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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 2 — Jan. 17, 2011
  • pp: 861–869

Fabrication and characterization of High Q polymer micro-ring resonator and its application as a sensitive ultrasonic detector

Tao Ling, Sung-Liang Chen, and L. Jay Guo  »View Author Affiliations

Optics Express, Vol. 19, Issue 2, pp. 861-869 (2011)

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Smooth sidewall silicon micro-ring molds have been fabricated using resist reflow and thermal oxidation method. High Q factor polymer micro-ring resonators have been fabricated using these molds. Quality factors as high as 105 have been measured at telecommunication wavelength range. By carefully examining the different loss mechanisms in polymer micro-ring, we find that the surface scattering loss can be as low as 0.23 dB/cm, much smaller than the absorption loss of the polystyrene polymer used in our devices. When used as an ultrasound detector such a high Q polymer micro-ring device can achieve an acoustic sensitivity around 36.3 mV/kPa with 240 μW operating power. A noise equivalent pressure (NEP) is around 88 Pa over a bandwidth range of 1–75 MHz. We have improved the NEP by a factor of 3 compared to our previous best result.

© 2011 OSA

OCIS Codes
(130.6010) Integrated optics : Sensors
(140.4780) Lasers and laser optics : Optical resonators
(170.7170) Medical optics and biotechnology : Ultrasound
(230.5750) Optical devices : Resonators

ToC Category:

Original Manuscript: October 27, 2010
Revised Manuscript: December 18, 2010
Manuscript Accepted: December 23, 2010
Published: January 6, 2011

Tao Ling, Sung-Liang Chen, and L. Jay Guo, "Fabrication and characterization of High Q polymer micro-ring resonator and its application as a sensitive ultrasonic detector," Opt. Express 19, 861-869 (2011)

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