surface gradients of an object under test, due to orthogonal displacements of that object between measurements. We then apply a least-squares algorithm for surface reconstruction using the gradient information. This approach also removes static system aberrations, providing an absolute measurement of the surface profile. To date, we have profiled a number of test optics with 20- to 40-nm RMS error, where the accuracy is determined by the amount of angular crosstalk over the system aperture.

© 2010 OSA

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: February 18, 2010
Revised Manuscript: March 29, 2010
Manuscript Accepted: March 31, 2010
Published: April 12, 2010

Scott M. Jobling and Paul G. Kwiat, "A “virtual-interferometer” technique for surface metrology," Opt. Express 18, 8772-8780 (2010)

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