Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses

doi:10.1364/OE.19.015069

Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses

Hanfei Yan, Volker Rose, Deming Shu, Enju Lima, Hyon Chol Kang, Ray Conley, Chian Liu, Nima Jahedi, Albert T. Macrander, G. Brian Stephenson, Martin Holt, Yong S. Chu, Ming Lu, and Jörg Maser »View Author Affiliations

Optics Express, Vol. 19, Issue 16, pp. 15069-15076 (2011)
http://dx.doi.org/10.1364/OE.19.015069

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Abstract

Hard x-ray microscopy with nanometer resolution will open frontiers in the study of materials and devices, environmental sciences, and life sciences by utilizing the unique characterization capabilities of x-rays. Here we report two-dimensional nanofocusing by multilayer Laue lenses (MLLs), a type of diffractive optics that is in principle capable of focusing x-rays to 1 nm. We demonstrate focusing to a 25 × 27 nm² FWHM spot with an efficiency of 2% at a photon energy of 12 keV, and to a 25 × 40 nm² FWHM spot with an efficiency of 17% at a photon energy of 19.5 keV.

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(180.7460) Microscopy : X-ray microscopy

ToC Category:
X-ray Optics

History
Original Manuscript: April 7, 2011
Revised Manuscript: May 19, 2011
Manuscript Accepted: May 22, 2011
Published: July 21, 2011

Virtual Issues
Vol. 6, Iss. 9 Virtual Journal for Biomedical Optics

Citation
Hanfei Yan, Volker Rose, Deming Shu, Enju Lima, Hyon Chol Kang, Ray Conley, Chian Liu, Nima Jahedi, Albert T. Macrander, G. Brian Stephenson, Martin Holt, Yong S. Chu, Ming Lu, and Jörg Maser, "Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses," Opt. Express 19, 15069-15076 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-16-15069

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References

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
G.-C. Yin, Y.-F. Song, M.-T. Tang, F.-R. Chen, K. S. Liang, F. W. Duewer, M. Feser, W. Yun, and H.-P. D. Shieh, “30 nm resolution x-ray imaging at 8 keV using third order diffraction of a zone plate lens objective in a transmission microscope,” Appl. Phys. Lett. 89(22), 221122 (2006). [CrossRef]
C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Kuchler, “Hard X-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005). [CrossRef] [PubMed]
J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maaßdorf, M. Ritala, and C. David, “Advanced thin film technology for ultrahigh resolution X-ray microscopy,” Ultramicroscopy 109(11), 1360–1364 (2009). [CrossRef] [PubMed]
H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys. 6(2), 122–125 (2010). [CrossRef]
S. Matsuyama, H. Mimura, H. Yumoto, Y. Sano, K. Yamamura, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Development of scanning X-ray fluorescence microscope with spatial resolution of 30 nm using Kirkpatrick-Baez mirror optics,” Rev. Sci. Instrum. 77(10), 103102 (2006). [CrossRef]
H. C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, “Nanometer linear focusing of hard X rays by a multilayer Laue lens,” Phys. Rev. Lett. 96(12), 127401 (2006). [CrossRef] [PubMed]
A. T. Macrander, H. Yan, H. C. Kang, J. Maser, C. Liu, R. Conley, and G. B. Stephenson, “Nanofocusing of hard X-rays with multilayer laue lenses,” in Hand Book of Optics(McGraw-Hill Professional, 2009).
H. F. Yan, J. Maser, A. Macrander, Q. Shen, S. Vogt, G. B. Stephenson, and H. C. Kang, “Takagi-Taupin description of x-ray dynamical diffraction from diffractive optics with large numerical aperture,” Phys. Rev. B 76(11), 115438 (2007). [CrossRef]
H. F. Yan, “X-ray dynamical diffraction from multilayer Laue lenses with rough interfaces,” Phys. Rev. B 79(16), 165410 (2009). [CrossRef]
H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, R. Khachatryan, M. Wieczorek, A. T. Macrander, H. Yan, J. Maser, J. Hiller, and R. Koritala, “Sectioning of multilayers to make a multilayer Laue lens,” Rev. Sci. Instrum. 78(4), 046103 (2007). [CrossRef] [PubMed]
H. C. Kang, H. F. Yan, R. P. Winarski, M. V. Holt, J. Maser, C. A. Liu, R. Conley, S. Vogt, A. T. Macrander, and G. B. Stephenson, “Focusing of hard x-rays to 16 nanometers with a multilayer Laue lens,” Appl. Phys. Lett. 92(22), 221114 (2008). [CrossRef]
J. Maser, G. B. Stephenson, S. Vogt, Y. Wenbing, A. Macrander, H. C. Kang, L. Chian, and R. Conley, “Multilayer Laue lenses as high-resolution x-ray optics,” Proc. SPIE - Int. Soc. Opt. Eng. 5539, 185–194 (2004).
H. Yan, J. Maser, H. C. Kang, A. Macrander, and B. Stephenson, “A theoretical study of two-dimensional point focusing by two multilayer Laue lenses,” Proc. SPIE - Int. Soc. Opt. Eng. 7077, 70770Q–70778 (2008).
H. M. Quiney, A. G. Peele, Z. Cai, D. Paterson, and K. A. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys. 2(2), 101–104 (2006). [CrossRef]
D. Shu, H. Yan, and J. Maser, “Mechanical design of a multi-dimensional alignment system for an MLL system with nanometerscale 2-D focusing,” in Proceedings of SRI-2008(to be published in Nucl. Instrum. Methods A, Saskatoon, Canada, 2008).
D. Shu, H. Yan, and J. M. Maser, “Multidimensional alignment apparatus for hard x-ray focusing with two multilayer Laue lenses,” US Patent No. 7597475 (6 October 2009).
http://www.xradia.com .
D. M. Bates, and D. G. Watts, Nonlinear Regression Analysis and Its Applications (John Wiley & Sons, Inc., 1988).
B. M. Weckhuysen, “Chemical imaging of spatial heterogeneities in catalytic solids at different length and time scales,” Angew. Chem. Int. Ed. Engl. 48(27), 4910–4943 (2009). [CrossRef] [PubMed]
T. Paunesku, S. Vogt, J. Maser, B. Lai, and G. Woloschak, “X-ray fluorescence microprobe imaging in biology and medicine,” J. Cell. Biochem. 99(6), 1489–1502 (2006). [CrossRef] [PubMed]
R. Conley, C. Liu, J. Qian, C. M. Kewish, A. T. Macrander, H. Yan, H. C. Kang, J. Maser, and G. B. Stephenson, “Wedged multilayer Laue lens,” Rev. Sci. Instrum. 79(5), 053104 (2008). [CrossRef] [PubMed]

