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Capped Mo/Si multilayers with improved performance at 30.4 nm for future solar missionsAlain Jody Corso, Paola Zuppella, Piergiorgio Nicolosi, David L. Windt, E. Gullikson, and Maria Guglielmina Pelizzo »View Author Affiliations
Alain Jody Corso,1,2,*
Paola Zuppella,1,2
Piergiorgio Nicolosi,1,2
David L. Windt,3
E. Gullikson,4
and Maria Guglielmina Pelizzo1,2
1CNR – Institute for Photonics and Nanotechnologies LUXOR Lab., via Trasea 7, 35131 Padova Italy 2University of Padova – Department of Information Engineering, via Gradenigo 6B, 35131 Padova Italy 3Reflective X-ray Optics LLC, 1361 Amsterdam Ave., Suite 3B, New York, NY 10027 USA 4Advance Light Source, Lawrence Berkeley National, 1 Cyclotron Rd, MS6R2100, Berkeley, CA 94720 USA *Corresponding author: corsoala@dei.unipd.it |
Optics Express, Vol. 19, Issue 15, pp. 13963-13973 (2011)
http://dx.doi.org/10.1364/OE.19.013963
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Abstract
Novel capping layer structures have been deposited on periodic Mo/Si multilayers to optimize reflectance at 30.4 nm. Design, deposition and characterization of such coatings are presented. Most of the structures proposed show improved performance with respect to standard Mo/Si multilayers and are stable over time. Reflectance at 121.6 nm and in the visible spectral range have been also tested to explore the applicability of such coatings to the Multi Element Telescope for Imaging and Spectroscopy (METIS) instrument, a coronagraph being developed for the ESA Solar Orbiter platform.
© 2011 OSA
OCIS Codes
(230.4170) Optical devices : Multilayers
(260.7200) Physical optics : Ultraviolet, extreme
(310.1860) Thin films : Deposition and fabrication
(350.1260) Other areas of optics : Astronomical optics
(350.6090) Other areas of optics : Space optics
(310.4165) Thin films : Multilayer design
ToC Category:
Thin Films
History
Original Manuscript: April 6, 2011
Revised Manuscript: June 3, 2011
Manuscript Accepted: June 20, 2011
Published: July 7, 2011
Citation
Alain Jody Corso, Paola Zuppella, Piergiorgio Nicolosi, David L. Windt, E. Gullikson, and Maria Guglielmina Pelizzo, "Capped Mo/Si multilayers with improved performance at 30.4 nm for future solar missions," Opt. Express 19, 13963-13973 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-15-13963
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References
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- J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995). [CrossRef]
- J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995). [CrossRef]
- D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000). [CrossRef]
- D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006). [CrossRef]
- J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995). [CrossRef]
- S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002). [CrossRef]
- D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000). [CrossRef]
- J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003). [CrossRef]
- J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995). [CrossRef]
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- J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995). [CrossRef]
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- D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000). [CrossRef]
- M. H. Hu, K. Le Guen, J. M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010). [CrossRef] [PubMed]
- J. T. Zhu, S. K. Zhou, H. C. Li, Q. S. Huang, Z. S. Wang, K. Le Guen, M. H. Hu, J. M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010). [CrossRef] [PubMed]
- D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000). [CrossRef]
- D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006). [CrossRef]
- S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002). [CrossRef]
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- D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006). [CrossRef]
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- M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008). [CrossRef] [PubMed]
- J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995). [CrossRef]
- J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003). [CrossRef]
- G. Naletto, M. G. Pelizzo, G. Tondello, S. Nannarone, and A. Giglia, “The monochromator for the synchrotron radiation beamline X-MOSS at ELETTRA,” SPIE Proc. 4145, 105–113 (2001). [CrossRef]
- G. Naletto, M. G. Pelizzo, G. Tondello, S. Nannarone, and A. Giglia, “The monochromator for the synchrotron radiation beamline X-MOSS at ELETTRA,” SPIE Proc. 4145, 105–113 (2001). [CrossRef]
- J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995). [CrossRef]
- P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011). [CrossRef] [PubMed]
- M. Suman, G. Monaco, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Realization and characterization of an XUV multilayer coating for attosecond pulses,” Opt. Express 17(10), 7922–7932 (2009). [CrossRef] [PubMed]
- M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009). [CrossRef] [PubMed]
- M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008). [CrossRef] [PubMed]
- M. Suman, M. G. Pelizzo, P. Nicolosi, and D. L. Windt, “Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography,” Appl. Opt. 47(16), 2906–2914 (2008). [CrossRef] [PubMed]
- D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006). [CrossRef]
- M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004). [CrossRef] [PubMed]
- V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003). [CrossRef]
- D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006). [CrossRef]
- H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spec. Rel. Phen. 144, 1047–1049 (2010). [CrossRef]
- M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004). [CrossRef] [PubMed]
- V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003). [CrossRef]
