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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 17 — Aug. 15, 2011
  • pp: 15803–15809

Long-wave infrared 1 × 2 MMI based on air-gap beneath silicon rib waveguides

Yuxin Wei, Guoyi Li, Yinlei Hao, Yubo Li, Jianyi Yang, Minghua Wang, and Xiaoqing Jiang  »View Author Affiliations

Optics Express, Vol. 19, Issue 17, pp. 15803-15809 (2011)

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The undercut long-wave infrared (LWIR) waveguide components with air-gap beneath are analyzed and fabricated on the Si-wafer with simple manufacturing process. A 1 × 2 multimode interference (MMI) splitter based on this structure is presented and measured under the 10.6μm wavelength experimental setup. The uniformity of the MMI fabricated is 0.76 dB. The relationship among the output power, slab thickness and air-gap width is also fully discussed. Furthermore, undercut straight waveguides based on SOI platform are fabricated for propagation loss evaluation. Ways to reduce the loss are discussed either.

© 2011 OSA

OCIS Codes
(130.3060) Integrated optics : Infrared
(130.3120) Integrated optics : Integrated optics devices

ToC Category:
Integrated Optics

Original Manuscript: May 2, 2011
Revised Manuscript: June 24, 2011
Manuscript Accepted: July 14, 2011
Published: August 3, 2011

Yuxin Wei, Guoyi Li, Yinlei Hao, Yubo Li, Jianyi Yang, Minghua Wang, and Xiaoqing Jiang, "Long-wave infrared 1 × 2 MMI based on air-gap beneath silicon rib waveguides," Opt. Express 19, 15803-15809 (2011)

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