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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 20 — Sep. 26, 2011
  • pp: 19190–19198

MEMS Bragg grating force sensor

Kasper Reck, Erik V. Thomsen, and Ole Hansen  »View Author Affiliations

Optics Express, Vol. 19, Issue 20, pp. 19190-19198 (2011)

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We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh environments and for remote and distributed sensing and has a measured sensitivity of −14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors.

© 2011 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(220.4880) Optical design and fabrication : Optomechanics
(230.1150) Optical devices : All-optical devices

ToC Category:
Integrated Optics

Original Manuscript: July 8, 2011
Revised Manuscript: August 24, 2011
Manuscript Accepted: August 24, 2011
Published: September 19, 2011

Kasper Reck, Erik V. Thomsen, and Ole Hansen, "MEMS Bragg grating force sensor," Opt. Express 19, 19190-19198 (2011)

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