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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 15 — Jul. 18, 2011
  • pp: 13812–13824

A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator

Kah How Koh, Takeshi Kobayashi, and Chengkuo Lee  »View Author Affiliations


Optics Express, Vol. 19, Issue 15, pp. 13812-13824 (2011)
http://dx.doi.org/10.1364/OE.19.013812


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Abstract

A novel dynamic excitation of an S-shaped PZT piezoelectric actuator, which is conceptualized by having two superimposed AC voltages, is characterized in this paper through the evaluation of the 2-D scanning characteristics of an integrated silicon micromirror. The device is micromachined from a SOI wafer with a 5μm thick Si device layer and multilayers of Pt/Ti/PZT//Pt/Ti deposited as electrode and actuation materials. A large mirror (1.65mm x 2mm) and an S-shaped PZT actuator are formed after the backside release process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 3Vpp are ± 38.9° and ± 2.1° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror.

© 2011 OSA

OCIS Codes
(120.5800) Instrumentation, measurement, and metrology : Scanners
(230.4040) Optical devices : Mirrors
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Optical Devices

History
Original Manuscript: May 9, 2011
Revised Manuscript: June 14, 2011
Manuscript Accepted: June 14, 2011
Published: July 5, 2011

Citation
Kah How Koh, Takeshi Kobayashi, and Chengkuo Lee, "A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator," Opt. Express 19, 13812-13824 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-15-13812


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