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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 17 — Aug. 15, 2011
  • pp: 16365–16374

A multiple height-transfer interferometric technique

Hao Yu, Carl Aleksoff, and Jun Ni  »View Author Affiliations


Optics Express, Vol. 19, Issue 17, pp. 16365-16374 (2011)
http://dx.doi.org/10.1364/OE.19.016365


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Abstract

We propose a multiple height-transfer interferometric technique based on concepts from both multiple wavelength interferometry and wavelength scanning interferometry. Conventional multiple wavelength interferometry requires accurate wavelength information for large step height measurement, while wavelength scanning interferometry is limited by mode-hop-free tuning range. Using the multiple reference heights, it is possible to bypass the wavelength determinations and achieve large step height measurement using relative phase changes. By applying this technique with a proposed multiple height calibration artifact, we experimentally demonstrated accuracy better than 1 micron over 100 mm in a workshop environment.

© 2011 OSA

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.2880) Instrumentation, measurement, and metrology : Holographic interferometry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 5, 2011
Revised Manuscript: July 6, 2011
Manuscript Accepted: July 21, 2011
Published: August 10, 2011

Citation
Hao Yu, Carl Aleksoff, and Jun Ni, "A multiple height-transfer interferometric technique," Opt. Express 19, 16365-16374 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-17-16365


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References

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