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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 11 — May. 23, 2011
  • pp: 10864–10873

Optics InfoBase > Optics Express > Volume 19 > Issue 11 > Page 10864

THz emission characteristics from p/n junctions with metal lines under non-bias conditions for LSI failure analysis

Masatsugu Yamashita, Chiko Otani, Toru Matsumoto, Yoshihiro Midoh, Katsuyoshi Miura, Koji Nakamae, Kiyoshi Nikawa, Sunmi Kim, Hironaru Murakami, and Masayoshi Tonouchi  »View Author Affiliations


Optics Express, Vol. 19, Issue 11, pp. 10864-10873 (2011)
http://dx.doi.org/10.1364/OE.19.010864


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Abstract

We have investigated the characteristics of THz emissions from p/n junctions with metallic lines under non-bias conditions. The waveforms, spectra, and polarizations depend on the length and shape of the lines. This indicates that the transient photocurrents from p/n junctions flow into the metallic lines that emit THz waves and act as an antenna. We have successfully demonstrated the non-contact inspection of open defects of multi-layered interconnects in a large-scale integrated circuit using the laser THz emission microscope (LTEM). The p/n junctions connected to the defective interconnects can be identified by comparing the LTEM images of normal and defective circuits.

© 2011 OSA

OCIS Codes
(300.2140) Spectroscopy : Emission
(110.6795) Imaging systems : Terahertz imaging

ToC Category:
Spectroscopy

History
Original Manuscript: February 23, 2011
Revised Manuscript: April 28, 2011
Manuscript Accepted: May 17, 2011
Published: May 19, 2011

Citation
Masatsugu Yamashita, Chiko Otani, Toru Matsumoto, Yoshihiro Midoh, Katsuyoshi Miura, Koji Nakamae, Kiyoshi Nikawa, Sunmi Kim, Hironaru Murakami, and Masayoshi Tonouchi, "THz emission characteristics from p/n junctions with metal lines under non-bias conditions for LSI failure analysis," Opt. Express 19, 10864-10873 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-11-10864


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