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Wavelength-selective addressing of visible and near-infrared plasmon resonances for SU8 nanolithographyAnouk de Hoogh, Bob Hommersom, and A. Femius Koenderink »View Author Affiliations
Anouk de Hoogh,
Bob Hommersom,
and A. Femius Koenderink*
Center for Nanophotonics, FOM Institute for Atomic and Molecular Physics (AMOLF), Science Park 104, 1098 XG Amsterdam, The Netherlands *Corresponding author: f.koenderink@amolf.nl |
Optics Express, Vol. 19, Issue 12, pp. 11405-11414 (2011)
http://dx.doi.org/10.1364/OE.19.011405
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Abstract
We imprint plasmonic near field enhancements as nanoscale topography in SU8 photoresist using two-photon absorption from a spectrally filtered broadband supercontinuum light source. Imprinted patterns smaller than 50 nm across are obtained localized at positions of high local field enhancements in gold bow tie antennas, and gold split rings resonant in the visible and near-infrared. Enhanced exposure only occurs at wavelengths and polarizations that exactly match the plasmonic resonances. Hence our work demonstrates that wavelength selective addressing of hot spots for nanolithography using an inexpensive, low peak-power picosecond pulsed source is freely tunable throughout the visible and infrared to match any desired plasmon resonance.
© 2011 OSA
OCIS Codes
(240.6680) Optics at surfaces : Surface plasmons
(160.3918) Materials : Metamaterials
(220.4241) Optical design and fabrication : Nanostructure fabrication
(180.4243) Microscopy : Near-field microscopy
(310.6628) Thin films : Subwavelength structures, nanostructures
ToC Category:
Optics at Surfaces
History
Original Manuscript: April 26, 2011
Revised Manuscript: May 20, 2011
Manuscript Accepted: May 20, 2011
Published: May 26, 2011
Citation
Anouk de Hoogh, Bob Hommersom, and A. Femius Koenderink, "Wavelength-selective addressing of visible and near-infrared plasmon resonances for SU8 nanolithography," Opt. Express 19, 11405-11414 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-12-11405
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References
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- F. Garwe, U. Bauerschäfer, A. Csaki, A. Steinbrück, K. Ritter, A. Bochmann, J. Bergmann, A. Weise, D. Akimov, G. Maubach, J. König, G. Hüttmann, W. Paa, J. Popp, and W. Fritzsche, “Optically controlled thermal management on the nanometer length scale,” Nanotechnology 19, 055207 (2008). [CrossRef] [PubMed]
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- R. de Waele, A. F. Koenderink, and A. Polman, “Tunable nanoscale localization of energy on plasmon particle arrays,” Nano Lett. 7, 2004–2008 (2007). [CrossRef]
- C. Deeb, R. Bachelot, J. Plain, A.-L. Baudrion, S. Jradi, A. Bouhelier, O. Soppera, P. K. Jain, L. Huang, C. Ecoffet, L. Balan, and P. Royer, “Quantitative analysis of localized surface plasmons based on molecular probing,” ACS Nano 4, 4579–4586 (2010). [CrossRef] [PubMed]
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- C. Deeb, R. Bachelot, J. Plain, A.-L. Baudrion, S. Jradi, A. Bouhelier, O. Soppera, P. K. Jain, L. Huang, C. Ecoffet, L. Balan, and P. Royer, “Quantitative analysis of localized surface plasmons based on molecular probing,” ACS Nano 4, 4579–4586 (2010). [CrossRef] [PubMed]
- C. Enkrich, M. Wegener, S. Linden, S. Burger, L. Zschiedrich, F. Schmidt, J. F. Zhou, T. Koschny, and C. M. Soukoulis, “Magnetic metamaterials at telecommunication and visible frequencies,” Phys. Rev. Lett. 95, 203901 (2005). [CrossRef] [PubMed]
