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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 13 — Jun. 20, 2011
  • pp: 12509–12514

Contact-free fault location and imaging with on-chip terahertz time-domain reflectometry

Michael Nagel, Alexander Michalski, and Heinrich Kurz  »View Author Affiliations

Optics Express, Vol. 19, Issue 13, pp. 12509-12514 (2011)

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We demonstrate in a first experimental study the application of novel micro-machined optoelectronic probes for a time-domain reflectometry-based localization of discontinuities and faults in electronic structures at unprecedented resolution and accuracy (± 0.55µm). Thanks to the THz-range bandwidth of our optoelectronic system – including the active probes used for pulse injection and detection – the spatial resolution and precision of high-end all-electronic detection systems is surpassed by more than one order of magnitude. The new analytic technology holds great promise for rapid and precise fault detection and location in advanced (3D) integrated semiconductor chips and packages.

© 2011 OSA

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(320.7100) Ultrafast optics : Ultrafast measurements
(110.6795) Imaging systems : Terahertz imaging

ToC Category:
Imaging Systems

Original Manuscript: May 12, 2011
Revised Manuscript: June 3, 2011
Manuscript Accepted: June 6, 2011
Published: June 13, 2011

Michael Nagel, Alexander Michalski, and Heinrich Kurz, "Contact-free fault location and imaging with on-chip terahertz time-domain reflectometry," Opt. Express 19, 12509-12514 (2011)

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