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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 14 — Jul. 4, 2011
  • pp: 13551–13556

Ultra-high quality factor planar Si3N4 ring resonators on Si substrates

Ming-Chun Tien, Jared F. Bauters, Martijn J. R. Heck, Daryl T. Spencer, Daniel J. Blumenthal, and John E. Bowers  »View Author Affiliations


Optics Express, Vol. 19, Issue 14, pp. 13551-13556 (2011)
http://dx.doi.org/10.1364/OE.19.013551


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Abstract

We demonstrate planar Si3N4 ring resonators with ultra-high quality factors (Q) of 19 million, 28 million, and 7 million at 1060 nm, 1310 nm, and 1550 nm, respectively. By integrating the ultra-low-loss Si3N4 ring resonators with laterally offset planar waveguide directional couplers, optical add-drop and notch filters are demonstrated to have ultra-narrow bandwidths of 16 MHz, 38 MHz, and 300 MHz at 1060 nm, 1310 nm, and 1550 nm, respectively. These are the highest Qs reported for ring resonators with planar directional couplers, and ultra-narrowband microwave photonic filters can be realized based on these high-Q ring resonators.

© 2011 OSA

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(230.5750) Optical devices : Resonators
(230.7390) Optical devices : Waveguides, planar
(230.7408) Optical devices : Wavelength filtering devices

ToC Category:
Integrated Optics

History
Original Manuscript: April 18, 2011
Revised Manuscript: May 22, 2011
Manuscript Accepted: May 27, 2011
Published: June 29, 2011

Citation
Ming-Chun Tien, Jared F. Bauters, Martijn J. R. Heck, Daryl T. Spencer, Daniel J. Blumenthal, and John E. Bowers, "Ultra-high quality factor planar Si3N4 ring resonators on Si substrates," Opt. Express 19, 13551-13556 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-14-13551


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