Effect of separating layer thickness on W/Si multilayer replication

doi:10.1364/OE.19.015929

Effect of separating layer thickness on W/Si multilayer replication

Fangfang Wang, Baozhong Mu, Huijun Jin, Xiajun Yang, Jingtao Zhu, and Zhanshan Wang »View Author Affiliations

Optics Express, Vol. 19, Issue 17, pp. 15929-15936 (2011)
http://dx.doi.org/10.1364/OE.19.015929

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Abstract

The direct replication of W/Si multilayers and the effect of separating layer thickness on the performance of the multilayer before and after replication are investigated systematically. Platinum separating layers with different layer thicknesses were first deposited onto different supersmooth mandrels and then W/Si multilayers with the similar structure were deposited onto these Pt-coated mandrels by using a high vacuum DC magnetron sputtering system. After the deposition, these multilayers were replicated onto the commercially available float glass substrates by epoxy replication technique. These multilayers before and after replication are characterized by grazing-incident X-ray reflectance measurement and atomic force microscope. The measured results show that before and after replication, the reflectivity curves are much similar to those calculated and the surface roughness of each sample is close to that of the mandrel, when the separating layer thickness is larger than 1.5 nm. These results reveal that the W/Si multilayer with the separating layer thickness larger than 1.5 nm can be successfully replicated onto a substrate without modification of the structure, significant increase of surface roughness or apparent change of reflectivity.

OCIS Codes
(240.5770) Optics at surfaces : Roughness
(310.1860) Thin films : Deposition and fabrication
(340.7470) X-ray optics : X-ray mirrors
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(310.5448) Thin films : Polarization, other optical properties

ToC Category:
X-ray Optics

History
Original Manuscript: June 9, 2011
Revised Manuscript: July 10, 2011
Manuscript Accepted: July 14, 2011
Published: August 4, 2011

Citation
Fangfang Wang, Baozhong Mu, Huijun Jin, Xiajun Yang, Jingtao Zhu, and Zhanshan Wang, "Effect of separating layer thickness on W/Si multilayer replication," Opt. Express 19, 15929-15936 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-17-15929