- T. Zentgraf, J. Dorfmüller, C. Rockstuhl, C. Etrich, R. Vogelgesang, K. Kern, T. Pertsch, F. Lederer, and H. Giessen, “Amplitude- and phase-resolved optical near fields of split-ring-resonator-based metamaterials,” Opt. Lett. 33, 848–850 (2008). [CrossRef] [PubMed]
- C. Rockstuhl, F. Lederer, C. Etrich, T. Zentgraf, J. Kuhl, and H. Giessen, “On the reinterpretation of resonances in split-ring-resonators at normal incidence,” Opt. Express 14, 8827–8836 (2006). [CrossRef] [PubMed]
- H. Lorenz, M. Despont, N. Fahrni, N. LaBianca, P. Renaud, and P. Vettiger, “Su-8: a low-cost negative resist for mems,” J. Micromech. Microeng. 7, 121–124 (1997). [CrossRef]
- N. Fang, H. Lee, C. Sun, and X. Zhang, “Sub-diffraction-limited optical imaging with a silver superlens,” Science 308, 534–537 (2005). [CrossRef] [PubMed]
- W. Srituravanich, N. Fang, C. Sun, Q. Luo, and X. Zhang, “Plasmonic nanolithography,” Nano Lett. 4, 1085–1088 (2004). [CrossRef]
- K. D. Ko, A. Kumar, K. H. Fung, R. Ambekar, G. L. Liu, N. X. Fang, and K. C. Toussaint, “Nonlinear optical response from arrays of Au bowtie nanoantennas,” Nano Lett. 11, 61–65 (2011). [CrossRef]
- G. Boudarham, N. Feth, V. Myroshnychenko, S. Linden, J. G. de Abajo, M. Wegener, and M. Kociak, “Spectral imaging of individual split-ring resonators,” Phys. Rev. Lett. 105, 255501 (2010). [CrossRef]
- M. W. Klein, M. Wegener, N. Feth, and S. Linden, “Experiments on second- and third-harmonic generation from magnetic metamaterials: erratum,” Opt. Express 16, 8055–8055 (2008). [CrossRef]
- I. Sersic, M. Frimmer, E. Verhagen, and A. F. Koenderink, “Electric and magnetic dipole coupling in near-infrared split-ring metamaterial arrays,” Phys. Rev. Lett. 103, 213902 (2009). [CrossRef]
- F. Garwe, U. Bauerschäfer, A. Csaki, A. Steinbrück, K. Ritter, A. Bochmann, J. Bergmann, A. Weise, D. Akimov, G. Maubach, J. König, G. Hüttmann, W. Paa, J. Popp, and W. Fritzsche, “Optically controlled thermal management on the nanometer length scale,” Nanotechnology 19, 055207 (2008). [CrossRef] [PubMed]
- A. Sundaramurthy, P. J. Schuck, N. R. Conley, D. P. Fromm, G. S. Kino, and W. E. Moerner, “Toward nanometer-scale optical photolithography: utilizing the near-field of bow tie optical nanoantennas,” Nano Lett. 6, 355–360 (2006). PMID: . [CrossRef] [PubMed]
- A. Sundaramurthy, K. B. Crozier, G. S. Kino, D. P. Fromm, P. J. Schuck, and W. E. Moerner, “Field enhancement and gap-dependent resonance in a system of two opposing tip-to-tip Au nanotriangles,” Phys. Rev. B 72, 165409 (2005). [CrossRef]
- K. D. Ko, A. Kumar, K. H. Fung, R. Ambekar, G. L. Liu, N. X. Fang, and K. C. Toussaint, “Nonlinear optical response from arrays of Au bowtie nanoantennas,” Nano Lett. 11, 61–65 (2011). [CrossRef]
- F. Garwe, U. Bauerschäfer, A. Csaki, A. Steinbrück, K. Ritter, A. Bochmann, J. Bergmann, A. Weise, D. Akimov, G. Maubach, J. König, G. Hüttmann, W. Paa, J. Popp, and W. Fritzsche, “Optically controlled thermal management on the nanometer length scale,” Nanotechnology 19, 055207 (2008). [CrossRef] [PubMed]
- G. Vecchi, V. Giannini, and J. Gómez Rivas, “Shaping the fluorescent emission by lattice resonances in plasmonic crystals of nanoantennas,” Phys. Rev. Lett. 102, 146807 (2009). [CrossRef] [PubMed]
- T. Zentgraf, J. Dorfmüller, C. Rockstuhl, C. Etrich, R. Vogelgesang, K. Kern, T. Pertsch, F. Lederer, and H. Giessen, “Amplitude- and phase-resolved optical near fields of split-ring-resonator-based metamaterials,” Opt. Lett. 33, 848–850 (2008). [CrossRef] [PubMed]
