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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 20 — Sep. 26, 2011
  • pp: 18903–18909

High-finesse cavities fabricated by buckling self-assembly of a-Si/SiO2 multilayers

T. W. Allen, J. Silverstone, N. Ponnampalam, T. Olsen, A. Meldrum, and R. G. DeCorby  »View Author Affiliations

Optics Express, Vol. 19, Issue 20, pp. 18903-18909 (2011)

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Arrays of half-symmetric Fabry-Perot micro-cavities were fabricated by controlled formation of circular delamination buckles within a-Si/SiO2 multilayers. Cavity height scales approximately linearly with diameter, in reasonable agreement with predictions based on elastic buckling theory. The measured finesse (F > 103) and quality factors (Q > 104 in the 1550 nm range) are close to reflectance limited predictions, indicating that the cavities have low roughness and few defects. Degenerate Hermite-Gaussian and Laguerre-Gaussian modes were observed, suggesting a high degree of cylindrical symmetry. Given their silicon-based fabrication, these cavities hold promise as building blocks for integrated optical sensing systems.

© 2011 OSA

OCIS Codes
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(130.3120) Integrated optics : Integrated optics devices
(230.4170) Optical devices : Multilayers
(130.7408) Integrated optics : Wavelength filtering devices

ToC Category:
Integrated Optics

Original Manuscript: July 6, 2011
Revised Manuscript: August 20, 2011
Manuscript Accepted: August 23, 2011
Published: September 14, 2011

T. W. Allen, J. Silverstone, N. Ponnampalam, T. Olsen, A. Meldrum, and R. G. DeCorby, "High-finesse cavities fabricated by buckling self-assembly of a-Si/SiO2 multilayers," Opt. Express 19, 18903-18909 (2011)

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