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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 18 — Aug. 29, 2011
  • pp: 17758–17765

Scalable 3D dense integration of photonics on bulk silicon

Nicolás Sherwood-Droz and Michal Lipson  »View Author Affiliations

Optics Express, Vol. 19, Issue 18, pp. 17758-17765 (2011)

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We experimentally show vertically stacked, multi-layer, low-temperature deposited photonics for integration on processed microelectronics. Waveguides, microrings, and crossings are fabricated out of 400°C PECVD Si3N4 and SiO2 in a two layer configuration. Waveguide losses of ~1 dB/cm in the L-band are demonstrated using standard processing and without post-deposition annealing, along with vertically separated intersections showing −0.04 ± 0.002 dB/cross. Finally 3D drop rings are shown with 25 GHz channels and 24 dB extinction ratio.

© 2011 OSA

OCIS Codes
(130.6750) Integrated optics : Systems
(200.4650) Optics in computing : Optical interconnects

ToC Category:
Integrated Optics

Original Manuscript: June 13, 2011
Manuscript Accepted: August 19, 2011
Published: August 25, 2011

Nicolás Sherwood-Droz and Michal Lipson, "Scalable 3D dense integration of photonics on bulk silicon," Opt. Express 19, 17758-17765 (2011)

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