- C. Rockstuhl, F. Lederer, C. Etrich, T. Zentgraf, J. Kuhl, and H. Giessen, “On the reinterpretation of resonances in split-ring-resonators at normal incidence,” Opt. Express 14, 8827–8836 (2006). [CrossRef] [PubMed]
- G. Vecchi, V. Giannini, and J. Gómez Rivas, “Shaping the fluorescent emission by lattice resonances in plasmonic crystals of nanoantennas,” Phys. Rev. Lett. 102, 146807 (2009). [CrossRef] [PubMed]
- C. Hubert, A. Rumyantseva, G. Lerondel, J. Grand, S. Kostcheev, L. Billot, A. Vial, R. Bachelot, P. Royer, S.-h. Chang, S. K. Gray, G. P. Wiederrecht, and G. C. Schatz, “Near-field photochemical imaging of noble metal nanostructures,” Nano Lett. 5, 615–619 (2005). [CrossRef] [PubMed]
- C. Hubert, A. Rumyantseva, G. Lerondel, J. Grand, S. Kostcheev, L. Billot, A. Vial, R. Bachelot, P. Royer, S.-h. Chang, S. K. Gray, G. P. Wiederrecht, and G. C. Schatz, “Near-field photochemical imaging of noble metal nanostructures,” Nano Lett. 5, 615–619 (2005). [CrossRef] [PubMed]
- S. Lal, S. Link, and N. J. Halas, “Nano-optics from sensing to waveguiding,” Nat. Photonics 1, 641–648 (2007). [CrossRef]
- J. N. Anker, W. P. Hall, O. Lyandres, N. C. Shah, J. Zhao, and R. P. Van Duyne, “Biosensing with plasmonic nanosensors,” Nature Mater. 7, 442–453 (2008). [CrossRef]
- A. F. Koenderink, J. V. Hernández, F. Robicheaux, L. D. Noordam, and A. Polman, “Programmable nanolithography with plasmon nanoparticle arrays,” Nano Lett. 7, 745–749 (2007). [CrossRef] [PubMed]
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- C. Hubert, A. Rumyantseva, G. Lerondel, J. Grand, S. Kostcheev, L. Billot, A. Vial, R. Bachelot, P. Royer, S.-h. Chang, S. K. Gray, G. P. Wiederrecht, and G. C. Schatz, “Near-field photochemical imaging of noble metal nanostructures,” Nano Lett. 5, 615–619 (2005). [CrossRef] [PubMed]
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- N. Fang, H. Lee, C. Sun, and X. Zhang, “Sub-diffraction-limited optical imaging with a silver superlens,” Science 308, 534–537 (2005). [CrossRef] [PubMed]
- W. Srituravanich, N. Fang, C. Sun, Q. Luo, and X. Zhang, “Plasmonic nanolithography,” Nano Lett. 4, 1085–1088 (2004). [CrossRef]
- J. N. Anker, W. P. Hall, O. Lyandres, N. C. Shah, J. Zhao, and R. P. Van Duyne, “Biosensing with plasmonic nanosensors,” Nature Mater. 7, 442–453 (2008). [CrossRef]
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ACS Nano
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J. Am. Chem. Soc
- K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, and H. Misawa, “Nanoparticle plasmon-assisted two-photon polymerization induced by incoherent excitation source,” J. Am. Chem. Soc 130, 6928–6929 (2008). [CrossRef] [PubMed]
J. Micromech. Microeng.
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J. Phys. Chem. C
- N. Murazawa, K. Ueno, V. Mizeikis, S. Juodkazis, and H. Misawa, “Spatially selective nonlinear photopolymerization induced by the near-field of surface plasmons localized on rectangular gold nanorods,” J. Phys. Chem. C 113, 1147–1149 (2009). [CrossRef]
J. Phys. Chem. Lett.
- K. Ueno, S. Takabatake, Y. Nishijima, V. Mizeikis, Y. Yokota, and H. Misawa, “Nanogap-assisted surface plasmon nanolithography,” J. Phys. Chem. Lett. 1, 657–662 (2010). [CrossRef]
Macromolecules
- Y. Bi and D. C. Neckers, “A visible light initiating system for free radical promoted cationic polymerization,” Macromolecules 27, 3683–3693 (1994). [CrossRef]
Microelectron. Eng.
