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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 16 — Aug. 1, 2011
  • pp: 14838–14844

Stability of extreme ultraviolet multilayer coatings to low energy proton bombardment

M.G. Pelizzo, Alain Jody Corso, Paola Zuppella, D.L. Windt, G. Mattei, and P. Nicolosi  »View Author Affiliations

Optics Express, Vol. 19, Issue 16, pp. 14838-14844 (2011)

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In this work we present results of an new experiment related to low energy protons bombardments on nano-structured optical coatings. Multilayer structures protected by different capping layers have been fabricated and exposed to low energy protons (1keV). The experimental parameters have been selected considering the potential application of the coatings to solar mission instrumentation. Future solar missions will investigate the Sun from very close distances and optical components are constantly exposed to low energy ion particles irradiation. The experiment was repeated fixing the proton flux while varying the total dose accumulated. Results show that physical processes occurred at the uppermost interfaces can strongly damage the structure.

© 2011 OSA

OCIS Codes
(230.4170) Optical devices : Multilayers
(260.7200) Physical optics : Ultraviolet, extreme
(350.1820) Other areas of optics : Damage
(350.4990) Other areas of optics : Particles
(350.6090) Other areas of optics : Space optics

ToC Category:
Thin Films

Original Manuscript: May 10, 2011
Revised Manuscript: July 1, 2011
Manuscript Accepted: July 1, 2011
Published: July 18, 2011

M.G. Pelizzo, Alain Jody Corso, Paola Zuppella, D.L. Windt, G. Mattei, and P. Nicolosi, "Stability of extreme ultraviolet multilayer coatings to low energy proton bombardment," Opt. Express 19, 14838-14844 (2011)

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  1. G. Naletto, E. Antonucci, V. Andretta, E. Battistelli, S. Cesare, V. Da Deppo, F. d’Angelo, S. Fineschi, M. Focardi, P. Lamy, F. Landini, D. Moses, G. Nicolini, P. Nicolosi, M. Pancrazzi, M. G. Pelizzo, L. Poletto, M. Romoli, S. Solanki, D. Spadaro, L. Teriaca, M. Uslenghi, and L. Zangrilli, “METIS; the multielement telescope for imaging and spectroscopy for the solar orbiter mission” ICSO Proc. - International Conference on Space Optics, Rhodes (Greece) Oct. 4th-8th (2010).
  2. M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato, “Design, deposition, and characterization of multilayer coatings for the ultraviolet and visible-light coronagraphic imager,” Appl. Opt. 43(13), 2661–2669 (2004). [CrossRef] [PubMed]
  3. J. P. Halain, Y. Houbrechts, F. Auchère, P. Rochus, T. Appourchaux, D. Berghmans, U. Schühle, L. Harra, E. Renotte, and A. Zukhov, The SOLar Orbiter EUI instrument optical developments, ICSO Proc. - International Conference on Space Optics, Rhodes (Greece) Oct. 4th-8th (2010).
  4. ESA, “Solar Orbiter environmental specification”, Issue 2.0 (2008).
  5. A. D. Rousseau, D. L. Windt, B. Winter, L. Harra, H. Lamoureux, and F. Eriksson, “Stability of EUV multilayers to long-term heating, and to energetic protons and neutrons, for extreme solar missions,” Proc. SPIE 5900, 590004, 590004-9 (2005). [CrossRef]
  6. M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, “High performance EUV multilayer structures insensitive to capping layer optical parameters,” Opt. Express 16(19), 15228–15237 (2008). [CrossRef] [PubMed]
  7. M. G. Pelizzo, M. Suman, D. L. Windt, G. Monaco, and P. Nicolosi, “Innovative methods for optimization and characterization of multilayer coatings (Proceedings Paper)”, Proceedings Vol. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space, René Hudec; Ladislav Pina, Editors, 73600Q (2009).
  8. A. J. Corso, P. Zuppella, P. Nicolosi, D. L. Windt, E. Gullikson, and M. G. Pelizzo, “Capped multilayers with improved performances at 30.4 nm for future solar missions”, Accepted by Opt. Express (2011).
  9. H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spec. and Rel. Phen. 144-147, 1047–1049 (2005). [CrossRef]
  10. M. H. Hu, K. Le Guen, J. M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010). [CrossRef] [PubMed]
  11. P. Zuppella, G. Monaco, A. J. Corso, P. Nicolosi, D. L. Windt, V. Bello, G. Mattei, and M. G. Pelizzo, “Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range,” Opt. Lett. 36(7), 1203–1205 (2011). [CrossRef] [PubMed]
  12. J. Dalla Torre, J.-L. Bocquet, Y. Limoge, J.-P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, “Study of self-limiting oxidation of silicon nanoclusters by atomistic simulations,” J. Appl. Phys. 92(2), 1084 (2002). [CrossRef]

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