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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 18 — Aug. 29, 2011
  • pp: 17390–17395

TiO2 micro-devices fabricated by laser direct writing

Yongsheng Wang, Junjie Miao, Ye Tian, Chuanfei Guo, Jianming Zhang, Tianling Ren, and Qian Liu  »View Author Affiliations

Optics Express, Vol. 19, Issue 18, pp. 17390-17395 (2011)

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Constructing micro/nanostructures based on TiO2 has attracted increasing attention due to the excellent properties of TiO2. In this study, we report a simple method to directly fabricate TiO2 micro-devices, including Fresnel lens, gear structures and suspended beams only by laser direct writing and selective-etching processing. This route shows great potential in fabricating TiO2 structures for micro-electro-mechanical systems, diffractive optical elements and bio-applications, owing to its maskless process, low cost, and flexible dry/wet alternative etching treatment.

© 2011 OSA

OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(350.3390) Other areas of optics : Laser materials processing
(310.6845) Thin films : Thin film devices and applications

ToC Category:
Laser Microfabrication

Original Manuscript: July 12, 2011
Revised Manuscript: August 10, 2011
Manuscript Accepted: August 11, 2011
Published: August 18, 2011

Yongsheng Wang, Junjie Miao, Ye Tian, Chuanfei Guo, Jianming Zhang, Tianling Ren, and Qian Liu, "TiO2 micro-devices fabricated by laser direct writing," Opt. Express 19, 17390-17395 (2011)

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