- O. J. F. Martin, “Surface plasmon illumination scheme for contact lithography beyond the diffraction limit,” Microelectron. Eng. 67–68, 24–30 (2003). [CrossRef]
Nano Lett.
- W. Srituravanich, N. Fang, C. Sun, Q. Luo, and X. Zhang, “Plasmonic nanolithography,” Nano Lett. 4, 1085–1088 (2004). [CrossRef]
- A. Sundaramurthy, P. J. Schuck, N. R. Conley, D. P. Fromm, G. S. Kino, and W. E. Moerner, “Toward nanometer-scale optical photolithography: utilizing the near-field of bow tie optical nanoantennas,” Nano Lett. 6, 355–360 (2006). PMID: . [CrossRef] [PubMed]
- C. Hubert, A. Rumyantseva, G. Lerondel, J. Grand, S. Kostcheev, L. Billot, A. Vial, R. Bachelot, P. Royer, S.-h. Chang, S. K. Gray, G. P. Wiederrecht, and G. C. Schatz, “Near-field photochemical imaging of noble metal nanostructures,” Nano Lett. 5, 615–619 (2005). [CrossRef] [PubMed]
- A. F. Koenderink, J. V. Hernández, F. Robicheaux, L. D. Noordam, and A. Polman, “Programmable nanolithography with plasmon nanoparticle arrays,” Nano Lett. 7, 745–749 (2007). [CrossRef] [PubMed]
- M. Durach, A. Rusina, M. I. Stockman, and K. Nelson, “Toward full spatiotemporal control on the nanoscale,” Nano Lett. 7, 3145–3149 (2007). [CrossRef] [PubMed]
- K. D. Ko, A. Kumar, K. H. Fung, R. Ambekar, G. L. Liu, N. X. Fang, and K. C. Toussaint, “Nonlinear optical response from arrays of Au bowtie nanoantennas,” Nano Lett. 11, 61–65 (2011). [CrossRef]
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- R. de Waele, A. F. Koenderink, and A. Polman, “Tunable nanoscale localization of energy on plasmon particle arrays,” Nano Lett. 7, 2004–2008 (2007). [CrossRef]
Nanotechnology
- F. Garwe, U. Bauerschäfer, A. Csaki, A. Steinbrück, K. Ritter, A. Bochmann, J. Bergmann, A. Weise, D. Akimov, G. Maubach, J. König, G. Hüttmann, W. Paa, J. Popp, and W. Fritzsche, “Optically controlled thermal management on the nanometer length scale,” Nanotechnology 19, 055207 (2008). [CrossRef] [PubMed]
Nat. Photonics
- S. Lal, S. Link, and N. J. Halas, “Nano-optics from sensing to waveguiding,” Nat. Photonics 1, 641–648 (2007). [CrossRef]
Nature
- W. L. Barnes, A. Dereux, and T. W. Ebbesen, “Surface plasmon subwavelength optics,” Nature 424, 824–830 (2003). [CrossRef] [PubMed]
Nature Mater.
- J. A. Schuller, E. S. Barnard, W. Cai, Y. C. Jun, J. S. White, and M. L. Brongersma, “Plasmonics for extreme light concentration and manipulation,” Nature Mater. 9, 193–204 (2010). [CrossRef]
- J. N. Anker, W. P. Hall, O. Lyandres, N. C. Shah, J. Zhao, and R. P. Van Duyne, “Biosensing with plasmonic nanosensors,” Nature Mater. 7, 442–453 (2008). [CrossRef]
- H. A. Atwater and A. Polman, “Plasmonics for improved photovoltaic devices,” Nature Mater. 9, 205–213 (2010). [CrossRef]
Opt. Express
- M. W. Klein, M. Wegener, N. Feth, and S. Linden, “Experiments on second- and third-harmonic generation from magnetic metamaterials: erratum,” Opt. Express 16, 8055–8055 (2008). [CrossRef]
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- H. Fischer and O. J. F. Martin, “Engineering the optical response of plasmonic nanoantennas,” Opt. Express 16, 9144–9154 (2008). [CrossRef] [PubMed]
- C. Rockstuhl, F. Lederer, C. Etrich, T. Zentgraf, J. Kuhl, and H. Giessen, “On the reinterpretation of resonances in split-ring-resonators at normal incidence,” Opt. Express 14, 8827–8836 (2006). [CrossRef] [PubMed]
Opt. Lett.
