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MEMS Bragg grating force sensor |
Optics Express, Vol. 19, Issue 20, pp. 19190-19198 (2011)
http://dx.doi.org/10.1364/OE.19.019190
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Abstract
We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh environments and for remote and distributed sensing and has a measured sensitivity of −14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors.
© 2011 OSA
OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(220.4880) Optical design and fabrication : Optomechanics
(230.1150) Optical devices : All-optical devices
ToC Category:
Integrated Optics
History
Original Manuscript: July 8, 2011
Revised Manuscript: August 24, 2011
Manuscript Accepted: August 24, 2011
Published: September 19, 2011
Citation
Kasper Reck, Erik V. Thomsen, and Ole Hansen, "MEMS Bragg grating force sensor," Opt. Express 19, 19190-19198 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-20-19190
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References
- Z. Zhou and J. Ou, “Techniques of temperature compensation for FBG strain sensors used in long-term structural monitoring,” Proc. SPIE, 167–172 (2005). [CrossRef]
- H. Fu, J. Fu, and X. Qiao, “High sensitivity fiber Bragg grating pressure difference sensor,” Chin. Opt. Lett.2, 621–623 (2004).
- J. A. Plaza, A. Llobera, C. Dominguez, J. Esteve, I. Salinas, J. Garcia, and J. Berganzo, “BESOI-based integrated optical silicon accelerator,” J. Microelectromech. Syst.13, 355–364 (2004). [CrossRef]
- D. Yin, D. W. Deamer, H. Schmidt, J. P. Barber, and A. R. Hawkins, “Integrated optical waveguides with liquid cores,” Appl. Phys. Lett.85, 3477–3479 (2004). [CrossRef]
- X.-jin Lia, C.-jun Qiu, Y.-long Deng, W. Qu, and J.-N. He, “An MEMS optical fiber pressure sensor based on a square silicon diaphragm: numerical simulation and experimental verification,” Int. J. Nonlinear Sci. Numer. Simul.11, 225–229 (2010). [CrossRef]
- Q. Wang, Z. Fen, F. Deng, G. Huang, L. Yan, and Y. Dai, “Fiber Bragg gratings for strain sensing in high temperature superconducting magnet,” IEEE Trans. Appl. Supercond.17, 2377–2380 (2007). [CrossRef]
- Y. I. Rzhavin, “Fiber-optic polarization pressure sensor,” Meas. Tech.45, 738–741 (2002). [CrossRef]
- E. Bonnotte, C. Gorecki, H. Toshiyoshi, H. Kawakatsu, H. Fujita, K. Worhoff, and K. Hashimoto, “Guided-wave acoustooptic interaction with phase modulation in a ZnO thin-film transducer on an Si-based integrated Mach-Zehnder interferometer,” J. Lightwave Technol.17, 35–42 (1999). [CrossRef]
- D. Graham-Rowe, “Sensors take the strain,” Nat. Photonics1, 307–309 (2007). [CrossRef]
- W. Zhang, E. Li, J. Xi, J. Chicharo, and X. Dong, “Novel temperature-independent FBG-type force sensor,” Meas. Sci. Technol.16, 1600–1604 (2005). [CrossRef]
- L. Ren, J. Chen, H.-N. Li, G. Song, and X. Ji, “Design and application of a fiber Bragg grating strain sensor with enhanced sensitivity in the small-scale dam model,” Smart Mater. Struct.18, 035015 (2009). [CrossRef]
- W. Zhang, X. Dong, Q. Zhao, G. Kai, and S. Yuan, “FBG-type sensor for simultaneous measurement of force (or displacement) and temperature based on bilateral cantilever beam,” IEEE Photon. Technol. Lett.13, 1340–1342 (2001). [CrossRef]
- L. Eldada, “Polymer integrated optics: promise vs. practicality,” Org. Photon. Mater. Dev. IV4642, 11–22 (2002).
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