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References

O. Citterio, G. Bonelli, G. Conti, E. Mattaini, E. Santambrogio, B. Sacco, E. Lanzara, H. Brauninger, and W. Burkert, “Optics for the x-ray imaging concentrators aboard the x-ray astronomy satellite SAX,” Appl. Opt. 27(8), 1470–1475 (1988). [CrossRef] [PubMed]
G. Pareschi, O. Citterio, M. Ghigo, F. Mazzoleni, A. Mengali, and C. Misiano, “Nickel replicated multilayer optics for soft and hard X-ray telescopes,” Proc. SPIE 4012, 284–293 (2000). [CrossRef]
G. Pareschi, O. Citterio, M. Ghigo, F. Mazzoleni, P. Gorenstein, S. Romaine, and G. Parodi, “Replication by Ni electroforming approach to produce the Con-X/HXT hard X-ray mirrors,” Proc. SPIE 4851, 528–537 (2003). [CrossRef]
M. P. Ulmer, Y. Matsui, D. K. Bedford, G. M. Simnett, and P. Z. Takacs, “Electroformed grazing incidence x-ray mirrors for a mirror array telescope,” Appl. Opt. 26(18), 3852–3857 (1987). [CrossRef] [PubMed]
Y. Tawara, K. Yamashita, H. Kunieda, K. Tamura, A. Furuzawa, K. Haga, N. Nakajo, T. Okajima, H. Takata, P. J. Serlemitsos, J. Tueller, R. Petre, Y. Soong, K. Chan, G. S. Lodha, Y. Namba, and J. Yu, “Development of multilayer supermirror for hard X-ray telescope,” Proc. SPIE 3444, 569–575 (1998). [CrossRef]
Y. Tawara, K. Yamashita, Y. Ogasaka, K. Tamura, K. Haga, T. Okajima, S. Ichimaru, S. Takahashi, A. Gotou, H. Kitou, S. Fukuda, Y. Tsusaka, H. Kunieida, J. Tueller, P. J. Serlemitsos, Y. Soong, K. Chan, S. M. Owens, B. Barber, E. Dereniak, and E. E. Young, “A hard X-ray telescope with multilayer supermirrors for balloon observations of cosmic X-ray sources,” Adv. Space Res. 30(5), 1313–1319 (2002). [CrossRef]
Y. Ogasaka, K. Tamura, T. Miyazawa, Y. Fukaya, T. Iwahara, N. Sasaki, A. Furuzawa, Y. Haba, Y. Kanou, D. Ueno, H. Kunieda, K. Yamashita, R. Shibata, T. Okajima, J. Tueller, P. Serlemitsos, Y. Soong, K.-W. Chan, E. Miyata, H. Tsunemi, K. Uesugi, Y. Suzuki, and Y. Namba, “Thin-foil multilayer-supermirror hard X-ray telescope for InFOCμS/SUMIT balloon experiments and NeXT satellite program,” Proc. SPIE 6688, 668803, 668803-8 (2007). [CrossRef]
G. Pareschi, S. Basso, O. Citterio, M. Ghigo, F. Mazzoleni, D. Spiga, W. Burkert, M. Freyberg, G. D. Hartner, G. Conti, E. Mattaini, G. Grisoni, G. Balsecchi, B. Negri, G. Parodi, and A. Marzorati, “Development of grazing-incidence multilayer mirrors by direct Ni electroforming replication: a status report,” Proc. SPIE 5900, 590008, 590008-12 (2005). [CrossRef]
M. P. Ulmer and W. R. Purcell, JrJ. E. A. Loughlin and M. P. Kowalski, “Electroform replication used for multiple x-ray mirror production,” Appl. Opt. 23(23), 4233–4236 (1984). [CrossRef] [PubMed]
M. P. Ulmer, R. Altkorn, M. E. Graham, A. Madan, and Y. S. Chu, “Production and performance of multilayer-coated conical x-ray mirrors,” Appl. Opt. 42(34), 6945–6952 (2003). [CrossRef] [PubMed]
M. P. Ulmer, R. Altkorn, A. Madan, M. Graham, Y.-W. Chung, A. Krieger, C. Liu, B. Lai, D. C. Mancini, and P. Takacs, “The fabrication of Wolter I multilayer coated optics via electroforming: an update,” Proc. SPIE 3773, 113–121 (1999). [CrossRef]
Y. Soong, L. Jalota, and P. J. Serlemitsos, “Conical thin foil X-ray mirror fabrication via surface replication,” Proc. SPIE 2515, 64–69 (1995). [CrossRef]
M. A. Jimenez-Garate, W. W. Craig, C. J. Hailey, F. E. Christensen, and A. Hussain, “Fabrication, performance, and figure metrology of epoxy-replicated aluminum foils for hard x-ray focusing mulitlyaer-coated segmented conical optics,” Opt. Eng. 39(11), 2982–2994 (2000). [CrossRef]
Y. Soong, K. Chan, and P. J. Serlemitsos, “Recent advance in segmented thin-foil X-ray optics,” Proc. SPIE 4496, 54–61 (2002). [CrossRef]
A. Furuzawa, K. Yamashita, H. Kunieda, Y. Tawara, K. Tamura, K. Haga, N. Nakamura, N. Nakajo, H. Takata, T. Okajima, Y. Ogasaka, G. S. Lodha, and Y. Nanba, “Replication of multilayer supermirror,” Proc. SPIE 3444, 576–582 (1998). [CrossRef]
D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaraman, and P. H. Mao, “Growth, structure, and performance of depth-graded W/Si multilayers for hard X-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000). [CrossRef]
K. K. Madsen, F. E. Christensen, C. P. Jensen, E. Ziegler, W. W. Craig, K. Gunderson, J. E. Koglin, and K. Pedersen, “X-ray study of W/Si multilayers for the HEFT hard X-ray telescope,” Proc. SPIE 5168, 41–52 (2004). [CrossRef]