Anderson, E. H.
Attwood, D. T.
Boye, P.
Burghammer, M.
Cai, Z.
Chao, W.
Chen, F.-R.
Conley, R.
David, C.
Duewer, F. W.
Feldkamp, J.
Feser, M.
Fink, R. H.
Handa, S.
Harteneck, B. D.
Hiller, J.
Holt, M. V.
Inagaki, K.
Ishikawa, T.
Jefimovs, K.
Kang, H. C.
Kewish, C. M.
Khachatryan, R.
Kimura, T.
Koritala, R.
Kuchler, M.
Kurapova, O.
Lai, B.
Lengeler, B.
Liang, K. S.
Liddle, J. A.
Liu, C.
Liu, C. A.
Maaßdorf, A.
Macrander, A.
Macrander, A. T.
Maser, J.
Matsuyama, S.
Mimura, H.
Mori, Y.
Nishino, Y.
Nugent, K. A.
Paterson, D.
Patommel, J.
Paunesku, T.
Peele, A. G.
Pilvi, T.
Qian, J.
Quiney, H. M.
Raabe, J.
Riekel, C.
Ritala, M.
Sano, Y.
Schroer, C. G.
Senoner, M.
Shen, Q.
Shieh, H.-P. D.
Song, Y.-F.
Stephenson, G. B.
Tamasaku, K.
Tang, M.-T.
van der Hart, A.
Vila-Comamala, J.
Vincze, L.
Vogt, S.
Weckhuysen, B. M.
Wieczorek, M.
Winarski, R. P.
Woloschak, G.
Yabashi, M.
Yamakawa, D.
Yamamura, K.
Yamauchi, K.
Yan, H.
Yan, H. F.
Yin, G.-C.
Yokoyama, H.
Yumoto, H.
Yun, W.

Angew. Chem. Int. Ed. Engl.

B. M. Weckhuysen, “Chemical imaging of spatial heterogeneities in catalytic solids at different length and time scales,” Angew. Chem. Int. Ed. Engl. 48(27), 4910–4943 (2009). [CrossRef] [PubMed]

Appl. Phys. Lett.

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett. 90(5), 051903 (2007). [CrossRef]
G.-C. Yin, Y.-F. Song, M.-T. Tang, F.-R. Chen, K. S. Liang, F. W. Duewer, M. Feser, W. Yun, and H.-P. D. Shieh, “30 nm resolution x-ray imaging at 8 keV using third order diffraction of a zone plate lens objective in a transmission microscope,” Appl. Phys. Lett. 89(22), 221122 (2006). [CrossRef]
C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Kuchler, “Hard X-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett. 87(12), 124103 (2005). [CrossRef]
H. C. Kang, H. F. Yan, R. P. Winarski, M. V. Holt, J. Maser, C. A. Liu, R. Conley, S. Vogt, A. T. Macrander, and G. B. Stephenson, “Focusing of hard x-rays to 16 nanometers with a multilayer Laue lens,” Appl. Phys. Lett. 92(22), 221114 (2008). [CrossRef]

J. Cell. Biochem.

T. Paunesku, S. Vogt, J. Maser, B. Lai, and G. Woloschak, “X-ray fluorescence microprobe imaging in biology and medicine,” J. Cell. Biochem. 99(6), 1489–1502 (2006). [CrossRef] [PubMed]

Nat. Phys.