- P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011). [CrossRef] [PubMed]
- M. Suman, G. Monaco, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Realization and characterization of an XUV multilayer coating for attosecond pulses,” Opt. Express 17(10), 7922–7932 (2009). [CrossRef] [PubMed]
- M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009). [CrossRef] [PubMed]
- M. Suman, M. G. Pelizzo, P. Nicolosi, and D. L. Windt, “Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography,” Appl. Opt. 47(16), 2906–2914 (2008). [CrossRef] [PubMed]
- M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008). [CrossRef] [PubMed]
- M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004). [CrossRef] [PubMed]
- V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003). [CrossRef]
- G. Naletto, M. G. Pelizzo, G. Tondello, S. Nannarone, and A. Giglia, “The monochromator for the synchrotron radiation beamline X-MOSS at ELETTRA,” SPIE Proc. 4145, 105–113 (2001). [CrossRef]
- D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006). [CrossRef]
- M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004). [CrossRef] [PubMed]
- V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003). [CrossRef]
- J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003). [CrossRef]
- R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005). [CrossRef]
- S. Bajt, H. N. Chapman, N. Nguyen, J. Alameda, J. C. Robinson, M. Malinowski, E. Gullikson, A. Aquila, C. Tarrio, and S. Grantham, “Design and performance of capping layers for extreme-ultraviolet multilayer mirrors,” Appl. Opt. 42(28), 5750–5758 (2003). [CrossRef] [PubMed]
- D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006). [CrossRef]
- J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995). [CrossRef]
- V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003). [CrossRef]
- D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006). [CrossRef]
- R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005). [CrossRef]
- J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995). [CrossRef]
- D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006). [CrossRef]
- J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995). [CrossRef]
- R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005). [CrossRef]
- R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005). [CrossRef]
- S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002). [CrossRef]
- J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995). [CrossRef]
- M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009). [CrossRef] [PubMed]
- M. Suman, G. Monaco, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Realization and characterization of an XUV multilayer coating for attosecond pulses,” Opt. Express 17(10), 7922–7932 (2009). [CrossRef] [PubMed]
- M. Suman, M. G. Pelizzo, P. Nicolosi, and D. L. Windt, “Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography,” Appl. Opt. 47(16), 2906–2914 (2008). [CrossRef] [PubMed]
- M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008). [CrossRef] [PubMed]
- H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spec. Rel. Phen. 144, 1047–1049 (2010). [CrossRef]
- S. Bajt, H. N. Chapman, N. Nguyen, J. Alameda, J. C. Robinson, M. Malinowski, E. Gullikson, A. Aquila, C. Tarrio, and S. Grantham, “Design and performance of capping layers for extreme-ultraviolet multilayer mirrors,” Appl. Opt. 42(28), 5750–5758 (2003). [CrossRef] [PubMed]
- C. Tarrio, R. N. Watts, T. B. Lucatorto, J. M. Slaughter, and C. M. Falco, “Optical constants of in situ-deposited films of important extreme-ultraviolet multilayer mirror materials,” Appl. Opt. 37(19), 4100–4104 (1998). [CrossRef] [PubMed]
- D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006). [CrossRef]
- M. J. H. Kessels, J. Verhoeven, A. E. Yakshin, F. D. Tichelaar, and F. Bijkerk, “Ion beam induced intermixing of interface structures in W/Si multilayers,” Nucl. Instrum. Methods Phys. Res. B 222(3–4), 484–490 (2004). [CrossRef]
- G. Naletto, M. G. Pelizzo, G. Tondello, S. Nannarone, and A. Giglia, “The monochromator for the synchrotron radiation beamline X-MOSS at ELETTRA,” SPIE Proc. 4145, 105–113 (2001). [CrossRef]
- J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995). [CrossRef]
- M. J. H. Kessels, J. Verhoeven, A. E. Yakshin, F. D. Tichelaar, and F. Bijkerk, “Ion beam induced intermixing of interface structures in W/Si multilayers,” Nucl. Instrum. Methods Phys. Res. B 222(3–4), 484–490 (2004). [CrossRef]
- P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011). [CrossRef] [PubMed]
- M. Suman, G. Monaco, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Realization and characterization of an XUV multilayer coating for attosecond pulses,” Opt. Express 17(10), 7922–7932 (2009). [CrossRef] [PubMed]
- M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009). [CrossRef] [PubMed]
- M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008). [CrossRef] [PubMed]
- M. Suman, M. G. Pelizzo, P. Nicolosi, and D. L. Windt, “Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography,” Appl. Opt. 47(16), 2906–2914 (2008). [CrossRef] [PubMed]
- R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly aboard the Solar Dynamics Observatory,” Proc. SPIE 5901, 59010M-1 –59010M-11 (2005). [CrossRef]
- D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt. 43(9), 1835–1848 (2004). [CrossRef] [PubMed]
- D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000). [CrossRef]
- D. L. Windt, “IMD: Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998). [CrossRef]
- M. J. H. Kessels, J. Verhoeven, A. E. Yakshin, F. D. Tichelaar, and F. Bijkerk, “Ion beam induced intermixing of interface structures in W/Si multilayers,” Nucl. Instrum. Methods Phys. Res. B 222(3–4), 484–490 (2004). [CrossRef]
- D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006). [CrossRef]
Adv. Space Res.
