Chromatic aberration control for tunable all-silicone membrane microlenses

doi:10.1364/OE.19.018584

Chromatic aberration control for tunable all-silicone membrane microlenses

Philipp Waibel, Daniel Mader, Peter Liebetraut, Hans Zappe, and Andreas Seifert »View Author Affiliations

Optics Express, Vol. 19, Issue 19, pp. 18584-18592 (2011)
http://dx.doi.org/10.1364/OE.19.018584

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Abstract

Tunable multi-chamber microfluidic membrane microlenses with achromaticity over a given focal length range are demonstrated. In analogy to a fixed-focus achromatic doublet lens, the multi-lens system is based on a stack of microfluidic cavities filled with optically optimized liquids with precisely defined refractive index and Abbe number, and these are independently pneumatically actuated. The membranes separating the cavities form the refractive optical surfaces, and the curvatures as a function of pressure are calculated using a mechanical model for deformation of flexible plates. The results are combined with optical ray tracing simulations of the multi-lens system to yield chromatic aberration behavior, which is verified experimentally. A focal length tuning range of 5 – 40 mm and reduction in chromatic aberration of over 30% is demonstrated, limited by the availability of optical fluids.

OCIS Codes
(220.1000) Optical design and fabrication : Aberration compensation
(230.3990) Optical devices : Micro-optical devices
(220.1080) Optical design and fabrication : Active or adaptive optics

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: June 24, 2011
Revised Manuscript: July 21, 2011
Manuscript Accepted: July 21, 2011
Published: September 8, 2011

Virtual Issues
Vol. 6, Iss. 10 Virtual Journal for Biomedical Optics

Citation
Philipp Waibel, Daniel Mader, Peter Liebetraut, Hans Zappe, and Andreas Seifert, "Chromatic aberration control for tunable all-silicone membrane microlenses," Opt. Express 19, 18584-18592 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-19-18584

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References

C. Friese, A. Werber, F. Krogmann, W. Mönch, and H. Zappe, “Materials, effects and components for tunable micro-optics,” IEEJ Trans. Electron. Electron. Eng. 2, 232–248 (2007). [CrossRef]
B. Berge and J. Peseux, “Variable focal lens controlled by an external voltage: an application of electrowetting,” Eur. Phys. J. E 3, 159–163 (2000). [CrossRef]
F. Krogmann, W. Mönch, and H. Zappe, “Electrowetting for tunable micro-optics,” J. Microelectromech. Syst. 17, 1501–1512 (2008). [CrossRef]
Y. Choi, J.-H. Park, J.-H. Kim, and S.-D. Lee, “Fabrication of a focal length variable microlens array based on a nematic liquid crystal,” Opt. Mater. 21, 643–646 (2002). [CrossRef]
A. Santiago-Alvarado, S. Vázquez-Montiel, F.-S. Granados-Augustín, J. Gonzalez-García, and E. Rueda-Soriano, “Measurement of aberrations of a solid elastic lens using a point-diffraction interferometer,” Opt. Eng. 49, 123401 (2010). [CrossRef]
Y. C. Seow, A. Q. Liu, L. K. Chin, X. C. Li, H. J. Huang, T. H. Cheng, and X. Q. Zhou, “Different curvatures of tunable liquid microlens via the control of laminar flow rate,” Appl. Phys. Lett. 93, 084101 (2008). [CrossRef]
X. Mao, J. R. Waldeisen, B. K. Juluri, and T. J. Huang, “Hydrodynamically tunable optofluidic cylindrical microlens,” Lab on a Chip 7, 1303–1308 (2007). [CrossRef] [PubMed]
A. Werber and H. Zappe, “Tunable pneumatic micro-optics,” J. Microelectromech. Syst. 17, 1218–1227 (2008). [CrossRef]
S. Reichelt and H. Zappe, “Design of spherically corrected, achromatic variable-focus liquid lenses,” Opt. Express 15, 14146–14154 (2007). [CrossRef] [PubMed]
D. Mader, A. Seifert, and H. Zappe, “Fabrication of aberration-corrected tunable micro-lenses,” in “Proc. of IEEE-LEOS Optical MEMS, Freiburg, Germany ,”(2008), pp. 60–61.
P. Waibel, D. Mader, P. Liebetraut, H. Zappe, and A. Seifert, “Tunable all-silicone multi-chamber achromatic microlens,” in “Proc. of the IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) ,”(2011), pp. 728–731. [CrossRef]
F. Schneider, J. Draheim, R. Kamberger, and U. Wallrabe, “Process and material properties of polydimethylsiloxane (PDMS) for optical MEMS,” Sens. Actuators A, Phys. 151, 95–99 (2009). [CrossRef]
D. Mader, M. Marhöfer, P. Waibel, H. Zappe, and A. Seifert, “Tunable micro-fluidic multi-component microlens system with integrated actuator,” in “Proc. of the IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Hongkong ,”(2010), pp. 799–802. [CrossRef]
S. P. Timosenko and S. Woinowsky-Krieger, Theory of Plates and Shells , 2nd ed. (McGraw-Hill, 1996).
S. Way, “Bending of circular plates with large deflections,” Trans. ASME 56, 627–636 (1934).
M. Freeman and C. C. Hull, Optics , 11th ed. (Butterworth-Heinemann, 2003).