Altkorn, R.
Balsecchi, G.
Barber, B.
Basso, S.
Bedford, D. K.
Bonelli, G.
Brauninger, H.
Burkert, W.
Chan, K.
Chan, K.-W.
Christensen, F. E.
Chu, Y. S.
Chung, Y.-W.
Citterio, O.
Conti, G.
Craig, W. W.
Dereniak, E.
Freyberg, M.
Fukaya, Y.
Fukuda, S.
Furuzawa, A.
Ghigo, M.
Gorenstein, P.
Gotou, A.
Graham, M.
Graham, M. E.
Grisoni, G.
Gunderson, K.
Haba, Y.
Haga, K.
Hailey, C.
Hailey, C. J.
Harrison, F. A.
Hartner, G. D.
Hussain, A.
Ichimaru, S.
Iwahara, T.
Jalota, L.
Jensen, C. P.
Jimenez-Garate, M.
Jimenez-Garate, M. A.
Kalyanaraman, R.
Kanou, Y.
Kitou, H.
Koglin, J. E.
Kowalski, M. P.
Krieger, A.
Kunieda, H.
Kunieida, H.
Lai, B.
Lanzara, E.
Liu, C.
Lodha, G. S.
Loughlin, J. E. A.
Madan, A.
Madsen, K. K.
Mancini, D. C.
Mao, P. H.
Marzorati, A.
Matsui, Y.
Mattaini, E.
Mazzoleni, F.
Mengali, A.
Misiano, C.
Miyata, E.
Miyazawa, T.
Nakajo, N.
Nakamura, N.
Namba, Y.
Nanba, Y.
Negri, B.
Ogasaka, Y.
Okajima, T.
Owens, S. M.
Pareschi, G.
Parodi, G.
Pedersen, K.
Petre, R.
Purcell, W. R.
Romaine, S.
Sacco, B.
Santambrogio, E.
Sasaki, N.
Serlemitsos, P.
Serlemitsos, P. J.
Shibata, R.
Simnett, G. M.
Soong, Y.
Spiga, D.
Suzuki, Y.
Takacs, P.
Takacs, P. Z.
Takahashi, S.
Takata, H.
Tamura, K.
Tawara, Y.
Tsunemi, H.
Tsusaka, Y.
Tueller, J.
Ueno, D.
Uesugi, K.
Ulmer, M. P.
Windt, D. L.
Yamashita, K.
Young, E. E.
Yu, J.
Ziegler, E.

Adv. Space Res.

Y. Tawara, K. Yamashita, Y. Ogasaka, K. Tamura, K. Haga, T. Okajima, S. Ichimaru, S. Takahashi, A. Gotou, H. Kitou, S. Fukuda, Y. Tsusaka, H. Kunieida, J. Tueller, P. J. Serlemitsos, Y. Soong, K. Chan, S. M. Owens, B. Barber, E. Dereniak, and E. E. Young, “A hard X-ray telescope with multilayer supermirrors for balloon observations of cosmic X-ray sources,” Adv. Space Res. 30(5), 1313–1319 (2002). [CrossRef]

Appl. Opt.

J. Appl. Phys.

D. L. Windt, F. E. Christensen, W. W. Craig, C. Hailey, F. A. Harrison, M. Jimenez-Garate, R. Kalyanaraman, and P. H. Mao, “Growth, structure, and performance of depth-graded W/Si multilayers for hard X-ray optics,” J. Appl. Phys. 88(1), 460–470 (2000). [CrossRef]

Opt. Eng.

