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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 2 — Jan. 17, 2011
  • pp: 584–596

Phase-shifting interferometry based on induced vibrations

J. Vargas, J. Antonio. Quiroga, A. Álvarez-Herrero, and T. Belenguer  »View Author Affiliations

Optics Express, Vol. 19, Issue 2, pp. 584-596 (2011)

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The presence of uncontrolled mechanical vibrations is typically the main precision-limiting factor of a phase-shifting interferometer. We present a method that instead of trying to insolate vibrations; it takes advantage of their presence to produce the different phase-steps. The method is based on spatial and time domain processing techniques to compute first the different unknown phase-steps and then reconstruct the phase from these tilt-shifted interferograms. In order to compensate the camera movement, it is needed to perform an affine registration process between the different interferograms. Simulated and experimental results demonstrate the effectiveness of the proposed technique without the use of any phase-shifter device.

© 2011 OSA

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 18, 2010
Revised Manuscript: August 2, 2010
Manuscript Accepted: August 4, 2010
Published: January 5, 2011

J. Vargas, J. Antonio. Quiroga, A. Álvarez-Herrero, and T. Belenguer, "Phase-shifting interferometry based on induced vibrations," Opt. Express 19, 584-596 (2011)

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  1. K. Creath, “Phase-shifting interferometry techniques,” Prog. Opt. 26, 350–393 (1988).
  2. D. Malacara, M. Servín, and Z. Malacara, Interferogram analysis for optical testing, (Marcel Dekker, Inc, 1998)
  3. K. A. Goldberg and J. Bokor, “Fourier-transform method of phase-shift determination,” Appl. Opt. 40(17), 2886–2894 (2001). [CrossRef]
  4. Z. Wang and B. Han, “Advanced iterative algorithm for phase extraction of randomly phase-shifted interferograms,” Opt. Lett. 29(14), 1671–1673 (2004). [CrossRef] [PubMed]
  5. M. Chen, H. Guo, and C. Wei, “Algorithm immune to tilt phase-shifting error for phase-shifting interferometers,” Appl. Opt. 39(22), 3894–3898 (2000). [CrossRef]
  6. A. Dobroiu, D. Apostol, V. Nascov, and V. Damian, “Tilt-compensating algorithm for phase-shift interferometry,” Appl. Opt. 41(13), 2435–2439 (2002). [CrossRef] [PubMed]
  7. J. Xu, Q. Xu, and L. Chai, “Tilt-shift determination and compensation in phase-shifting interferometry,” J. Opt. A, Pure Appl. Opt. 10(7), 075011 (2008). [CrossRef]
  8. Z. Ge and M. Takeda, “Self-reference method for phase-shift interferometry,” Proc. SPIE 4416, 152–157 (2001). [CrossRef]
  9. G. Rodriguez-Zurita, N. I. Toto-Arellano, C. Meneses-Fabian, and J. F. Vázquez-Castillo, “One-shot phase-shifting interferometry: five, seven, and nine interferograms,” Opt. Lett. 33(23), 2788–2790 (2008). [CrossRef] [PubMed]
  10. R. Hartley, and A. Zisserman, Multiple View Geometry in Computer Vision, (Cambridge University Press, 2004).
  11. C. Harris, and M. J. Stephens, “A combined corner and edge detector,” in Alvey Vision Conference, pp. 147–152 (1988).
  12. J. C. Wyant, and K. Creath, “Basic Wavefront Aberation Theory of Optical Metrology,” in Applied Optics and Optical Engineering, Vol. XI, Chapter 1, Academic Press (1992).

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