A multiple height-transfer interferometric technique

doi:10.1364/OE.19.016365

A multiple height-transfer interferometric technique

Hao Yu, Carl Aleksoff, and Jun Ni »View Author Affiliations

Optics Express, Vol. 19, Issue 17, pp. 16365-16374 (2011)
http://dx.doi.org/10.1364/OE.19.016365

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Abstract

We propose a multiple height-transfer interferometric technique based on concepts from both multiple wavelength interferometry and wavelength scanning interferometry. Conventional multiple wavelength interferometry requires accurate wavelength information for large step height measurement, while wavelength scanning interferometry is limited by mode-hop-free tuning range. Using the multiple reference heights, it is possible to bypass the wavelength determinations and achieve large step height measurement using relative phase changes. By applying this technique with a proposed multiple height calibration artifact, we experimentally demonstrated accuracy better than 1 micron over 100 mm in a workshop environment.

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.2880) Instrumentation, measurement, and metrology : Holographic interferometry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 5, 2011
Revised Manuscript: July 6, 2011
Manuscript Accepted: July 21, 2011
Published: August 10, 2011

Citation
Hao Yu, Carl Aleksoff, and Jun Ni, "A multiple height-transfer interferometric technique," Opt. Express 19, 16365-16374 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-17-16365

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References

P. Hariharan, Optical interferometry (Academic Press, 2003).
Y. Y. Cheng and J. C. Wyant, “Two-wavelength phase shifting interferometry,” Appl. Opt. 23(24), 4539–4543 (1984). [CrossRef] [PubMed]
A. J. Lewis, Absolute length measurement using multiple-wavelength phase-stepping interferometry (University of London, 1993).
S. H. Lu and C. C. Lee, “Measuring large step heights by variable synthetic wavelength interferometry,” Meas. Sci. Technol. 13(9), 1382–1387 (2002). [CrossRef]
C. C. Aleksoff, “Multi-wavelength digital holographic metrology,” Proc. SPIE 6311, 63111D, 63111D-7 (2006). [CrossRef]
Y. Salvadé, N. Schuhler, S. Lévêque, and S. Le Floch, “High-accuracy absolute distance measurement using frequency comb referenced multiwavelength source,” Appl. Opt. 47(14), 2715–2720 (2008). [CrossRef] [PubMed]
K. H. Bechstein and W. Fuchs, “Absolute interferometric distance measurements applying a variable synthetic wavelength,” J. Opt. 29(3), 179–182 (1998). [CrossRef]
J. A. Stone, A. Stejskal, and L. Howard, “Absolute interferometry with a 670-nm external cavity diode laser,” Appl. Opt. 38(28), 5981–5994 (1999). [CrossRef] [PubMed]
H. J. Yang, J. Deibel, S. Nyberg, and K. Riles, “High-precision absolute distance and vibration measurement with frequency scanned interferometry,” Appl. Opt. 44(19), 3937–3944 (2005). [CrossRef] [PubMed]
E. D. Moore and R. R. McLeod, “Correction of sampling errors due to laser tuning rate fluctuations in swept-wavelength interferometry,” Opt. Express 16(17), 13139–13149 (2008). [CrossRef] [PubMed]
Y. S. Ghim, A. Suratkar, and A. Davies, “Reflectometry-based wavelength scanning interferometry for thickness measurements of very thin wafers,” Opt. Express 18(7), 6522–6529 (2010). [CrossRef] [PubMed]
J. C. Marron and K. W. Gleichman, “Three-dimensional imaging using a tunable laser source,” Opt. Eng. 39(1), 47–51 (2000). [CrossRef]
J. E. Greivenkamp, “Generalized data reduction for heterodyne interferometry,” Opt. Eng. 23, 350–352 (1984).
C. C. Aleksoff and H. Yu, “Discrete step wavemeter,” Proc. SPIE 7790, 77900H, 77900H-10 (2010). [CrossRef]

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[1] P. Hariharan, Optical interferometry (Academic Press, 2003).

[2] Y. Y. Cheng and J. C. Wyant, “Two-wavelength phase shifting interferometry,” Appl. Opt. 23(24), 4539–4543 (1984). [CrossRef] [PubMed]

[3] A. J. Lewis, Absolute length measurement using multiple-wavelength phase-stepping interferometry (University of London, 1993).

[4] S. H. Lu and C. C. Lee, “Measuring large step heights by variable synthetic wavelength interferometry,” Meas. Sci. Technol. 13(9), 1382–1387 (2002). [CrossRef]

[5] C. C. Aleksoff, “Multi-wavelength digital holographic metrology,” Proc. SPIE 6311, 63111D, 63111D-7 (2006). [CrossRef]

[6] Y. Salvadé, N. Schuhler, S. Lévêque, and S. Le Floch, “High-accuracy absolute distance measurement using frequency comb referenced multiwavelength source,” Appl. Opt. 47(14), 2715–2720 (2008). [CrossRef] [PubMed]

[7] K. H. Bechstein and W. Fuchs, “Absolute interferometric distance measurements applying a variable synthetic wavelength,” J. Opt. 29(3), 179–182 (1998). [CrossRef]

[8] J. A. Stone, A. Stejskal, and L. Howard, “Absolute interferometry with a 670-nm external cavity diode laser,” Appl. Opt. 38(28), 5981–5994 (1999). [CrossRef] [PubMed]

[9] H. J. Yang, J. Deibel, S. Nyberg, and K. Riles, “High-precision absolute distance and vibration measurement with frequency scanned interferometry,” Appl. Opt. 44(19), 3937–3944 (2005). [CrossRef] [PubMed]

[10] E. D. Moore and R. R. McLeod, “Correction of sampling errors due to laser tuning rate fluctuations in swept-wavelength interferometry,” Opt. Express 16(17), 13139–13149 (2008). [CrossRef] [PubMed]

[11] Y. S. Ghim, A. Suratkar, and A. Davies, “Reflectometry-based wavelength scanning interferometry for thickness measurements of very thin wafers,” Opt. Express 18(7), 6522–6529 (2010). [CrossRef] [PubMed]

[12] J. C. Marron and K. W. Gleichman, “Three-dimensional imaging using a tunable laser source,” Opt. Eng. 39(1), 47–51 (2000). [CrossRef]

[13] J. E. Greivenkamp, “Generalized data reduction for heterodyne interferometry,” Opt. Eng. 23, 350–352 (1984).

[14] C. C. Aleksoff and H. Yu, “Discrete step wavemeter,” Proc. SPIE 7790, 77900H, 77900H-10 (2010). [CrossRef]

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A multiple height-transfer interferometric technique