M. A. Jimenez-Garate, W. W. Craig, C. J. Hailey, F. E. Christensen, and A. Hussain, “Fabrication, performance, and figure metrology of epoxy-replicated aluminum foils for hard x-ray focusing mulitlyaer-coated segmented conical optics,” Opt. Eng. 39(11), 2982–2994 (2000). [CrossRef]

Proc. SPIE

Y. Soong, K. Chan, and P. J. Serlemitsos, “Recent advance in segmented thin-foil X-ray optics,” Proc. SPIE 4496, 54–61 (2002). [CrossRef]
A. Furuzawa, K. Yamashita, H. Kunieda, Y. Tawara, K. Tamura, K. Haga, N. Nakamura, N. Nakajo, H. Takata, T. Okajima, Y. Ogasaka, G. S. Lodha, and Y. Nanba, “Replication of multilayer supermirror,” Proc. SPIE 3444, 576–582 (1998). [CrossRef]
Y. Ogasaka, K. Tamura, T. Miyazawa, Y. Fukaya, T. Iwahara, N. Sasaki, A. Furuzawa, Y. Haba, Y. Kanou, D. Ueno, H. Kunieda, K. Yamashita, R. Shibata, T. Okajima, J. Tueller, P. Serlemitsos, Y. Soong, K.-W. Chan, E. Miyata, H. Tsunemi, K. Uesugi, Y. Suzuki, and Y. Namba, “Thin-foil multilayer-supermirror hard X-ray telescope for InFOCμS/SUMIT balloon experiments and NeXT satellite program,” Proc. SPIE 6688, 668803, 668803-8 (2007). [CrossRef]
G. Pareschi, S. Basso, O. Citterio, M. Ghigo, F. Mazzoleni, D. Spiga, W. Burkert, M. Freyberg, G. D. Hartner, G. Conti, E. Mattaini, G. Grisoni, G. Balsecchi, B. Negri, G. Parodi, and A. Marzorati, “Development of grazing-incidence multilayer mirrors by direct Ni electroforming replication: a status report,” Proc. SPIE 5900, 590008, 590008-12 (2005). [CrossRef]
K. K. Madsen, F. E. Christensen, C. P. Jensen, E. Ziegler, W. W. Craig, K. Gunderson, J. E. Koglin, and K. Pedersen, “X-ray study of W/Si multilayers for the HEFT hard X-ray telescope,” Proc. SPIE 5168, 41–52 (2004). [CrossRef]
M. P. Ulmer, R. Altkorn, A. Madan, M. Graham, Y.-W. Chung, A. Krieger, C. Liu, B. Lai, D. C. Mancini, and P. Takacs, “The fabrication of Wolter I multilayer coated optics via electroforming: an update,” Proc. SPIE 3773, 113–121 (1999). [CrossRef]
Y. Soong, L. Jalota, and P. J. Serlemitsos, “Conical thin foil X-ray mirror fabrication via surface replication,” Proc. SPIE 2515, 64–69 (1995). [CrossRef]
Y. Tawara, K. Yamashita, H. Kunieda, K. Tamura, A. Furuzawa, K. Haga, N. Nakajo, T. Okajima, H. Takata, P. J. Serlemitsos, J. Tueller, R. Petre, Y. Soong, K. Chan, G. S. Lodha, Y. Namba, and J. Yu, “Development of multilayer supermirror for hard X-ray telescope,” Proc. SPIE 3444, 569–575 (1998). [CrossRef]
G. Pareschi, O. Citterio, M. Ghigo, F. Mazzoleni, A. Mengali, and C. Misiano, “Nickel replicated multilayer optics for soft and hard X-ray telescopes,” Proc. SPIE 4012, 284–293 (2000). [CrossRef]
G. Pareschi, O. Citterio, M. Ghigo, F. Mazzoleni, P. Gorenstein, S. Romaine, and G. Parodi, “Replication by Ni electroforming approach to produce the Con-X/HXT hard X-ray mirrors,” Proc. SPIE 4851, 528–537 (2003). [CrossRef]

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