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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 10 — May. 9, 2011
  • pp: 9770–9782

Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer

Hung-Lin Hsieh, Jyh-Chen Chen, Gilles Lerondel, and Ju-Yi Lee  »View Author Affiliations

Optics Express, Vol. 19, Issue 10, pp. 9770-9782 (2011)

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A method based on a specific quasi-common-optical-path (QCOP) configuration for two-dimensional displacement measurement is presented. The measurement system consists of a heterodyne light source, two-dimensional holographic grating, specially designed set of half wave plates, and lock-in amplifiers. Two measurement configurations, for single and differential detection, are designed. The sensitivity, resolution and nonlinear phase error of the differential detection type are better than those of the single detection type. The experimental results demonstrate that the QCOP interferometer has the ability to measure two-dimensional displacement while maintaining high system stability.

© 2011 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4570) Instrumentation, measurement, and metrology : Optical design of instruments

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: February 10, 2011
Revised Manuscript: March 12, 2011
Manuscript Accepted: March 28, 2011
Published: May 4, 2011

Hung-Lin Hsieh, Jyh-Chen Chen, Gilles Lerondel, and Ju-Yi Lee, "Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer," Opt. Express 19, 9770-9782 (2011)

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