- D. Berghmans, J. F. Hochedez, J. M. Defise, J. H. Lecat, B. Nicula, V. Slemzin, G. Lawrence, A. C. Katsyiannis, R. V. der Linden, A. Zhukov, F. Clette, P. Rochus, E. Mazy, T. Thibert, P. Nicolosi, M.-G. Pelizzo, and U. Schühle, “SWAP on board PROBA 2, a new EUV imager for solar monitoring,” Adv. Space Res. 38(8), 1807–1811 (2006). [CrossRef]
Appl. Opt.
- M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004). [CrossRef] [PubMed]
- J. Gautier, F. Delmotte, M. Roulliay, F. Bridou, M. F. Ravet, and A. Jérome, “Study of normal incidence of three-component multilayer mirrors in the range 20-40 nm,” Appl. Opt. 44(3), 384–390 (2005). [CrossRef] [PubMed]
- D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt. 43(9), 1835–1848 (2004). [CrossRef] [PubMed]
- J. T. Zhu, S. K. Zhou, H. C. Li, Q. S. Huang, Z. S. Wang, K. Le Guen, M. H. Hu, J. M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010). [CrossRef] [PubMed]
- M. Suman, M. G. Pelizzo, P. Nicolosi, and D. L. Windt, “Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography,” Appl. Opt. 47(16), 2906–2914 (2008). [CrossRef] [PubMed]
- S. Bajt, H. N. Chapman, N. Nguyen, J. Alameda, J. C. Robinson, M. Malinowski, E. Gullikson, A. Aquila, C. Tarrio, and S. Grantham, “Design and performance of capping layers for extreme-ultraviolet multilayer mirrors,” Appl. Opt. 42(28), 5750–5758 (2003). [CrossRef] [PubMed]
- M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009). [CrossRef] [PubMed]
- C. Tarrio, R. N. Watts, T. B. Lucatorto, J. M. Slaughter, and C. M. Falco, “Optical constants of in situ-deposited films of important extreme-ultraviolet multilayer mirror materials,” Appl. Opt. 37(19), 4100–4104 (1998). [CrossRef] [PubMed]
Comput. Phys.
- D. L. Windt, “IMD: Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998). [CrossRef]
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- M. J. H. Kessels, J. Verhoeven, A. E. Yakshin, F. D. Tichelaar, and F. Bijkerk, “Ion beam induced intermixing of interface structures in W/Si multilayers,” Nucl. Instrum. Methods Phys. Res. B 222(3–4), 484–490 (2004). [CrossRef]
- V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, “Effects of ion bombardment and gas incorporation on the properties of Mo/a-Si:H multilayers for EUV applications,” Surf. Coat. Tech. 174, 40–48 (2003). [CrossRef]
- J. Dalla Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Microstructure of Thin Tantalum Films Sputtered onto Inclined Substrates: Experiments and Atomistic Simulations,” J. Appl. Phys. 94(1), 263–271 (2003). [CrossRef]
- S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002). [CrossRef]
- G. Naletto, M. G. Pelizzo, G. Tondello, S. Nannarone, and A. Giglia, “The monochromator for the synchrotron radiation beamline X-MOSS at ELETTRA,” SPIE Proc. 4145, 105–113 (2001). [CrossRef]
- D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaram, and P. H. Mao, “Growth, structure and performance of depth-graded W/Si multilayers for hard x-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000). [CrossRef]
- D. L. Windt, “IMD: Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998). [CrossRef]
- J. P. Delaboudineire, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochedez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, “EIT: Extreme-ultraviolet imaging telescope for the SOHO mission,” Sol. Phys. 162, 291–312 (1995). [CrossRef]
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