Fresnel zone plates (450 nm thick Au, 25 nm outermost zone width) used as objective lenses in a full field transmission reached a spatial resolution better than 20 nm and 1.5% efficiency with 8 keV photons. Zernike phase contrast was also realized without compromising the resolution. These are very significant achievements in the rapid progress of high-aspect-ratio zone plate fabrication by combined electron beam lithography and electrodeposition.

© 2011 OSA

1. G. Margaritondo, Y. Hwu, and J. H. Je, “Synchrotron light in medical and materials science radiology,” Riv. Nuovo Cim.27, 1–40 (2004).
2. X. Cai, H. H. Chen, C. L. Wang, S. T. Chen, S. F. Lai, C. C. Chien, Y. Y. Chen, I. M. Kempson, Y. Hwu, C. S. Yang, and G. Margaritondo, “Imaging the cellular uptake of tiopronin-modified gold nanoparticles,” Anal. Bioanal. Chem.401(3), 809–816 (2011). [CrossRef] [PubMed]
3. P. C. Hsu, Y. S. Chu, J. Yi, C. L. Wang, S. R. Wu, Y. Hwu, and G. Margaritondo, “Dynamical growth behavior of copper clusters during electrodeposition,” Appl. Phys. Lett.97(3), 033101 (2010). [CrossRef]
4. H. H. Chen, C. C. Chien, C. Petibois, C. L. Wang, Y. S. Chu, S. F. Lai, T. E. Hua, Y. Y. Chen, X. Cai, I. M. Kempson, Y. Hwu, and G. Margaritondo, “Quantitative analysis of nanoparticle internalization in mammalian cells by high resolution X-ray microscopy,” J. Nanobiotechnology9(1), 14 (2011). [CrossRef] [PubMed]
5. F. K. Huang, W. C. Chen, S. F. Lai, C. J. Liu, C. L. Wang, C. H. Wang, H. H. Chen, T. E. Hua, Y. Y. Cheng, M. K. Wu, Y. Hwu, C. S. Yang, and G. Margaritondo, “Enhancement of irradiation effects on cancer cells by cross-linked dextran-coated iron oxide (CLIO) nanoparticles,” Phys. Med. Biol.55(2), 469–482 (2010). [CrossRef] [PubMed]
6. Y. T. Chen, T. N. Lo, C. W. Chiu, J. Y. Wang, C. L. Wang, C. J. Liu, S. R. Wu, S. T. Jeng, C. C. Yang, J. Shiue, C. H. Chen, Y. Hwu, G. C. Yin, H. M. Lin, J. H. Je, and G. Margaritondo, “Fabrication of high-aspect-ratio Fresnel zone plates by e-beam lithography and electroplating,” J. Synchrotron Radiat.15(2), 170–175 (2008). [CrossRef] [PubMed]
7. D. Attwood, Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Cambridge University Press, Cambridge, 1999).
8. G. C. Yin, Y. F. Song, M. T. Tang, F. R. Chen, K. S. Liang, F. W. Duewer, M. Feser, W. Yun, and H. P. D. Shieh, “30 nm resolution x-ray imaging at 8 keV using third order diffraction of a zone plate lens objective in a transmission microscope,” Appl. Phys. Lett.89(22), 221122 (2006). [CrossRef]
9. S. Rehbein, S. Heim, P. Guttmann, S. Werner, and G. Schneider, “Ultrahigh-resolution soft-X-ray microscopy with zone plates in high orders of diffraction,” Phys. Rev. Lett.103(11), 110801 (2009). [CrossRef] [PubMed]
10. J. Yi, Y. S. Chu, Y. T. Chen, T. Y. Chen, Y. Hwu, and G. Margaritondo, “High-resolution hard-X-ray microscopy using second-order zone plate diffraction,” J. Phys. D Appl. Phys.44(23), 232001 (2011). [CrossRef]
11. W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature435(7046), 1210–1213 (2005). [CrossRef] [PubMed]
12. W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution Fresnel zone plate lens based soft X-ray microscopy,” Opt. Express17(20), 17669–17677 (2009). [CrossRef] [PubMed]