- T. Zentgraf, J. Dorfmüller, C. Rockstuhl, C. Etrich, R. Vogelgesang, K. Kern, T. Pertsch, F. Lederer, and H. Giessen, “Amplitude- and phase-resolved optical near fields of split-ring-resonator-based metamaterials,” Opt. Lett. 33, 848–850 (2008). [CrossRef] [PubMed]
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Phys. Rev. B
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Phys. Rev. Lett.
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Science
- P. S. J. Russell, “Photonic crystal fibers,” Science 299, 358–362 (2003). [CrossRef] [PubMed]
- N. Fang, H. Lee, C. Sun, and X. Zhang, “Sub-diffraction-limited optical imaging with a silver superlens,” Science 308, 534–537 (2005). [CrossRef] [PubMed]
Other
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2011, Ko, Nano Lett.
- K. D. Ko, A. Kumar, K. H. Fung, R. Ambekar, G. L. Liu, N. X. Fang, and K. C. Toussaint, “Nonlinear optical response from arrays of Au bowtie nanoantennas,” Nano Lett. 11, 61–65 (2011). [CrossRef]
- G. Boudarham, N. Feth, V. Myroshnychenko, S. Linden, J. G. de Abajo, M. Wegener, and M. Kociak, “Spectral imaging of individual split-ring resonators,” Phys. Rev. Lett. 105, 255501 (2010). [CrossRef]
- J. A. Schuller, E. S. Barnard, W. Cai, Y. C. Jun, J. S. White, and M. L. Brongersma, “Plasmonics for extreme light concentration and manipulation,” Nature Mater. 9, 193–204 (2010). [CrossRef]
- H. A. Atwater and A. Polman, “Plasmonics for improved photovoltaic devices,” Nature Mater. 9, 205–213 (2010). [CrossRef]
- K. Ueno, S. Takabatake, Y. Nishijima, V. Mizeikis, Y. Yokota, and H. Misawa, “Nanogap-assisted surface plasmon nanolithography,” J. Phys. Chem. Lett. 1, 657–662 (2010). [CrossRef]
- C. Deeb, R. Bachelot, J. Plain, A.-L. Baudrion, S. Jradi, A. Bouhelier, O. Soppera, P. K. Jain, L. Huang, C. Ecoffet, L. Balan, and P. Royer, “Quantitative analysis of localized surface plasmons based on molecular probing,” ACS Nano 4, 4579–4586 (2010). [CrossRef] [PubMed]
- I. Sersic, M. Frimmer, E. Verhagen, and A. F. Koenderink, “Electric and magnetic dipole coupling in near-infrared split-ring metamaterial arrays,” Phys. Rev. Lett. 103, 213902 (2009). [CrossRef]
- N. Murazawa, K. Ueno, V. Mizeikis, S. Juodkazis, and H. Misawa, “Spatially selective nonlinear photopolymerization induced by the near-field of surface plasmons localized on rectangular gold nanorods,” J. Phys. Chem. C 113, 1147–1149 (2009). [CrossRef]
- G. Vecchi, V. Giannini, and J. Gómez Rivas, “Shaping the fluorescent emission by lattice resonances in plasmonic crystals of nanoantennas,” Phys. Rev. Lett. 102, 146807 (2009). [CrossRef] [PubMed]
- F. Garwe, U. Bauerschäfer, A. Csaki, A. Steinbrück, K. Ritter, A. Bochmann, J. Bergmann, A. Weise, D. Akimov, G. Maubach, J. König, G. Hüttmann, W. Paa, J. Popp, and W. Fritzsche, “Optically controlled thermal management on the nanometer length scale,” Nanotechnology 19, 055207 (2008). [CrossRef] [PubMed]
- K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, and H. Misawa, “Nanoparticle plasmon-assisted two-photon polymerization induced by incoherent excitation source,” J. Am. Chem. Soc 130, 6928–6929 (2008). [CrossRef] [PubMed]
