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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 12 — Jun. 6, 2011
  • pp: 11529–11538

Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition

T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen  »View Author Affiliations


Optics Express, Vol. 19, Issue 12, pp. 11529-11538 (2011)
http://dx.doi.org/10.1364/OE.19.011529


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Abstract

When silicon strip and slot waveguides are coated with a 50nm amorphous titanium dioxide (TiO2) film, measured losses at a wavelength of 1.55 μm can be as low as (2 ± 1)dB/cm and (7 ± 2)dB/cm, respectively. We use atomic layer deposition (ALD), estimate the effect of ALD growth on the surface roughness, and discuss the effect on the scattering losses. Because the gap between the rails of a slot waveguide narrows by the TiO2 deposition, the effective slot width can be back-end controlled. This is useful for precise adjustment if the slot is to be filled with, e. g., a nonlinear organic material or with a sensitizer for sensors applications.

© 2011 OSA

OCIS Codes
(130.3130) Integrated optics : Integrated optics materials
(230.7370) Optical devices : Waveguides
(240.5770) Optics at surfaces : Roughness
(310.2785) Thin films : Guided wave applications
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Integrated Optics

History
Original Manuscript: March 22, 2011
Revised Manuscript: May 14, 2011
Manuscript Accepted: May 25, 2011
Published: May 31, 2011

Citation
T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, "Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition," Opt. Express 19, 11529-11538 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-12-11529


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