13. Y. T. Chen, T. N. Lo, Y. S. Chu, J. Yi, C. J. Liu, J. Y. Wang, C. L. Wang, C. W. Chiu, T. E. Hua, Y. Hwu, Q. Shen, G. C. Yin, K. S. Liang, H. M. Lin, J. H. Je, and G. Margaritondo, “Full-field hard x-ray microscopy below 30 nm: a challenging nanofabrication achievement,” Nanotechnology19(39), 395302 (2008). [CrossRef] [PubMed]
14. Y. T. Chen, T. Y. Chen, J. Yi, Y. S. Chu, W. K. Lee, C. L. Wang, I. M. Kempson, Y. Hwu, V. Gajdosik, and G. Margaritondo, “Hard x-ray Zernike microscopy reaches 30 nm resolution,” Opt. Lett.36(7), 1269–1271 (2011). [CrossRef] [PubMed]
15. C. C. Chien, C. H. Wang, C. L. Wang, E. R. Li, K. H. Lee, Y. Hwu, C. Y. Lin, S. J. Chang, C. S. Yang, C. Petibois, and G. Margaritondo, “Synchrotron microangiography studies of angiogenesis in mice with microemulsions and gold nanoparticles,” Anal. Bioanal. Chem.397(6), 2109–2116 (2010). [CrossRef] [PubMed]
16. T. N. Lo, Y. T. Chen, C. W. Chiu, C. J. Liu, S. R. Wu, I. K. Lin, C. I. Su, W. D. Chang, Y. Hwu, B. Y. Shew, C. C. Chiang, J. H. Je, and G. Margaritondo, “E-beam lithography and electrodeposition fabrication of thick nanostructured devices,” J. Phys. D Appl. Phys.40(10), 3172–3176 (2007). [CrossRef]
17. S. S. Sarkar, H. H. Solak, J. Raabe, C. David, and J. F. van der Veen, “Fabrication of Fresnel zone plates with 25 nm zone width using extreme ultraviolet holography,” Microelectron. Eng.87(5-8), 854–858 (2010). [CrossRef]
18. R. Divan, D. C. Mancini, N. Moldovan, B. Lai, L. Assoufid, Q. Leonard, and F. Cerrina, “Progress in the fabrication of high-aspect-ratio zone plates by soft X-ray lithography,” SPIE4783, 82–91 (2002). [CrossRef]
19. M. Altissimo, F. Romanato, L. Vaccari, L. Businaro, D. Cojoc, B. Kaulich, S. Cabrini, and E. D. Fabrizio, “X-ray lithography fabrication of a zone plate for X-rays in the range from 15 to 30 keV,” Microelectron. Eng.61–62(1-3), 173–177 (2002). [CrossRef]
20. L. Liu, G. Liu, Y. Xiong, J. Chen, W. Li, and Y. Tian, “Fabrication of X-ray imaging zone plates by e-beam and X-ray lithography,” Microsyst. Technol.16(8-9), 1315–1321 (2010). [CrossRef]
21. Y. F. Song, C. H. Chang, C. Y. Liu, S. H. Chang, U. S. Jeng, Y. H. Lai, D. G. Liu, S. C. Chung, K. L. Tsang, G. C. Yin, J. F. Lee, H. S. Sheu, M. T. Tang, C. S. Hwang, Y. K. Hwu, and K. S. Liang, “X-ray beamlines for structural studies at the NSRRC superconducting wavelength shifter,” J. Synchrotron Radiat.14(4), 320–325 (2007). [CrossRef] [PubMed]
22. Q. Shen, W.-K. Lee, K. Fezzaa, Y. S. Chu, F. De Carlo, P. Jemian, J. Ilavsky, M. Erdmann, and G. G. Long, “Dedicated full-field X-ray imaging beamline at Advanced Photon Source,” Nucl. Instrum. Methods A582(1), 77–79 (2007). [CrossRef]
23. Y. S. Chu, J. M. Yi, F. De Carlo, Q. Shen, W.-K. Lee, H. J. Wu, C. L. Wang, J. Y. Wang, C. J. Liu, C. H. Wang, S. R. Wu, C. C. Chien, Y. Hwu, A. Tkachuk, W. Yun, M. Feser, K. S. Liang, C. S. Yang, J. H. Je, and G. Margaritondo, “Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution,” Appl. Phys. Lett.92(10), 103119 (2008).
24. S. Vogt, G. Schneider, A. Steuernagel, J. Lucchesi, E. Schulze, D. Rudolph, and G. Schmahl, “X-ray microscopic studies of the drosophila dosage compensation complex,” J. Struct. Biol.132(2), 123–132 (2000). [CrossRef] [PubMed]
25. J. Yi, Y. S. Chu, Y. T. Chen, T. Y. Chen, Y. Hwu, and G. Margaritondo, “High-resolution hard-X-ray microscopy using second-order zone plate diffraction,” J. Phys. D Appl. Phys.44(23), 232001 (2011). [CrossRef]

Anal. Bioanal. Chem.