H. M. Quiney, A. G. Peele, Z. Cai, D. Paterson, and K. A. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys. 2(2), 101–104 (2006). [CrossRef]
H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys. 6(2), 122–125 (2010). [CrossRef]

Nature

W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005). [CrossRef] [PubMed]

Phys. Rev. B

H. F. Yan, J. Maser, A. Macrander, Q. Shen, S. Vogt, G. B. Stephenson, and H. C. Kang, “Takagi-Taupin description of x-ray dynamical diffraction from diffractive optics with large numerical aperture,” Phys. Rev. B 76(11), 115438 (2007). [CrossRef]
H. F. Yan, “X-ray dynamical diffraction from multilayer Laue lenses with rough interfaces,” Phys. Rev. B 79(16), 165410 (2009). [CrossRef]

Phys. Rev. Lett.

H. C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, “Nanometer linear focusing of hard X rays by a multilayer Laue lens,” Phys. Rev. Lett. 96(12), 127401 (2006). [CrossRef] [PubMed]

Rev. Sci. Instrum.

S. Matsuyama, H. Mimura, H. Yumoto, Y. Sano, K. Yamamura, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Development of scanning X-ray fluorescence microscope with spatial resolution of 30 nm using Kirkpatrick-Baez mirror optics,” Rev. Sci. Instrum. 77(10), 103102 (2006). [CrossRef]
H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, R. Khachatryan, M. Wieczorek, A. T. Macrander, H. Yan, J. Maser, J. Hiller, and R. Koritala, “Sectioning of multilayers to make a multilayer Laue lens,” Rev. Sci. Instrum. 78(4), 046103 (2007). [CrossRef] [PubMed]
R. Conley, C. Liu, J. Qian, C. M. Kewish, A. T. Macrander, H. Yan, H. C. Kang, J. Maser, and G. B. Stephenson, “Wedged multilayer Laue lens,” Rev. Sci. Instrum. 79(5), 053104 (2008). [CrossRef] [PubMed]

Ultramicroscopy

J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maaßdorf, M. Ritala, and C. David, “Advanced thin film technology for ultrahigh resolution X-ray microscopy,” Ultramicroscopy 109(11), 1360–1364 (2009). [CrossRef] [PubMed]

Other

A. T. Macrander, H. Yan, H. C. Kang, J. Maser, C. Liu, R. Conley, and G. B. Stephenson, “Nanofocusing of hard X-rays with multilayer laue lenses,” in Hand Book of Optics(McGraw-Hill Professional, 2009).
J. Maser, G. B. Stephenson, S. Vogt, Y. Wenbing, A. Macrander, H. C. Kang, L. Chian, and R. Conley, “Multilayer Laue lenses as high-resolution x-ray optics,” Proc. SPIE - Int. Soc. Opt. Eng. 5539, 185–194 (2004).
H. Yan, J. Maser, H. C. Kang, A. Macrander, and B. Stephenson, “A theoretical study of two-dimensional point focusing by two multilayer Laue lenses,” Proc. SPIE - Int. Soc. Opt. Eng. 7077, 70770Q–70778 (2008).
D. Shu, H. Yan, and J. Maser, “Mechanical design of a multi-dimensional alignment system for an MLL system with nanometerscale 2-D focusing,” in Proceedings of SRI-2008(to be published in Nucl. Instrum. Methods A, Saskatoon, Canada, 2008).
D. Shu, H. Yan, and J. M. Maser, “Multidimensional alignment apparatus for hard x-ray focusing with two multilayer Laue lenses,” US Patent No. 7597475 (6 October 2009).
http://www.xradia.com .
D. M. Bates, and D. G. Watts, Nonlinear Regression Analysis and Its Applications (John Wiley & Sons, Inc., 1988).

2010, Mimura, Nat. Phys.
2009, Vila-Comamala, Ultramicroscopy
2009, Yan, Phys. Rev. B
2009, Weckhuysen, Angew. Chem. Int. Ed. Engl.
2008, Conley, Rev. Sci. Instrum.
2008, Kang, Appl. Phys. Lett.
2007, Kang, Rev. Sci. Instrum.
2007, Yan, Phys. Rev. B
2007, Mimura, Appl. Phys. Lett.
2006, Yin, Appl. Phys. Lett.
2006, Matsuyama, Rev. Sci. Instrum.
2006, Kang, Phys. Rev. Lett.
2006, Quiney, Nat. Phys.
2006, Paunesku, J. Cell. Biochem.
2005, Schroer, Appl. Phys. Lett.
2005, Chao, Nature

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