- J. N. Anker, W. P. Hall, O. Lyandres, N. C. Shah, J. Zhao, and R. P. Van Duyne, “Biosensing with plasmonic nanosensors,” Nature Mater. 7, 442–453 (2008). [CrossRef]
- S. Lal, S. Link, and N. J. Halas, “Nano-optics from sensing to waveguiding,” Nat. Photonics 1, 641–648 (2007). [CrossRef]
- A. F. Koenderink, J. V. Hernández, F. Robicheaux, L. D. Noordam, and A. Polman, “Programmable nanolithography with plasmon nanoparticle arrays,” Nano Lett. 7, 745–749 (2007). [CrossRef] [PubMed]
- M. Durach, A. Rusina, M. I. Stockman, and K. Nelson, “Toward full spatiotemporal control on the nanoscale,” Nano Lett. 7, 3145–3149 (2007). [CrossRef] [PubMed]
- R. de Waele, A. F. Koenderink, and A. Polman, “Tunable nanoscale localization of energy on plasmon particle arrays,” Nano Lett. 7, 2004–2008 (2007). [CrossRef]
- D. B. Shao and S. C. Chen, “Direct patterning of three-dimensional periodic nanostructures by surface-plasmon-assisted nanolithography,” Nano Lett. 6, 2279–2283 (2006). [CrossRef] [PubMed]
- A. Sundaramurthy, P. J. Schuck, N. R. Conley, D. P. Fromm, G. S. Kino, and W. E. Moerner, “Toward nanometer-scale optical photolithography: utilizing the near-field of bow tie optical nanoantennas,” Nano Lett. 6, 355–360 (2006). PMID: . [CrossRef] [PubMed]
- N. Fang, H. Lee, C. Sun, and X. Zhang, “Sub-diffraction-limited optical imaging with a silver superlens,” Science 308, 534–537 (2005). [CrossRef] [PubMed]
- C. Hubert, A. Rumyantseva, G. Lerondel, J. Grand, S. Kostcheev, L. Billot, A. Vial, R. Bachelot, P. Royer, S.-h. Chang, S. K. Gray, G. P. Wiederrecht, and G. C. Schatz, “Near-field photochemical imaging of noble metal nanostructures,” Nano Lett. 5, 615–619 (2005). [CrossRef] [PubMed]
- C. Enkrich, M. Wegener, S. Linden, S. Burger, L. Zschiedrich, F. Schmidt, J. F. Zhou, T. Koschny, and C. M. Soukoulis, “Magnetic metamaterials at telecommunication and visible frequencies,” Phys. Rev. Lett. 95, 203901 (2005). [CrossRef] [PubMed]
- A. Sundaramurthy, K. B. Crozier, G. S. Kino, D. P. Fromm, P. J. Schuck, and W. E. Moerner, “Field enhancement and gap-dependent resonance in a system of two opposing tip-to-tip Au nanotriangles,” Phys. Rev. B 72, 165409 (2005). [CrossRef]
- W. Srituravanich, N. Fang, C. Sun, Q. Luo, and X. Zhang, “Plasmonic nanolithography,” Nano Lett. 4, 1085–1088 (2004). [CrossRef]
- O. J. F. Martin, “Surface plasmon illumination scheme for contact lithography beyond the diffraction limit,” Microelectron. Eng. 67–68, 24–30 (2003). [CrossRef]
- W. L. Barnes, A. Dereux, and T. W. Ebbesen, “Surface plasmon subwavelength optics,” Nature 424, 824–830 (2003). [CrossRef] [PubMed]
- P. S. J. Russell, “Photonic crystal fibers,” Science 299, 358–362 (2003). [CrossRef] [PubMed]
- H. Lorenz, M. Despont, N. Fahrni, N. LaBianca, P. Renaud, and P. Vettiger, “Su-8: a low-cost negative resist for mems,” J. Micromech. Microeng. 7, 121–124 (1997). [CrossRef]
- Y. Bi and D. C. Neckers, “A visible light initiating system for free radical promoted cationic polymerization,” Macromolecules 27, 3683–3693 (1994). [CrossRef]
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