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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 13 — Jun. 20, 2011
  • pp: 12480–12489

Selective tuning of high-Q silicon photonic crystal nanocavities via laser-assisted local oxidation

Charlton J. Chen, Jiangjun Zheng, Tingyi Gu, James F. McMillan, Mingbin Yu, Guo-Qiang Lo, Dim-Lee Kwong, and Chee Wei Wong  »View Author Affiliations

Optics Express, Vol. 19, Issue 13, pp. 12480-12489 (2011)

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We examine the cavity resonance tuning of high-Q silicon photonic crystal heterostructures by localized laser-assisted thermal oxidation using a 532 nm continuous wave laser focused to a 2.5 μm radius spot-size. The total shift is consistent with the parabolic rate law. A tuning range of up to 8.7 nm is achieved with ∼ 30 mW laser powers. Over this tuning range, the cavity Qs decreases from 3.2×105 to 1.2×105. Numerical simulations model the temperature distributions in the silicon photonic crystal membrane and the cavity resonance shift from oxidation.

© 2011 OSA

OCIS Codes
(250.5300) Optoelectronics : Photonic integrated circuits
(220.4241) Optical design and fabrication : Nanostructure fabrication
(230.5298) Optical devices : Photonic crystals

ToC Category:
Photonic Crystals

Original Manuscript: April 22, 2011
Revised Manuscript: May 26, 2011
Manuscript Accepted: May 26, 2011
Published: June 13, 2011

Charlton J. Chen, Jiangjun Zheng, Tingyi Gu, James F. McMillan, Mingbin Yu, Guo-Qiang Lo, Dim-Lee Kwong, and Chee Wei Wong, "Selective tuning of high-Q silicon photonic crystal nanocavities via laser-assisted local oxidation," Opt. Express 19, 12480-12489 (2011)

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