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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 18, Iss. 9 — Apr. 26, 2010
  • pp: 9006–9014

Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm

Wenhui Wang, Nan Wu, Ye Tian, Christopher Niezrecki, and Xingwei Wang  »View Author Affiliations


Optics Express, Vol. 18, Issue 9, pp. 9006-9014 (2010)
http://dx.doi.org/10.1364/OE.18.009006


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Abstract

This paper presents an all-silica miniature optical fiber pressure/acoustic sensor based on the Fabry-Perot (FP) interferometric principle. The endface of the etched optical fiber tip and silica thin diaphragm on it form the FP structure. The uniform and thin silica diaphragm was fabricated by etching away the silicon substrate from a commercial silicon wafer that has a thermal oxide layer. The thin film was directly thermally bonded to the endface of the optical fiber thus creating the Fabry-Perot cavity. Thin films with a thickness from 1µm to 3µm have been bonded successfully. The sensor shows good linearity and hysteresis during measurement. A sensor with 0.75 µm-thick diaphragm thinned by post silica etching was demonstrated to have a sensitivity of 11 nm/kPa. The new sensor has great potential to be used as a non-intrusive pressure sensor in a variety of sensing applications.

© 2010 OSA

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(230.3990) Optical devices : Micro-optical devices
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Sensors

History
Original Manuscript: March 24, 2010
Revised Manuscript: April 8, 2010
Manuscript Accepted: April 10, 2010
Published: April 14, 2010

Citation
Wenhui Wang, Nan Wu, Ye Tian, Christopher Niezrecki, and Xingwei Wang, "Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm," Opt. Express 18, 9006-9014 (2010)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-9-9006


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