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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 11 — May. 23, 2011
  • pp: 10797–10804

Low-cost rapid miniature optical pressure sensors for blast wave measurements

Nan Wu, Wenhui Wang, Ye Tian, Xiaotian Zou, Michael Maffeo, Christopher Niezrecki, Julie Chen, and Xingwei Wang  »View Author Affiliations

Optics Express, Vol. 19, Issue 11, pp. 10797-10804 (2011)

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This paper presents an optical pressure sensor based on a Fabry-Perot (FP) interferometer formed by a 45° angle polished single mode fiber and an external silicon nitride diaphragm. The sensor is comprised of two V-shape grooves with different widths on a silicon chip, a silicon nitride diaphragm released on the surface of the wider V-groove, and a 45° angle polished single mode fiber. The sensor is especially suitable for blast wave measurements: its compact structure ensures a high spatial resolution; its thin diaphragm based design and the optical demodulation scheme allow a fast response to the rapid changing signals experienced during blast events. The sensor shows linearity with the correlation coefficient of 0.9999 as well as a hysteresis of less than 0.3%. The shock tube test demonstrated that the sensor has a rise time of less than 2 µs from 0 kPa to 140 kPa.

© 2011 OSA

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:

Original Manuscript: March 22, 2011
Revised Manuscript: April 25, 2011
Manuscript Accepted: May 13, 2011
Published: May 18, 2011

Nan Wu, Wenhui Wang, Ye Tian, Xiaotian Zou, Michael Maffeo, Christopher Niezrecki, Julie Chen, and Xingwei Wang, "Low-cost rapid miniature optical pressure sensors for blast wave measurements," Opt. Express 19, 10797-10804 (2011)

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