Berge, B.
Cheng, T. H.
Chin, L. K.
Choi, Y.
Draheim, J.
Freeman, M.
Friese, C.
Gonzalez-García, J.
Granados-Augustín, F.-S.
Huang, H. J.
Huang, T. J.
Hull, C. C.
Juluri, B. K.
Kamberger, R.
Kim, J.-H.
Krogmann, F.
Lee, S.-D.
Li, X. C.
Liu, A. Q.
Mao, X.
Mönch, W.
Park, J.-H.
Peseux, J.
Reichelt, S.
Rueda-Soriano, E.
Santiago-Alvarado, A.
Schneider, F.
Seow, Y. C.
Timosenko, S. P.
Vázquez-Montiel, S.
Waldeisen, J. R.
Wallrabe, U.
Way, S.
Werber, A.
Woinowsky-Krieger, S.
Zappe, H.
Zhou, X. Q.

Appl. Phys. Lett.

Y. C. Seow, A. Q. Liu, L. K. Chin, X. C. Li, H. J. Huang, T. H. Cheng, and X. Q. Zhou, “Different curvatures of tunable liquid microlens via the control of laminar flow rate,” Appl. Phys. Lett. 93, 084101 (2008). [CrossRef]

Eur. Phys. J. E

B. Berge and J. Peseux, “Variable focal lens controlled by an external voltage: an application of electrowetting,” Eur. Phys. J. E 3, 159–163 (2000). [CrossRef]

IEEJ Trans. Electron. Electron. Eng.

C. Friese, A. Werber, F. Krogmann, W. Mönch, and H. Zappe, “Materials, effects and components for tunable micro-optics,” IEEJ Trans. Electron. Electron. Eng. 2, 232–248 (2007). [CrossRef]

J. Microelectromech. Syst.

F. Krogmann, W. Mönch, and H. Zappe, “Electrowetting for tunable micro-optics,” J. Microelectromech. Syst. 17, 1501–1512 (2008). [CrossRef]
A. Werber and H. Zappe, “Tunable pneumatic micro-optics,” J. Microelectromech. Syst. 17, 1218–1227 (2008). [CrossRef]

Lab on a Chip

X. Mao, J. R. Waldeisen, B. K. Juluri, and T. J. Huang, “Hydrodynamically tunable optofluidic cylindrical microlens,” Lab on a Chip 7, 1303–1308 (2007). [CrossRef] [PubMed]

Opt. Eng.

A. Santiago-Alvarado, S. Vázquez-Montiel, F.-S. Granados-Augustín, J. Gonzalez-García, and E. Rueda-Soriano, “Measurement of aberrations of a solid elastic lens using a point-diffraction interferometer,” Opt. Eng. 49, 123401 (2010). [CrossRef]

Opt. Express

S. Reichelt and H. Zappe, “Design of spherically corrected, achromatic variable-focus liquid lenses,” Opt. Express 15, 14146–14154 (2007). [CrossRef] [PubMed]

Opt. Mater.

Y. Choi, J.-H. Park, J.-H. Kim, and S.-D. Lee, “Fabrication of a focal length variable microlens array based on a nematic liquid crystal,” Opt. Mater. 21, 643–646 (2002). [CrossRef]

Sens. Actuators A, Phys.

F. Schneider, J. Draheim, R. Kamberger, and U. Wallrabe, “Process and material properties of polydimethylsiloxane (PDMS) for optical MEMS,” Sens. Actuators A, Phys. 151, 95–99 (2009). [CrossRef]

Trans. ASME

S. Way, “Bending of circular plates with large deflections,” Trans. ASME 56, 627–636 (1934).

Other

M. Freeman and C. C. Hull, Optics , 11th ed. (Butterworth-Heinemann, 2003).
D. Mader, M. Marhöfer, P. Waibel, H. Zappe, and A. Seifert, “Tunable micro-fluidic multi-component microlens system with integrated actuator,” in “Proc. of the IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Hongkong ,”(2010), pp. 799–802. [CrossRef]
S. P. Timosenko and S. Woinowsky-Krieger, Theory of Plates and Shells , 2nd ed. (McGraw-Hill, 1996).
D. Mader, A. Seifert, and H. Zappe, “Fabrication of aberration-corrected tunable micro-lenses,” in “Proc. of IEEE-LEOS Optical MEMS, Freiburg, Germany ,”(2008), pp. 60–61.
P. Waibel, D. Mader, P. Liebetraut, H. Zappe, and A. Seifert, “Tunable all-silicone multi-chamber achromatic microlens,” in “Proc. of the IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) ,”(2011), pp. 728–731. [CrossRef]

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