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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 2 — Jan. 17, 2011
  • pp: 1183–1190

Simple fabrication of a double-layer multi-channel optical waveguide using passive alignment

Jin Hwa Ryu, Tea Ho Lee, In-Kui Cho, Chang-Seok Kim, and Myung Yung Jeong  »View Author Affiliations

Optics Express, Vol. 19, Issue 2, pp. 1183-1190 (2011)

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This study proposes a simple and cost-effective method of fabricating a double-layer polymeric optical waveguide, using two hot-embossing processes with a single stamp and template for passive alignment between the top and bottom layers. The two hot-embossing processes were conducted sequentially on the top layer and the bottom layer of the polymer layer. The second hot-embossing process was conducted after fabricating the buffer layer on the surface of the polymeric channel structure to control deformation and destruction of the previously fabricated polymeric channel structure. Passive alignment of the channel structure for the top layer and the bottom layer was automatically performed by simple insertion of the stamp and polymer layer using a metal template with the same dimensions (width x length) as the stamp. Regarding the polymer layer, the buffer layer on the side with the channel structure was coated, whereas the layer contacting the stamp did not have a buffer layer. For the purposes of this study, a 2 x 50 channel polymeric multimode optical waveguide was fabricated using a stamp with 50 straight ribs, without any coupling between the layers. The fabricated optical waveguide was controlled within positional tolerances of less than ± 5 μm between layers; propagation loss of below 0.2 dB/cm at 850 nm; and channel uniformity of below 0.5 dB.

© 2011 OSA

OCIS Codes
(220.1140) Optical design and fabrication : Alignment
(230.4000) Optical devices : Microstructure fabrication
(230.4170) Optical devices : Multilayers
(250.5460) Optoelectronics : Polymer waveguides
(130.3990) Integrated optics : Micro-optical devices

ToC Category:
Integrated Optics

Original Manuscript: October 21, 2010
Revised Manuscript: December 26, 2010
Manuscript Accepted: January 7, 2011
Published: January 11, 2011

Jin Hwa Ryu, Tea Ho Lee, In-Kui Cho, Chang-Seok Kim, and Myung Yung Jeong, "Simple fabrication of a double-layer multi-channel optical waveguide using passive alignment," Opt. Express 19, 1183-1190 (2011)

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  1. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Nanoimprint lithography,” J. Vac. Sci. Technol. B 14(6), 4129–4133 (1996). [CrossRef]
  2. H. S. Park, H. H. Shin, M. Y. Sung, W. B. Choi, S. W. Choi, and S. Y. Park, “Improvements of defects by patterning using thermal nanoimprint lithography,” Jpn. J. Appl. Phys. 46(No. 4A), 1808–1814 (2007). [CrossRef]
  3. J. H. Ryu, T. H. Lee, S. H. Oh, S. U. Cho, C. S. Kim, and M. Y. Jeong, “Imprinted optical device and its reliability,” Curr. Appl. Phys. 9(2), e7–e11 (2009). [CrossRef]
  4. D. W. Kim, S. H. Ahn, I. K. Cho, D. M. Im, S. M. Shorab Muslim, and H. H. Park, “Fabrication of thermally stable and cost-effective polymeric waveguide for optical printed-circuit board,” Opt. Express 16(21), 16798–16805 (2008). [CrossRef] [PubMed]
  5. H. Schift, S. G. Park, B. K. Jung, C. G. Choi, C. S. Kee, S. P. Han, K. B. Yoon, and J. Gobrecht, “Fabrication of polymer photonic crystals using nanoimprint lithography,” Nanotechnology 16(5), S261–S265 (2005). [CrossRef]
  6. F. Zhang and H. Y. Low, “Ordered three-dimensional hierarchical nanostructures by nanoimprint lithography,” Nanotechnology 17(8), 1884–1890 (2006). [CrossRef]
  7. C. G. Choi, S. P. Han, and M. Y. Jeong, “Two-dimensional polymeric optical waveguide for high-density parallel optical interconnection,” Opt. Commun. 235(1-3), 69–73 (2004). [CrossRef]
  8. W. J. Lee, S. H. Hwang, J. W. Lim, and B. S. Rho, “Polymeric waveguide film with embedded mirror for multilayer optical circuits,” IEEE Photon. Technol. Lett. 21(1), 12–14 (2009). [CrossRef]
  9. A. H. Cannon and W. P. King, “Casting metal microstructures from a flexible and reusable mold,” J. Micromech. Microeng. 19(9), 095016 (2009), doi:. [CrossRef]
  10. J. Narasimhan and I. Papautsky, “Polymer embossing tools for rapid prototyping of plastic microfluidic devices,” J. Micromech. Microeng. 14(1), 96–103 (2004). [CrossRef]

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