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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 15 — Jul. 18, 2011
  • pp: 13812–13824

A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator

Kah How Koh, Takeshi Kobayashi, and Chengkuo Lee  »View Author Affiliations

Optics Express, Vol. 19, Issue 15, pp. 13812-13824 (2011)

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A novel dynamic excitation of an S-shaped PZT piezoelectric actuator, which is conceptualized by having two superimposed AC voltages, is characterized in this paper through the evaluation of the 2-D scanning characteristics of an integrated silicon micromirror. The device is micromachined from a SOI wafer with a 5μm thick Si device layer and multilayers of Pt/Ti/PZT//Pt/Ti deposited as electrode and actuation materials. A large mirror (1.65mm x 2mm) and an S-shaped PZT actuator are formed after the backside release process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 3Vpp are ± 38.9° and ± 2.1° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror.

© 2011 OSA

OCIS Codes
(120.5800) Instrumentation, measurement, and metrology : Scanners
(230.4040) Optical devices : Mirrors
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Optical Devices

Original Manuscript: May 9, 2011
Revised Manuscript: June 14, 2011
Manuscript Accepted: June 14, 2011
Published: July 5, 2011

Kah How Koh, Takeshi Kobayashi, and Chengkuo Lee, "A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator," Opt. Express 19, 13812-13824 (2011)