• X. Cai, H. H. Chen, C. L. Wang, S. T. Chen, S. F. Lai, C. C. Chien, Y. Y. Chen, I. M. Kempson, Y. Hwu, C. S. Yang, and G. Margaritondo, “Imaging the cellular uptake of tiopronin-modified gold nanoparticles,” Anal. Bioanal. Chem.401(3), 809–816 (2011). [CrossRef] [PubMed]
• C. C. Chien, C. H. Wang, C. L. Wang, E. R. Li, K. H. Lee, Y. Hwu, C. Y. Lin, S. J. Chang, C. S. Yang, C. Petibois, and G. Margaritondo, “Synchrotron microangiography studies of angiogenesis in mice with microemulsions and gold nanoparticles,” Anal. Bioanal. Chem.397(6), 2109–2116 (2010). [CrossRef] [PubMed]

Appl. Phys. Lett.

• P. C. Hsu, Y. S. Chu, J. Yi, C. L. Wang, S. R. Wu, Y. Hwu, and G. Margaritondo, “Dynamical growth behavior of copper clusters during electrodeposition,” Appl. Phys. Lett.97(3), 033101 (2010). [CrossRef]
• G. C. Yin, Y. F. Song, M. T. Tang, F. R. Chen, K. S. Liang, F. W. Duewer, M. Feser, W. Yun, and H. P. D. Shieh, “30 nm resolution x-ray imaging at 8 keV using third order diffraction of a zone plate lens objective in a transmission microscope,” Appl. Phys. Lett.89(22), 221122 (2006). [CrossRef]
• Y. S. Chu, J. M. Yi, F. De Carlo, Q. Shen, W.-K. Lee, H. J. Wu, C. L. Wang, J. Y. Wang, C. J. Liu, C. H. Wang, S. R. Wu, C. C. Chien, Y. Hwu, A. Tkachuk, W. Yun, M. Feser, K. S. Liang, C. S. Yang, J. H. Je, and G. Margaritondo, “Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution,” Appl. Phys. Lett.92(10), 103119 (2008).

J. Nanobiotechnology

• H. H. Chen, C. C. Chien, C. Petibois, C. L. Wang, Y. S. Chu, S. F. Lai, T. E. Hua, Y. Y. Chen, X. Cai, I. M. Kempson, Y. Hwu, and G. Margaritondo, “Quantitative analysis of nanoparticle internalization in mammalian cells by high resolution X-ray microscopy,” J. Nanobiotechnology9(1), 14 (2011). [CrossRef] [PubMed]

J. Phys. D Appl. Phys.

• T. N. Lo, Y. T. Chen, C. W. Chiu, C. J. Liu, S. R. Wu, I. K. Lin, C. I. Su, W. D. Chang, Y. Hwu, B. Y. Shew, C. C. Chiang, J. H. Je, and G. Margaritondo, “E-beam lithography and electrodeposition fabrication of thick nanostructured devices,” J. Phys. D Appl. Phys.40(10), 3172–3176 (2007). [CrossRef]
• J. Yi, Y. S. Chu, Y. T. Chen, T. Y. Chen, Y. Hwu, and G. Margaritondo, “High-resolution hard-X-ray microscopy using second-order zone plate diffraction,” J. Phys. D Appl. Phys.44(23), 232001 (2011). [CrossRef]
• J. Yi, Y. S. Chu, Y. T. Chen, T. Y. Chen, Y. Hwu, and G. Margaritondo, “High-resolution hard-X-ray microscopy using second-order zone plate diffraction,” J. Phys. D Appl. Phys.44(23), 232001 (2011). [CrossRef]

J. Struct. Biol.

• S. Vogt, G. Schneider, A. Steuernagel, J. Lucchesi, E. Schulze, D. Rudolph, and G. Schmahl, “X-ray microscopic studies of the drosophila dosage compensation complex,” J. Struct. Biol.132(2), 123–132 (2000). [CrossRef] [PubMed]

J. Synchrotron Radiat.

• Y. F. Song, C. H. Chang, C. Y. Liu, S. H. Chang, U. S. Jeng, Y. H. Lai, D. G. Liu, S. C. Chung, K. L. Tsang, G. C. Yin, J. F. Lee, H. S. Sheu, M. T. Tang, C. S. Hwang, Y. K. Hwu, and K. S. Liang, “X-ray beamlines for structural studies at the NSRRC superconducting wavelength shifter,” J. Synchrotron Radiat.14(4), 320–325 (2007). [CrossRef] [PubMed]
• Y. T. Chen, T. N. Lo, C. W. Chiu, J. Y. Wang, C. L. Wang, C. J. Liu, S. R. Wu, S. T. Jeng, C. C. Yang, J. Shiue, C. H. Chen, Y. Hwu, G. C. Yin, H. M. Lin, J. H. Je, and G. Margaritondo, “Fabrication of high-aspect-ratio Fresnel zone plates by e-beam lithography and electroplating,” J. Synchrotron Radiat.15(2), 170–175 (2008). [CrossRef] [PubMed]

Microelectron. Eng.

