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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 14 — Jul. 4, 2011
  • pp: 13201–13208

Full-field measurement of nonuniform stresses of thin films at high temperature

Xuelin Dong, Xue Feng, Keh-Chih Hwang, Shaopeng Ma, and Qinwei Ma  »View Author Affiliations

Optics Express, Vol. 19, Issue 14, pp. 13201-13208 (2011)

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Coherent gradient sensing (CGS), a shear interferometry method, is developed to measure the full-field curvatures of a film/substrate system at high temperature. We obtain the relationship between an interferogram phase and specimen topography, accounting for temperature effect. The self-interference of CGS combined with designed setup can reduce the air effect. The full-field phases can be extracted by fast Fourier transform. Both nonuniform thin-film stresses and interfacial stresses are obtained by the extended Stoney’s formula. The evolution of thermo-stresses verifies the feasibility of the proposed interferometry method and implies the “nonlocal” effect featured by the experimental results.

© 2011 OSA

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6780) Instrumentation, measurement, and metrology : Temperature
(240.0310) Optics at surfaces : Thin films
(310.4925) Thin films : Other properties (stress, chemical, etc.)

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: March 21, 2011
Revised Manuscript: May 20, 2011
Manuscript Accepted: June 2, 2011
Published: June 23, 2011

Xuelin Dong, Xue Feng, Keh-Chih Hwang, Shaopeng Ma, and Qinwei Ma, "Full-field measurement of nonuniform stresses of thin films at high temperature," Opt. Express 19, 13201-13208 (2011)

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