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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 11 — May. 23, 2011
  • pp: 10864–10873

THz emission characteristics from p/n junctions with metal lines under non-bias conditions for LSI failure analysis

Masatsugu Yamashita, Chiko Otani, Toru Matsumoto, Yoshihiro Midoh, Katsuyoshi Miura, Koji Nakamae, Kiyoshi Nikawa, Sunmi Kim, Hironaru Murakami, and Masayoshi Tonouchi  »View Author Affiliations

Optics Express, Vol. 19, Issue 11, pp. 10864-10873 (2011)

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We have investigated the characteristics of THz emissions from p/n junctions with metallic lines under non-bias conditions. The waveforms, spectra, and polarizations depend on the length and shape of the lines. This indicates that the transient photocurrents from p/n junctions flow into the metallic lines that emit THz waves and act as an antenna. We have successfully demonstrated the non-contact inspection of open defects of multi-layered interconnects in a large-scale integrated circuit using the laser THz emission microscope (LTEM). The p/n junctions connected to the defective interconnects can be identified by comparing the LTEM images of normal and defective circuits.

© 2011 OSA

OCIS Codes
(300.2140) Spectroscopy : Emission
(110.6795) Imaging systems : Terahertz imaging

ToC Category:

Original Manuscript: February 23, 2011
Revised Manuscript: April 28, 2011
Manuscript Accepted: May 17, 2011
Published: May 19, 2011

Masatsugu Yamashita, Chiko Otani, Toru Matsumoto, Yoshihiro Midoh, Katsuyoshi Miura, Koji Nakamae, Kiyoshi Nikawa, Sunmi Kim, Hironaru Murakami, and Masayoshi Tonouchi, "THz emission characteristics from p/n junctions with metal lines under non-bias conditions for LSI failure analysis," Opt. Express 19, 10864-10873 (2011)

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  1. M. van Exter, C. Fattinger, and D. Grischkowsky, “Terahertz time-domain spectroscopy of water vapor,” Opt. Lett. 14(20), 1128–1130 (1989). [CrossRef]
  2. B. B. Hu and M. C. Nuss, “Imaging with terahertz waves,” Opt. Lett. 20(16), 1716–1718 (1995). [CrossRef] [PubMed]
  3. D. M. Mittleman, M. Gupta, R. Neelamani, R. G. Baraniuk, J. V. Rudd, and M. Koch, “Recent advances in terahertz imaging,” Appl. Phys. B 68(6), 1085–1094 (1999). [CrossRef]
  4. B. Ferguson and X.-C. Zhang, “Materials for terahertz science and technology,” Nat. Mater. 1(1), 26–33 (2002). [CrossRef]
  5. M. Tonouchi, “Cutting-edge terahertz technology,” Nat. Photonics 1(2), 97–105 (2007). [CrossRef]
  6. A. J. Huber, F. Keilmann, J. Wittborn, J. Aizpurua, and R. Hillenbrand, “Terahertz near-field nanoscopy of mobile carriers in single semiconductor nanodevices,” Nano Lett. 8(11), 3766–3770 (2008). [CrossRef] [PubMed]
  7. P. Planken, “Microscopy: a terahertz nanoscope,” Nature 456(7221), 454–455 (2008). [CrossRef] [PubMed]
  8. K. Kawase, Y. Ogawa, Y. Watanabe, and H. Inoue, “Non-destructive terahertz imaging of illicit drugs using spectral fingerprints,” Opt. Express 11(20), 2549–2554 (2003). [CrossRef] [PubMed]
  9. J. F. Federici, B. Schulkin, F. Huang, D. Gary, R. Barat, F. Oliveira, and D. Zimdars, “THz imaging and sensing for security applications-explosives, weapons and drugs,” Semicond. Sci. Technol. 20(7), S266–S280 (2005). [CrossRef]
  10. T. Kiwa, M. Tonouchi, M. Yamashita, and K. Kawase, “Laser terahertz-emission microscope for inspecting electrical faults in integrated circuits,” Opt. Lett. 28(21), 2058–2060 (2003). [CrossRef] [PubMed]
  11. M. Yamashita, K. Kawase, C. Otani, T. Kiwa, and M. Tonouchi, “Imaging of large-scale integrated circuits using laser-terahertz emission microscopy,” Opt. Express 13(1), 115–120 (2005). [CrossRef] [PubMed]
  12. S. Kim, H. Murakami, and M. Tonouchi, “Transmission-type laser THz emission microscope using a solid immersion lens,” IEEE J. Sel. Top. Quantum Electron. 14(2), 498–504 (2008). [CrossRef]
  13. T. Kiwa, K. Tsukada, M. Suzuki, M. Tonouchi, S. Migitaka, and K. Yokosawa, “Laser terahertz emission system to investigate hydrogen gas sensors,” Appl. Phys. Lett. 86(26), 261102 (2005). [CrossRef]
  14. T. Kiwa, J. Kondo, S. Oka, I. Kawayama, H. Yamada, M. Tonouchi, and K. Tsukada, “Chemical sensing plate with a laser-terahertz monitoring system,” Appl. Opt. 47(18), 3324–3327 (2008). [CrossRef] [PubMed]
  15. M. Yamashita, C. Otani, K. Kawase, K. Nikawa, and M. Tonouchi, “Non-contact inspection technique for electrical failures in semiconductor devices using a laser terahertz emission microscope,” Appl. Phys. Lett. 93(4), 041117 (2008). [CrossRef]
  16. M. Yamashita, C. Otani, K. Kawase, T. Matsumoto, K. Nikawa, S. Kim, H. Murakami, and M. Tonouchi, “Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope,” Appl. Phys. Lett. 94(19), 191104 (2009). [CrossRef]
  17. R. Inoue, K. Takayama, and M. Tonouchi, “Angular dependence of terahertz emission from semiconductor surfaces photoexcited by femtosecond optical pulses,” J. Opt. Soc. Am. B 26(9), A14–A22 (2009). [CrossRef]
  18. K. Wang and D. M. Mittleman, “Metal wires for terahertz wave guiding,” Nature 432(7015), 376–379 (2004). [CrossRef] [PubMed]
  19. P. R. Smith, D. H. Auston, and M. C. Nuss, “Subpicosecond photoconducting dipole antennas,” IEEE J. Quantum Electron. 24(2), 255–260 (1988). [CrossRef]
  20. M. Tani, S. Matsuura, K. Sakai, and S. Nakashima, “Emission characteristics of photoconductive antennas based on low-temperature-grown GaAs and semi-insulating GaAs,” Appl. Opt. 36(30), 7853–7859 (1997). [CrossRef]
  21. A. Treizebre, M. Hofman, and B. Bocquet, “Terahertz spiral planar Goubau line rejectors for biological characterization,” Prog. Electromagn. Res. M 14, 163–176 (2010). [CrossRef]

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