• S. S. Sarkar, H. H. Solak, J. Raabe, C. David, and J. F. van der Veen, “Fabrication of Fresnel zone plates with 25 nm zone width using extreme ultraviolet holography,” Microelectron. Eng.87(5-8), 854–858 (2010). [CrossRef]
• M. Altissimo, F. Romanato, L. Vaccari, L. Businaro, D. Cojoc, B. Kaulich, S. Cabrini, and E. D. Fabrizio, “X-ray lithography fabrication of a zone plate for X-rays in the range from 15 to 30 keV,” Microelectron. Eng.61–62(1-3), 173–177 (2002). [CrossRef]

Microsyst. Technol.

• L. Liu, G. Liu, Y. Xiong, J. Chen, W. Li, and Y. Tian, “Fabrication of X-ray imaging zone plates by e-beam and X-ray lithography,” Microsyst. Technol.16(8-9), 1315–1321 (2010). [CrossRef]

Nanotechnology

• Y. T. Chen, T. N. Lo, Y. S. Chu, J. Yi, C. J. Liu, J. Y. Wang, C. L. Wang, C. W. Chiu, T. E. Hua, Y. Hwu, Q. Shen, G. C. Yin, K. S. Liang, H. M. Lin, J. H. Je, and G. Margaritondo, “Full-field hard x-ray microscopy below 30 nm: a challenging nanofabrication achievement,” Nanotechnology19(39), 395302 (2008). [CrossRef] [PubMed]

Nature

• W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature435(7046), 1210–1213 (2005). [CrossRef] [PubMed]

Nucl. Instrum. Methods A

• Q. Shen, W.-K. Lee, K. Fezzaa, Y. S. Chu, F. De Carlo, P. Jemian, J. Ilavsky, M. Erdmann, and G. G. Long, “Dedicated full-field X-ray imaging beamline at Advanced Photon Source,” Nucl. Instrum. Methods A582(1), 77–79 (2007). [CrossRef]

Opt. Express

• W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution Fresnel zone plate lens based soft X-ray microscopy,” Opt. Express17(20), 17669–17677 (2009). [CrossRef] [PubMed]

Opt. Lett.

• Y. T. Chen, T. Y. Chen, J. Yi, Y. S. Chu, W. K. Lee, C. L. Wang, I. M. Kempson, Y. Hwu, V. Gajdosik, and G. Margaritondo, “Hard x-ray Zernike microscopy reaches 30 nm resolution,” Opt. Lett.36(7), 1269–1271 (2011). [CrossRef] [PubMed]

Phys. Med. Biol.

• F. K. Huang, W. C. Chen, S. F. Lai, C. J. Liu, C. L. Wang, C. H. Wang, H. H. Chen, T. E. Hua, Y. Y. Cheng, M. K. Wu, Y. Hwu, C. S. Yang, and G. Margaritondo, “Enhancement of irradiation effects on cancer cells by cross-linked dextran-coated iron oxide (CLIO) nanoparticles,” Phys. Med. Biol.55(2), 469–482 (2010). [CrossRef] [PubMed]

Phys. Rev. Lett.

• S. Rehbein, S. Heim, P. Guttmann, S. Werner, and G. Schneider, “Ultrahigh-resolution soft-X-ray microscopy with zone plates in high orders of diffraction,” Phys. Rev. Lett.103(11), 110801 (2009). [CrossRef] [PubMed]

Riv. Nuovo Cim.

• G. Margaritondo, Y. Hwu, and J. H. Je, “Synchrotron light in medical and materials science radiology,” Riv. Nuovo Cim.27, 1–40 (2004).

SPIE

• R. Divan, D. C. Mancini, N. Moldovan, B. Lai, L. Assoufid, Q. Leonard, and F. Cerrina, “Progress in the fabrication of high-aspect-ratio zone plates by soft X-ray lithography,” SPIE4783, 82–91 (2002). [CrossRef]

Other

• D. Attwood, Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Cambridge University Press, Cambridge, 1999).

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