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  1. M. C. Wu, O. Solgaard, and J. E. Ford, “Optical MEMS for Lightwave Communication,” J. Lightwave Technol. 24(12), 4433–4454 (2006). [CrossRef]
  2. C. Lee and J. A. Yeh, “Development and evolution of MOEMS technology in variable optical attenuators,” J. Micro/Nanolith , 7(2), 021003 (2008). [CrossRef]
  3. R. F. Wolffenbuttel, “MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range,” J. Micromech. Microeng. 15(7), S145–S152 (2005). [CrossRef]
  4. B. T. Liao, H. H. Shen, H. H. Liao, and Y. J. Yang, “A bi-stable 2x2 optical switch monolithically integrated with variable optical attenuators,” Opt. Express 17(22), 19919–19925 (2009). [CrossRef] [PubMed]
  5. P. J. Gilgunn, J. Liu, N. Sarkar, and G. K. Fedder, “CMOS-MEMS Lateral Electrothermal Actuators,” J. Microelectromech. Syst. 17(1), 103–114 (2008). [CrossRef]
  6. H. Xie, Y. Pan, and G. K. Fedder, “A CMOS-MEMS mirror with curled-hinge comb drives,” J. Microelectromech. Syst. 12(4), 450–457 (2003). [CrossRef]
  7. A. D. Yalcinkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, “Two-axis electromagnetic microscanner for high resolution displays,” J. Microelectromech. Syst. 15(4), 786–794 (2006). [CrossRef]
  8. K. Jongbaeg, D. Christensen, and L. Lin, “Monolithic 2-D scanning mirror using self-aligned angular vertical comb drives,” IEEE Photon. Technol. Lett. 17(11), 2307–2309 (2005). [CrossRef]
  9. H.-A. Yang, T.-L. Tang, S. T. Lee, and W. Fang, “A Novel Coilless Scanning Mirror Using Eddy Current Lorentz Force and Magnetostatic Force,” J. Microelectromech. Syst. 16(3), 511–520 (2007). [CrossRef]
  10. C.-H. Ji, M. Choi, S.-C. Kim, K.-C. Song, J.-U. Bu, and H.-J. Nam, “Electromagnetic Two-Dimensional Scanner Using Radial Magnetic Field,” J. Microelectromech. Syst. 16(4), 989–996 (2007). [CrossRef]
  11. S. O. Isikman, O. Ergeneman, A. D. Yalcinkaya, and H. Urey, “Modeling and Characterization of Soft Magnetic Film Actuated 2-D Scanners,” IEEE J. Sel. Top. Quantum Electron. 13(2), 283–289 (2007). [CrossRef]
  12. T. Iseki, M. Okumura, and T. Sugawara, “Shrinking design of a MEMS optical scanner having four torsion beams and arms,” Sens. Actuators A Phys. 164(1-2), 95–106 (2010). [CrossRef]
  13. C. Lee, T. Itoh, and T. Suga, “Self-excited piezoelectric PZT microcantilevers for dynamic SFM - with inherent sensing and actuating capabilities,” Sens. Actuators A Phys. 72(2), 179–188 (1999). [CrossRef]
  14. T. Itoh, C. Lee, and T. Suga, “Deflection detection and feedback actuation using a self-excited piezoelectric Pb(Zr,Ti)O-3 microcantilever for dynamic scanning force microscopy,” Appl. Phys. Lett. 69(14), 2036–2038 (1996). [CrossRef]
  15. F. Filhol, E. Defay, C. Divoux, C. Zinck, and M. T. Delaye, “Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning,” Sens. Actuators A Phys. 123–24, 483–489 (2005). [CrossRef]
  16. Y. Yasuda, M. Akamatsu, M. Tani, T. Iijima, and H. Toshiyoshi, “Piezoelectric 2d-Optical Micro Scanners with Pzt Thick Films,” Integr. Ferroelectr. 76(1), 81–91 (2005). [CrossRef]
  17. M. Tani, M. Akamatsu, Y. Yasuda, H. Fujita, and H. Toshiyoshi, “A laser display using a PZT-actuated 2D optical scanner,” in Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on(2005), pp. 9–10.
  18. M. Tani, M. Akamatsu, Y. Yasuda, H. Fujita, and H. Toshiyoshi, “A Combination of Fast Resonant Mode and Slow Static Deflection of SOI-PZT Actuators for MEMS Image Projection Display,” IEEE/LEOS International Conference on Optical MEMS and Their Applications, 25–26 (2006).
  19. M. Tani, M. Akamatsu, Y. Yasuda, and H. Toshiyoshi, “A two-axis piezoelectric tilting micromirror with a newly developed PZT-meandering actuator,” IEEE 20th International Conference on Micro Electro Mechanical Systems, 699–702 (2007).
  20. T. Kobayashi, R. Maeda, T. Itoh, and R. Sawada, “Smart optical microscanner with piezoelectric resonator, sensor, and tuner using Pb(Zr,Ti)O[sub 3] thin film,” Appl. Phys. Lett. 90(18), 183514 (2007). [CrossRef]
  21. W. P. Robbins, D. L. Polla, and D. E. Glumac, “High-displacement piezoelectric actuator utilizing a meander-line geometry I. Experimental characterization,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 38(5), 454–460 (1991). [CrossRef] [PubMed]
  22. J. G. Smits and W. Choi, “The constituent equations of piezoelectric heterogeneous bimorphs,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 38(3), 256–270 (1991). [CrossRef] [PubMed]
  23. T. Kobayashi, M. Ichiki, R. Kondou, K. Nakamura, and R. Maeda, “Fabrication of piezoelectric microcantilevers using LaNiO3 buffered Pb(Zr,Ti)O-3 thin film,” J. Micromech. Microeng. 18(3), 035007031–035007035 (2008). [CrossRef]
  24. K. H. Koh, C. Lee, and T. Kobayashi, “A Piezoelectric-Driven Three-Dimensional MEMS VOA Using Attenuation Mechanism With Combination of Rotational and Translational Effects,” J. Microelectromech. Syst. 19(6), 1370–1379 (2010). [CrossRef]
  25. T. Kobayashi, M. Ichiki, J. Tsaur, and R. Maeda, “Effect of multi-coating process on the orientation and microstructure of lead zirconate titanate (PZT) thin films derived by chemical solution deposition,” Thin Solid Films 489(1-2), 74–78 (2005). [CrossRef]
  26. T. Kobayashi, H. Okada, T. Masuda, R. Maeda, and T. Itoh, “A digital output piezoelectric accelerometer using a Pb(Zr, Ti)O-3 thin film array electrically connected in series,” Smart Mater. Struct. 19(10), 105030 (2010). [CrossRef]
  27. K. H. Koh, T. Kobayashi, F.-L. Hsiao, and C. Lee, “Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors,” Sens. Actuators A Phys. 162(2), 336–347 (2010). [CrossRef]
  28. K. H. Koh, T. Kobayashi, J. Xie, A. Yu, and C. Lee, “Novel piezoelectric actuation mechanism for a gimbal-less mirror in 2D raster scanning applications,” J. Micromech. Microeng. 21(7), 075001 (2011). [CrossRef]
  29. P. Muralt, R. G. Polcawich, and S. Trolier-McKinstry, “Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting,” MRS Bull. 34(09), 658–664 (2009). [CrossRef]
  30. D. Isarakorn, A. Sambri, P. Janphuang, D. Briand, S. Gariglio, J. M. Triscone, F. Guy, J. W. Reiner, C. H. Ahn, and N. F. de Rooij, “Epitaxial piezoelectric MEMS on silicon,” J. Micromech. Microeng. 20(5), 055008 (2010). [CrossRef]

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