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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 14 — Jul. 4, 2011
  • pp: 12969–12977

Application of image spectrometer to in situ infrared broadband optical monitoring for thin film deposition

Qing-Yuan Cai, Yu-Xiang Zheng, Dong-Xu Zhang, Wei-Jie Lu, Rong-Jun Zhang, Wei Lin, Hai-Bin Zhao, and Liang-Yao Chen  »View Author Affiliations


Optics Express, Vol. 19, Issue 14, pp. 12969-12977 (2011)
http://dx.doi.org/10.1364/OE.19.012969


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Abstract

A path-folded infrared image spectrometer with five sub-gratings and five linear-array detectors was applied to a broadband optical monitoring (BOM) system for thin film deposition. Through in situ BOM, we can simultaneously acquire the thickness and refractive index of each layer in real time by fitting the measured spectra, and modify the deposition parameters during deposition process according to the fitting results. An effective data processing method was proposed and applied in the BOM process, and it shortened the data processing time and improved the monitoring efficiency greatly. For demonstration, a narrow band-pass filter (NBF) at 1540 nm with ~10 nm full width at half-maximum (FWHM) had been manufactured using the developed BOM system, and the results showed that this BOM method was satisfying for monitoring deposition of thin film devices.

© 2011 OSA

OCIS Codes
(300.6340) Spectroscopy : Spectroscopy, infrared
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Thin Films

History
Original Manuscript: May 16, 2011
Revised Manuscript: June 15, 2011
Manuscript Accepted: June 15, 2011
Published: June 20, 2011

Citation
Qing-Yuan Cai, Yu-Xiang Zheng, Dong-Xu Zhang, Wei-Jie Lu, Rong-Jun Zhang, Wei Lin, Hai-Bin Zhao, and Liang-Yao Chen, "Application of image spectrometer to in situ infrared broadband optical monitoring for thin film deposition," Opt. Express 19, 12969-12977 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-14-12969


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